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Effect of High-Temperature Post-Oxidation Annealing in Diluted Nitric Oxide Gas on the SiO2/4H-SiC Interface (4H-SiC와 산화막 계면에 대한 혼합된 일산화질소 가스를 이용한 산화 후속 열처리 효과)

  • In kyu Kim;Jeong Hyun Moon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.1
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    • pp.101-105
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    • 2024
  • 4H-SiC power metal-oxide-semiconductor field effect transistors (MOSFETs) have been developed to achieve lower specific-on-resistance (Ron,sp), and the gate oxides have been thermally grown. The poor channel mobility resulting from the high interface trap density (Dit) at the SiO2/4H-SiC interface significantly affects the higher switching loss of the power device. Therefore, the development of novel fabrication processes to enhance the quality of the SiO2/4H-SiC interface is required. In this paper, NO post-oxidation annealing (POA) by using the conditions of N2 diluted NO at a high temperature (1,300℃) is proposed to reduce the high interface trap density resulting from thermal oxidation. The NO POA is carried out in various NO ambient (0, 10, 50, and 100% NO mixed with 100, 90, 50, and 0% of high purity N2 gas to achieve the optimized condition while maintaining a high temperature (1,300℃). To confirm the optimized condition of the NO POA, measuring capacitance-voltage (C-V) and current-voltage (I-V), and time-of-flight secondary-ion mass spectrometry (ToF-SIMS) are employed. It is confirmed that the POA condition of 50% NO at 1,300℃ facilitates the equilibrium state of both the oxidation and nitridation at the SiO2/4H-SiC interface, thereby reducing the Dit.

Isolation of Scopafungin, a Potent Inhibitor of Phospholipase C from Actinomycetes isolate No. 2511-5 (방선균 분리주 No. 2511-5로부터 포스포리파제 C 저해물질 스코파훈진의 분리)

  • 오원근;이현선;안순철;김보연;박문수;민태익;안종석
    • YAKHAK HOEJI
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    • v.39 no.5
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    • pp.554-559
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    • 1995
  • MT 2511-5 was purified as a inhibitor of phospholipase C(PLC) from culture broth of a Streptmyces sp. NO. 2511-5. It was identified as scopafungin, 36-membered marcrolide by physico-chemical and spectroscopic data. Its $IC_{50}$ was 30.mu.M against phospholipase C and it also showed inhibitory activity against some fungi.

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$In_2O_3$박막위에 증착된 초박막 Co 촉매가 NO 의 감도에 미치는 영향

  • 이혜정;김경국;정종학;김태송;김광주;최원국
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.102-102
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    • 2000
  • 최근 자동차 배기 가스 유출에 의한 환경문제가 심각하게 대두되고 있고, 이에 따라 그 중 NOx, SOx 등의 유해가스 검출을 위한 센서 개발이 강력히 요구되고 있다. 본 실험은 자동차에서 배출되는 NO 가스에 대한 민감한 센서 제작을 목적으로 In2O3 박막을 성장시켜 그 특성을 측정하였고, NO 가스에 대한 민감도를 증가시키기 위해 7 ~32 정도의 초박막 Co 촉매를 증착하여 NO 감도에 미치는 현상을 조사하였다. In2O3 2˝ target(순도 99.99%)을 사용하여 RF power와 Ar/O2의 비를 변화시켜가면서 상온에서 알루미나 기판위에 In2O3 박막 성장시켰다. 박막을 성장시킨 후 10$0^{\circ}C$에서 5$0^{\circ}C$까지 온도를 변화시키면서 공기 중에서 열처리를 하였다. In2O3 박막의 결정성은 XRD를 이용하여 측정하였고 표면 특성을 알아보기 위해 AFM과 SEM 측정을 하였다. XRD 분석결과 상온에서부터 50$0^{\circ}C$까지 회절 peck의 강도차이는 있었지만 모든 시편에서 In2O3 박막이 cubic 구조로 성장함을 알 수 있었다. 100ppm 농도 NO 가스에 대한 센서 소자의 감도를 20$0^{\circ}C$~40$0^{\circ}C$ 온도 영역에서 측정하였다. 순수한 In2O3 의 경우 감도(S=Ra/Rg)는 25$0^{\circ}C$에서 S 6 정도로 가장 좋았다. 반면에 Co 촉매를 표면에 흡착시킨 경우 20$0^{\circ}C$~25$0^{\circ}C$ 부근에서 반응속도가 매우 빨라지고, 150 정도 Co를 흡착시킨 센서의 경우 S 14 로 감도가 매우 향상됨을 알 수 있었다.

