• Title/Summary/Keyword: Bowing

Search Result 132, Processing Time 0.044 seconds

GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.08a
    • /
    • pp.80-81
    • /
    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

  • PDF

X-LINKED HYPOPHOSPHATEMIC RICKETS : CASE REPORT (성염색체 연관 저인산혈증성 구루병 환자의 증례 보고)

  • Lee, Su-Jin;Kim, Young-Jae;Jang, Ki-Taeg;Lee, Sang-Hoon;Kim, Chong-Chul;Hahn, Se-Hyun;Kim, Jung-Wook
    • Journal of the korean academy of Pediatric Dentistry
    • /
    • v.36 no.2
    • /
    • pp.298-304
    • /
    • 2009
  • XLH (X-linked hypophosphatemic rickets) is a form of rickets which is resistant to the usual dose of vitamin D and inherited in a X-linked dominant manner. It is also known as vitamin D-resistant rickets or familial hypophosphatemic rickets. Here we report a 6-year-and-6-month-old female patient of XLH who is diagnosed with in SNUB. She was referred from local clinic for impaction of maxillary left permanent incisor and its treatment. She presents bowing deformities of the legs, short stature, enlargement of wrist and ankles and spontaneous dental abscesses of clinically sound teeth delayed eruption, taurodontism, delayed apical closure, enlarged pulp chambers, and absent or poorly defined lamina dura. The purpose of this case is to review the literatures of XLH and report the dental and medical characteristics of this patient.

  • PDF

Mineral Absorption by Cymbidium Jungfrau in the Solution Culture (서양 심비디움 양액재배에서의 무기물 흡수)

  • Song, Sung-Jun;Boo, Chang-Ho;U, Zang-Kual
    • Korean Journal of Environmental Agriculture
    • /
    • v.18 no.1
    • /
    • pp.35-40
    • /
    • 1999
  • $N(^{15}N)$ and $P(^{32}P)$ absorption by 2 year-old Cymbidium Jungfrau in solution culture were investigated. Growth, photosynthesis rate, chlorophyll content and mineral composition of Cymbidium in the solution culture with bark or granular rockwool were compared with these parameters in the conventional pot culture. Nitrogen absorption by Cymbidium was higher in full sunlight than in 60% of sunlight while P absorption was higher in 60% of sunlight. Sixty seven % of N absorbed in plant was redistributed to the bulb(39%) and leaves(28%) while 46% of P absorbed was fund in the bulb (36.2%) and leaves (10.2%). Accumulation of P in leaves was 3-fold lower than that of N. N and P absorption in 0.5 or 1 year- old daughter plant Bowing vigorously were greater than in immature daughter or mother plant. The absorption rate of phosphorus in Cymbidium was 350-fold lower than that of barley. Greater shoot length and bulb diameter, and higher fresh weight, photosynthesis rate and chloroployll content were observed in the solution culture than in the conventional pot culture. Solution culture had-also more content of N, P, K and Mg in leaves, bulb and root than conventional pot culture but did not that of Ca. A large part of the nutrient absorption was occurred during vegetative growth. Also, There was no difference between bark and rockwool in the solution culture due to the improvement of poor dispersion of nutrient solution in bark.

  • PDF

Treatment of Ossifying Fibroma (화골성 섬유종의 치료)

  • Jung, Sung-Taek;Chung, Jae-Yoon;Song, Eun-Kyoo;Park, Yong-Cheol
    • The Journal of the Korean bone and joint tumor society
    • /
    • v.9 no.1
    • /
    • pp.61-68
    • /
    • 2003
  • Purpose: We reviewed the outcome of treatment of ossifying fibroma involving long bones. Materials and methods: Eight patients who enrolled at our hospital for ossifying fibroma from 1994 to 1999 were selected for this study. Mean age was 7.9 years old. Five were male and three female. Seven involved tibia and one fibula. All cases were diagnosed by biopsy. The initial treatment was conservative and the followings were operative indications; (1) repeated fracture, (2) suddenly growing mass, (3) severe bowing deformity, (4) pseudoarthrosis. We assessed the recurrence by x-ray follow-up. Results: As initial treatment, curettage was performed in 2 patients, observation in 2 subperiosteal resection in one and extraperiosteal resection in 3 patients. Two patients who were observed and 3 patients who received extraperiosteal resection did not suffer recurrence. Two patients who received curettage and one patient who received subperiosteal resection had recurrence. The second treatment was performed in 3 patients. The one case of curettage received extraperiosteal resection. The other was in observation. The case of subperiosteal resection was in observation, too. There were no recurrence and aggravation at follow-up. Conclusion: Ossiying fibroma should to be treated by conservative method. If operation is indicated, extraperiosteal resection could reduce the recurrence.

