• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.255-255
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• 2013

최근 그래핀 연구와 더불어 2차원 구조의 나노소재에 대한 관심이 급증하면서 육각형의 질화붕소(hexagonal boron nitride; h-BN) 박막(nanosheet)이나 붕소 탄화질화물(boron caronitride; BCN) 박막과 같은 2차원 구조체에 대한 연구가 활발히 진행되고 있다. 그 중 BCN은 반금속(semimetal)인 흑연(graphite)과 절연체인 h-BN이 결합된 박막으로 원소의 구성 비율에 따라 전기적 특성을 제어할 수 있다는 장점이 있다. 따라서 다양한 나노소자로의 응용을 위한 연구가 활발히 진행되고 있다. 본 연구에서는 폴리스틸렌(polystyrene, PS)과 보레인 암모니아(borane ammonia)를 고체 소스로 이용하여 열화학 기상증착법을 이용하여 BCN 박막를 SiO2 기판 위에 직접 합성하였다. SEM과 AFM 관측을 통해 합성된 BCN 박막을 확인하였으며, RMS roughness가 0.5~2.6 nm로 매우 낮은 것을 확인하였다. 합성과정에서 PS의 양을 조절하여 BCN 박막의 탄소의 밀도를 성공적으로 제어하였으며, 이에 따라 전기적인 특성이 제어되는 양상을 확인하였다. 또한 합성온도 변화에 따른 BCN 박막의 전기적인 특성이 제어되는 양상을 확인하였다. 추가적으로 같은 방법을 이용하여 BCN 박막을 Ni 위에서 합성하여 SiO2 기판위에 전사 하였다. 합성된 BCN 박막의 구조적 특징과 화학적 조성 및 결합 상태를 투과전자현미경(transmission electron microscopy), X-선 광전자 분광법(X-ray photoelectron spectroscopy)을 통해 조사하였다.

• Applied Microscopy
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• v.45 no.3
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• pp.107-114
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• 2015

Two-dimensional (2D) materials containing hole defects are a promising substitute for conventional nanopore membranes like silicon nitride. Hole defects on 2D materials, as atomically thin nanopores, have been used in nanopore devices, such as DNA sensor, gas sensor and purifier at lab-scale. For practical applications of 2D materials to nanopore devices, researches on characteristics of hole defects on graphene, hexagonal boron nitride and molybdenum disulfide have been conducted precisely using transmission electron microscope. Here, we summarized formation, features, structural preference and stability of hole defects on 2D materials with atomic-resolution transmission electron microscope images and theoretical calculations, emphasizing the future challenges in controlling the edge structures and stabilization of hole defects. Exploring the properties at the local structure of hole defects through in situ experiments is also the important issue for the fabrication of realistic 2D nanopore devices.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.99.1-99.1
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• 2016

The materials for an electronic packaging provide diverse important functions including electrical contact to transfer signals from devices, isolation to protect from the environment and a path for heat conduction away from the devices. The packaging materials composed of metals, ceramics, polymers or combinations are crucial to the device operating properly and reliably. The demand of effective charge and heat transfer continuous to be challenge for the high-speed and high-power devices. Nanomaterials including graphene, carbon nanotube and boron nitride, have been designed for the purpose of exploiting the high thermal, electrical and mechanical properties by combining in the matrix of metal or polymer. In addition, considering the inherent electrical and surface properties of graphene, it is expected that graphene would be a good candidate for the surface layer of a template in the electroforming process. In this talk, I will present recent our on-going works in nanomaterials for microelectronic packaging: 1) porous graphene/Cu for heat dissipations, 2) carbon-metal composites for interconnects and 3) nanomaterials-epoxy composites as a thermal interface materials for electronic packaging.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.48-56
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• 2004

Ceramics are very difficult-to-cut materials because of its high strength and hardness. Their machining mechanism is characterized by cracking and brittle fracture. In this paper, to give good machinability to the ceramics, h-BN powders are added to $Si_3N_4$, by volume of 20, 25 and 30%. And the machinability of the produced ceramics is tested using micro drilling system. Through required experimental works, it is shown that the micro drilling machinability is varied along with the volumetric percentage of h-BN powders. Also, it is verified that the obtained results can be used to develop new machinable ceramics of good material properties and machinability.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.11
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• pp.55-63
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• 2003