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Hybrid Test Data Transportation Scheme for Advanced NoC-Based SoCs

  • Ansari, M. Adil;Kim, Dooyoung;Jung, Jihun;Park, Sungju
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.1
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    • pp.85-95
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    • 2015
  • Network-on-chip (NoC) has evolved to overcome the issues of traditional bus-based on-chip interconnect. In NoC-reuse as TAM, the test schedulers are constrained with the topological position of cores and test access points, which may negatively affect the test time. This paper presents a scalable hybrid test data transportation scheme that allows to simultaneously test multiple heterogeneous cores of NoC-based SoCs, while reusing NoC as TAM. In the proposed test scheme, single test stimuli set of multiple CUTs is embedded into each flit of the test stimuli packets and those packets are multicast to the targeted CUTs. However, the test response packets of each CUT are unicast towards the tester. To reduce network load, a flit is filled with maximum possible test response sets before unicasting towards the tester. With the aid of Verilog and analytical simulations, the proposed scheme is proved effective and the results are compared with some recent techniques.

Multiple Network-on-Chip Model for High Performance Neural Network

  • Dong, Yiping;Li, Ce;Lin, Zhen;Watanabe, Takahiro
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.10 no.1
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    • pp.28-36
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    • 2010
  • Hardware implementation methods for Artificial Neural Network (ANN) have been researched for a long time to achieve high performance. We have proposed a Network on Chip (NoC) for ANN, and this architecture can reduce communication load and increase performance when an implemented ANN is small. In this paper, a multiple NoC models are proposed for ANN, which can implement both a small size ANN and a large size one. The simulation result shows that the proposed multiple NoC models can reduce communication load, increase system performance of connection-per-second (CPS), and reduce system running time compared with the existing hardware ANN. Furthermore, this architecture is reconfigurable and reparable. It can be used to implement different applications of ANN.

A High Performance NoC Architecture Using Data Compression (데이터 압축을 이용한 고성능 NoC 구조)

  • Kim, Hong-Sik;Kim, Hyunjin;Hong, Won-Gi;Kang, Sungho
    • IEMEK Journal of Embedded Systems and Applications
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    • v.5 no.1
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    • pp.1-6
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    • 2010
  • 본 논문에서는 네트워크 온 칩(NoC: network on chip) 구조에서의 내부 데이터 통신의 성능을 최적화 할 수 있는 새로운 온 칩 네트워크 인터페이스 구조를 제안하였다. 제안하는 NoC 구조는 기본적으로 하드웨어 면적을 줄이기 위하여 XY 라우팅 알고리듬을 기반으로 구현되었으며, 전달되는 패킷의 크기 또는 플릿의 개수를 최소화하기 위하여 Golomb-Rice 인코딩/디코딩 알고리듬에 기반을 둔 하드웨어 압축기/해제기를 이용하여 통신되는 데이터의 양을 크게 줄임으로써 네트워크 지연시간을 최소화 할 수 있는 새로운 구조를 제안하였다. 즉 전송될 데이터는 전송자(sender)의 네트워크 인터페이스에서 내장된 하드웨어 인코더를 통해 압축된 형태로 패킷의 개수를 최소화하여 온 칩 네트워크상의 데이터를 업로드하게 된다. 이러한 압축된 데이터가 리시버(receiver)에 도착하면, 하드웨어 디코더를 통해서 원래의 데이터로 복원된다. 사이클 수준의 시뮬레이터를 통하여 제안된 라우터 구조가 온 칩 시스템의 네트워크 지연시간을 크게 줄일 수 있음을 증명하였다.

Simultaneous Catalytic Reduction of NO and N2O over Pd-Rh Supported Mixed Metal Oxide Honeycomb Catalysts - Use of H2 or CO as a Reductant (혼합금속산화물에 담지된 Pd-Rh의 허니컴 촉매에서 NO와 N2O의 동시 환원 - H2 또는 CO 환원제의 사용)

  • Lee, Seung Jae;Moon, Seung Hyun
    • Korean Chemical Engineering Research
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    • v.47 no.1
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    • pp.96-104
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    • 2009
  • In order to lower a reaction temperature with high conversions for simultaneous catalytic reduction of NO and $N_2O$ over Pd-Rh supported mixed metal oxide honeycomb catalysts, $H_2$ or CO was utilized as a reductant. When using the reductants, the effects of reaction conditions were examined in NO and $N_2O$ conversions, where reaction temperatures, concentrations of the reductants and oxygen and the concentration ratio of $N_2O$ to NO were varied. In using $H_2$ reductant, larger than 50% of NO and $N_2O$ conversions was observed at the temperatures below $200^{\circ}C$ in absence of $O_2$. In using CO reductant, NO and $N_2O$ conversions increased from the temperatures higher than $200^{\circ}C$ and $300^{\circ}C$, respectively. However, in use of both reductants, NO and $N_2O$ conversions decreased with increasing oxygen concentration. As a result, $H_2$ reductant could reduce simultaneously NO and $N_2O$ at relatively lower reaction temperature than CO. Also, NO and $N_2O$ conversions were less influenced by using $H_2$ reductant than CO one. Concentration ratio between NO and $N_2O$ did not affect their conversions regardless the type of reductants. Pretreatment of the catalyst in $H_2$ was more effective in simultaneous reduction of NO and $N_2O$ at low reaction temperature than that in $O_2$.