  • PDF

Analysis Of the Bass Performance Of Jimmy Blanton (Jimmy Blanton의 연주기법과 스타일에 관한 연구)

  • Yoon, Du-Young;Cho, Tae-Seon
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.16 no.1
    • /
    • pp.56-61
    • /
    • 2015
  • This is the Study of the Bass performance of the Jimmy Blanton who is first pioneer of Jazz Style Bass playing. Since the contrabass is using in jazz Performances Before jimmy Blanton, playing technique was mainly played repeatedly with simply two or four Beat with Root or 5th degree of Chord Tone. In Other words, there was only root based Note along with Harmony which doesn't have Bass Solos or Melodic phrase Appeared in Bass playing. Jimmy Blanton Was the First Bass Player who changes This Traditional Concept of Jazz bass playing after New Orleans Jazz era. He was introduced variety of accompaniment Style with Various rhythmic phrase and Bass Soloing like a horn Player. We could know that His Style Continues to Such as Ray Brown, Paul chambers who has a big Name after Jimmy Blanton. I analyzed accompaniment Style and solo techniques Of Jimmy Blanton with the Song "Cotton tail and MR.JB Blues" Which He Performed with Duke Ellington. I learned a lot while I'm analyzing his Performing Style from Jimmy Blanton, such as Target Note playing, using Chord Tones and Arpeggios, Melodic Solo Style, Jazz Style Bowing Technique, Question and Answer Phrasing etc. I could notice That He Was the true Pioneer of the First Bass player In the Early Jazz days.

Glass-alumina Composites Prepared by Melt-infiltration: II. Kinetic Studies (용융침투법으로 제조한 유리-알루미나 복합체: II. Kinetic 연구)

  • Lee, Deuk-Yong;Jang, Joo-Wung;Lee, Myung-Hyun;Lee, Jun-Kwang;Kim, Dae-Joon;Park, Il-Seok
    • Journal of the Korean Ceramic Society
    • /
    • v.39 no.2
    • /
    • pp.145-152
    • /
    • 2002
  • Four commercial alumina powders having different particle size of $0.5{\mu}m,\;2.8{\mu}m,\;12{\mu}m,\;and\;45{\mu}m$ were presintered at 1120$^{\circ}C$ for 2h and then lanthanum aluminosilicate glass was infiltrated at 1100$^{\circ}C$ for 2h in the interval of 0.1h to investigate the penetration kinetic of the glass into the alumina preforms. The infiltration distance is parabolic with respect to time as described by the Washburn equation and the penetration rate constant, K, increases with raising the alumina particle size. The strength of glass-alumina composites increases as the alumina particle size reaches to 2.8${\mu}m$ due to the increase in packing, however, decreases with further increasing the alumina particle size. The fracture toughness of the composites rises with increasing the alumina particle size due to the crack bowing and the interaction between crack and alumina particles.

A Study on the Optimization of CP Based Low-temperature Tabbing Process for Fabrication of Thin c-Si Solar Cell Module (박형 태양전지모듈 제작을 위한 저온 CP 공정 최적화에 관한 연구)

  • Jin, Ga-Eon;Song, Hyung-Jun;Go, Seok-Whan;Ju, Young-Chul;Song, Hee-eun;Chang, Hyo-Sik;Kang, Gi-Hwan
    • Journal of the Korean Solar Energy Society
    • /
    • v.37 no.2
    • /
    • pp.77-85
    • /
    • 2017
  • Thin crystalline silicon (C-Si) solar cell is expected to be a low price energy source by decreasing the consumption of Si. However, thin c-Si solar cell entails the bowing and crack issues in high temperature manufacturing process. Thus, the conventional tabbing process, based on high temperature soldering (> $250^{\circ}C$), has difficulties for applying to thin c-Si solar cell modules. In this paper, a conductive paste (CP) based interconnection process has been proposed to fabricate thin c-Si solar cell modules with high production yield, instead of existing soldering materials. To optimize the process condition for CP based interconnection, we compared the performance and stability of modules fabricated under various lamination temperature (120, 150, and $175^{\circ}C$). The power from CP based module is similar to that with conventional tabbing process, as modules are fabricated. However, the output of CP based module laminated at $120^{\circ}C$ decreases significantly (14.1% for Damp heat and 6.1% for thermal cycle) in harsh condition, while the output drops only in 3% in the samples process at $150^{\circ}C$, $175^{\circ}C$. The peel test indicates that the unstable performance of sample laminated at $120^{\circ}C$ is attributed to weak adhesion strength (1.7 N) between cell and ribbon compared to other cases (2.7 N). As a result, optimized lamination temperature for CP based module process is $150^{\circ}C$, considering stability and energy consumption during the fabrication.

