DOI QR코드

DOI QR Code

EA hot filament CVD system을 이용하여 금형공구강에 증착한 Ti(B,N)박막의 합성과 특성에 관하여

The Characteristic and Formation of Ti(B,N) Films on Steel by EA Hot Filament CVD

  • 윤중현 (단국대 공대 신소재공학과) ;
  • 최용 (단국대 공대 신소재공학과) ;
  • 최진일 (단국대 공대 신소재공학과)
  • 투고 : 2011.12.26
  • 심사 : 2012.03.13
  • 발행 : 2012.04.01

초록

The characteristics of interface layer and the effect of mole fraction of inlet gas mixture($B_2H_6/H_2/N_2/TiCl_4$) on the microstructure of Ti(B,N) films were studied by microwave plasma hot filament CVD process. Ti(B,N) films were deposited on a substrate(STD-61) to develop a high performance of resistance wear coating tool. Ti(B,N) films were obtained at a gas pressure of 1 torr, bias voltage of 300 V and substrate temperature of $480^{\circ}C$ in $B_2H_6/H_2/N_2/TiCl_4$gas system. It was found that TiN, $TiB_2$, TiB and hexagonal boron nitride(h-BN) phases exist in thin layer on the STD-61.

키워드

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