[ De-NOx ] Characteristics for Pt/γ-Alumina/Cordierite Foam Filter of Beads Shape (Pt/γ-Alumina/Cordierite 비드형 세라믹 폼 필터의 NOx 제거 특성)

  • Park, Jung-Wook;Park, Jay-Hyun;Park, Jai-Koo
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.3
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    • pp.277-285
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    • 2007
  • Porous cordierite beads, of which the average pore size was $130{\mu}m$ and porosity was about 80%, were prepared by the foaming method and then their application as support of the $Pt/{\gamma}-alumina$ catalyst for $NO_x$, reduction with propene was investigated. The pressure drop of a 2 mm porous beads filter was less than that of a 1 mm porous beads filter and the difference in pressure drop between these two increased as the flow rate increased. The catalytic activity of $Pt/{\gamma}-alumina$ washcoated on the porous bead was tested with varying Pt loading $(0.005{\sim}0.1g/cm^3),\;C_3H_6/NO$ mole ratio $(0.5{\sim}8)$, space velocity $(20,000{\sim}30,000h^{-1})$ and oxygen contents (1 and 8). Pt loading of $0.04g/cm^3$ showed the highest activity for $NO_x$ conversion. The $De-NO_x$, test was operated in the temperature range of $200{\sim}400^{\circ}C$ and the best operation temperature of the catalytic filter is about $250^{\circ}C$. As the C/N ratio increased, increase of the $NO_x$, conversion might result from the increase in exhaustion of the amount of oxygen by the reduction of hydrocarbon. $NO_x$ conversion at $20,000h^{-1}$ of space velocity shows a maximum 34% higher conversion than that at $30,000h^{-1}$. On condition that $O_2$ was 5%, space velocity was $20,000h^{-1}$ and the C/N ratio was 8, the $NO_x$ conversion exhibited a maximum of 40% at $250^{\circ}C$.

PhaseTransformation of PbO-Precursor Prepared from Lead Nitrate (질산납으로부터 제조된 PbO-전구체의 산변태)

  • Choe, Byeong-Cheol;Lee, Mun-Ho
    • Korean Journal of Materials Research
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    • v.4 no.4
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    • pp.472-476
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    • 1994
  • Phase transformation of PbO-precursor prepared from $Pb(NO_{3})_{2}$ by precipitation technique was observed by TG-DTA, XRD, FT-IR, and Raman spectral analysis. PbO-precursor was derived from an aqueous solution of $Pb(NO_{3})_{2}$ at $45^{\circ}C$ and pH of 9.0. The precipitate showed it to be the mixture of hydrous lead oxynitrate and lead hydroxynitrate. With increasing heat-treatment temperature ranging up to $560^{\circ}C$, the precursor changed to $3Pb(NO_{3})_{2}$ . 7Pb0, $Pb(NO_{3})_{2}$. 5Pb0 and PbO(litharge), in turn. Finally, it transformed to massicot form of PbO above $560^{\circ}C$.

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Mapping and Scheduling for Circuit-Switched Network-on-Chip Architecture

  • Wu, Chia-Ming;Chi, Hsin-Chou;Chang, Ruay-Shiung
    • ETRI Journal
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    • v.31 no.2
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    • pp.111-120
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    • 2009
  • Network-on-chip (NoC) architecture provides a highper-formance communication infrastructure for system-on-chip designs. Circuit-switched networks guarantee transmission latency and throughput; hence, they are suitable for NoC architecture with real-time traffic. In this paper, we propose an efficient integrated scheme which automatically maps application tasks onto NoC tiles, establishes communication circuits, and allocates a proper bandwidth for each circuit. Simulation results show that the average waiting times of packets in a switch in $6{\times}6$6, $8{\times}8$, and $10{\times}10$ mesh NoC networks are 0.59, 0.62, and 0.61, respectively. The latency of circuits is significantly decreased. Furthermore, the buffer of a switch in NoC only needs to accommodate the data of one time slot. The cost of the switch in the circuit-switched network can be reduced using our scheme. Our design provides an effective solution for a critical step in NoC design.

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