Semi-rigid Elasto-Plastic Post Buckling Analysis of Space Frame by Using the Explicit Arc-Length Method (명시적 호장법을 이용한 공간프레임의 반강접 탄소성 후좌굴 해석)

  • Lee, Kyoung-Soo;Han, Sang-Eul
    • Journal of Korean Society of Steel Construction
    • /
    • v.23 no.5
    • /
    • pp.535-546
    • /
    • 2011
  • In this paper, semi-rigid elasto-plastic post-buckling analysis of a space frame was performed using various explicit arc-length methods. Various explicit arc-length methodsand a large-deformation and small-strain elasto-plastic 3D space frame element with semi-rigid connections and plastic hinges were developed. This element can be appliedto both explicit and implicit numerical algorithms. In this study, the Dynamic Relaxation method was adopted in the predictor and corrector processesto formulate an explicit arc-length algorithm. The developed "explicit-predictor" or "explicit-corrector" were used in the elasto-plastic post-buckling analysis. The Eulerian equations for a beam-column with finite rotation, which considers the bowing effects, were adopted for the elastic system and extended to theinelastic system with a plastic hinge concept. The derived tangent stiffness matrix was asymmetrical due to the finite rotation. The joint connection elements were introduced for semi-rigidity using a static condensation technique. Semi-rigid elasto-plastic post-buckling analyses were carried out to demonstrate the potential of the developed explicit arc-length method and advanced space frame element in terms of accuracy and efficiency.

Large Deformational Elasto-Plastic Analysis of Space Frames Considering Finite Rotations and Joint Connection Properties (유한회전과 접합부 특성을 고려한 공간프레임의 대변형 탄소성 해석)

  • Lee, Kyung Soo;Han, Sang Eul
    • Journal of Korean Society of Steel Construction
    • /
    • v.21 no.6
    • /
    • pp.597-608
    • /
    • 2009
  • In this paper, large-deformation elasto-plastic analysis of space frames that considersjoint connection properties is presented. This method is based on the large-deformation formula with finite rotation, which was developed initially for elastic systems, and is extended herein to include the elasto-plastic effect and the member joint connection properties of semi-rigid what?. The analytical method was derived from the Eulerian concept, which takes into consideration the effects of large joint translations and rotations. The localmember force-deformation relationships were obtained from the beam-column approach, and the change caused by the axial strain in the member chord lengths and flexural bowing were taken into account. The effect of the axial force of the member on bending and torsional stiffness, and on the plastic moment capacity, is included in the analysis. The material is assumed to be ideally elasto-plastic, and yielding is considered concentrated at the member ends in the form of plastic hinges. The semi-rigid properties of the member joint connection are considered based on the power or linear model. The arc length method is usedto trace the post-buckling range of the elastic and elasto-plastic problems with the semi-rigid connection. A sample non-linear buckling analysis was carried out with the proposed space frame formulations to demonstrate the potential of the developed method in terms of its accuracy and efficiency.

Dietary Culture for Sacrificial Rituals and Foods in Andong Area(II) -Village Sacrificial Rituals and Foods- (안동지역의 제례에 따른 음식문화(II) -동제(洞祭)와 제물(祭物)-)

  • Yoon, Suk-Kyung
    • Journal of the Korean Society of Food Culture
    • /
    • v.11 no.5
    • /
    • pp.699-710
    • /
    • 1996
  • The sacrificial foods using at 88 villages in Andong area where the village sacrificial rituals are performed, were investigated in 1994. The finding are as follows; 1. Since the village sacrificial rituals keep ancientry, white Baeksulki without any ingredients is used as Ddock (a steamed rice cake) in 74 villages, and in 5 villages the Baeksulki was served just in Siru (a tool used to prepare Ddock). The type of meat serving in rituals has been changing from large animal to small animal and the type of light from bowl-light to candle. 2. Though the ritual observes Confucianism style, memorial address was offered in 34 villages and only in 8 villages, liquor was served 3 times and the address was offered. In 60 villages, liquor was served only once, and calling village god, bowing twice, and burning memorial address paper were performed in order. Burning paper has been meaningful in rituals. 3. Tang (a stew) was served in 21 villages, and in 18 villages even Gook (a soup) was not used. The numbers of village which do not use cooked rice and Ddock are 14, respectively. 4. Fruits are essential in rituals foods. In 63 villages, 3 kinds of fruits are served and this is contrasted with even number of fruits in Bul-Chun-Wi Rituals. 5. In 25 villages, fish and meat are not served. As meat, chicken in 19 village are served. Meat Sikhae (a fermented rice beverage) prepared with meats or fish are served in 5 villages. Slice of dried meat is served in 73 villages commonly. 6. In gender of god for village shrine, woman in 43 villages, couple in 17 villages, man in 9 villages, mountain god in 2 villages, villages tree, etc were enshrined. In 52 villages liquor is served in rituals (liquor is used in 58 villages including serving god), in 28 villages sweet liquor (Gamju) is served for god (sweet liquor is used in 46 villages), and liquor, water, or sweet liquor is just displayed on table but not served in 8 villages. Incensing is found to be not common in village ritual, only in two villages it is performed. The most appropriate rituals food is thought to be pig for mountain god. Home dishes can not be used in village ritual and spoon is not used and chopstick is prepared from wild plant. Meat and fish are used in the raw.

  • PDF