In this study, an experimental research of grinding characteristics using super-abrasives for surface carburized and heat treated SCM415 materials, which were usually used to make a linear motion guide block and were comparatively hard-to-machine materials, was carried out. In order to conduct a high efficiency and a accuracy grinding of such materials, grinding processes using CBN (Cubic boron nitride) and 38P grinding wheels have been attempted on a surface grinding machine. The grindability according to each grinding conditions was evaluated by means of a grinding force, a surface roughness and a residual stress. The experimental methods and results were presented in this paper. And also, from a proposed truing method the CBN wheels that combined a copper and a break truer gave a full scope to the wheel's performance.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.4
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• pp.585-589
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• 2012

The characteristics of interface layer and the effect of mole fraction of inlet gas mixture($B_2H_6/H_2/N_2/TiCl_4$) on the microstructure of Ti(B,N) films were studied by microwave plasma hot filament CVD process. Ti(B,N) films were deposited on a substrate(STD-61) to develop a high performance of resistance wear coating tool. Ti(B,N) films were obtained at a gas pressure of 1 torr, bias voltage of 300 V and substrate temperature of $480^{\circ}C$ in $B_2H_6/H_2/N_2/TiCl_4$gas system. It was found that TiN, $TiB_2$, TiB and hexagonal boron nitride(h-BN) phases exist in thin layer on the STD-61.

• The Korean Journal of Ceramics
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• v.1 no.3
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• pp.155-159
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• 1995

Borosilicate, $B_2O_3$ and BN derived from liquid precursors have been tested as shielding materials for the long period of oxidation resistance of C/BN composites at $650^{\circ}C$. Borosilicate coating displayed excellent oxidation resistance and low moisture absorbance, while $B_2O_3$ and BN were less effective in elevating the oxidation resistance. The enhancement of the oxidation resistance was explained as self-healing effect by viscous flow of the borosilicate glass over Tg, resulting in the reduction of the exposed carbon fibers in a BN matrix.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.1078-1082
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• 1997

The use of CBN tool material has been greatil increased because of the superior metal cutting performance for the machining of hardened steels. This paper presents some experimental results on the ball endmilling of hardened steels. Three different hardnesses of STB-11 workpieces were machined using CBN ball endmills, and the machining charteristics including cutting forces, tool wear, and surface roughness of machined surface were compared. It has been found that the CBN ball endmill works better in the machining of harder workpieces. The microscopic examination explains that this unusual phenomenon is cause by the difference of microstructure of each workpieces.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.604-607
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• 2003

This study investigates the micro-cutting of cemented carbides using PCD(polycrystalline diamond) and PCBN(polycrystalline cubic boron nitride) cutting tools are performed with SEM direct observation method. The purpose of this study is to make clear the cutting mechanism of cemented carbides and the fracture of WC particles at the plastic deformation zone in orthogonal micro-cutting. And also to achieve systematic understanding, the effect of machining parameter on chip formation and machined surface was investigated, including cutting speed. depth of cut and various tool rake angle.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.363-366
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• 2003

The hard turning is a turning operation performed in high strength alloy steels (HRC>30) in order to reach surface roughness close to those obtained in grinding. This is possible because of availability of improved tool materials (polycrystalline cubic boron nitride. PCBN), ad more rigid machine tools. According to many previous work of hard turning mechanism, the maximum temperature of cutting can be raised up to 100$0^{\circ}C$. As the heat generation rate is very high, the thermal displacement of tool holder cannot be negligible. Therefore, the aim of this paper is to analyze effects of high heat generation at CBN tool tip to the thermal displacement of a tool holder in hard turning and finally geometric accuracy. The thermal behavior of a CBN tool holder is investigated by numerical simulation and experiment, and the result shows thermal elongation of microns order is possible during hard turning process.