Structural study of interface layers in orthorhombic-NiSi (010)/Si using density functional theory (Density Functional Theory를 이용한 orthorhombic-NiSi (010)/Si 계면 층의 구조 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.11a
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- pp.107-108
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- 2008