Structural Study of Interface Layers in Tetragonal-NiSi (010)/Si using Density Functional Theory |
Kim, Dae-Hee
(한국기술교육대학교 신소재공학과)
Kim, Dae-Hyun (한국기술교육대학교 신소재공학과) Seo, Hwa-Il (한국기술교육대학교 정보기술공학부) Kim, Yeong-Cheol (한국기술교육대학교 신소재공학과) |
1 | G. Kresse and J. Furthmuller, 'Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set', Comput. Mat. Sci., Vol. 6, p. 15, 1996 DOI ScienceOn |
2 | G. Kresse and J. Furthmuller, 'Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set', Phys. Rev. B, Vol. 54, p. 11169, 1996 DOI ScienceOn |
3 | G. Kresse and D. Joubert, 'From ultra pseudopotentials th the projector augmented- wave method', Phys. Rev. B, Vol. 59, p. 1758, 1999 DOI ScienceOn |
4 | P. Pulay, 'Convergence acceleration of iterative sequences: The case of SCF iteration', Chem. Phys. Lett., Vol. 73, p. 393, 1980 DOI ScienceOn |
5 | Y. Imai and A. Watanabe, 'Electronic structures of platinum group elements silicides calculated by a first-principle pseudopotential method using plane-wave basis', J. Alloys & Compounds, Vol. 417, p. 173, 2006 DOI ScienceOn |
6 | K. Momma and F. Izumi, 'VESTA: a three-dimensional visualization system for electronic and structural analysis', J. Appl. Crystallogr., Vol. 41, p. 653, 2008 DOI ScienceOn |
7 | G. Kresse and J. Hafnrt, 'Ab initio molecular dynamics for liquid metals', Phys. Rev. B, Vol. 47, p. 558, 1993; ibid. Vol. 49, p. 14251, 1994 DOI ScienceOn |
8 | G. Kresse and J. Hafnrt, 'Ab initio molecular dynamics for liquid metals', Phys. Rev. B, Vol. 49, p. 14251, 1994 DOI ScienceOn |
9 | J. P. Gambino and E. G. Colgan, 'Silicides and ohmic contacts', Mat. Chem. Phys., Vol. 52, p. 99, 1998 DOI ScienceOn |
10 | T. Morimoto, T. Ohguro, H. S. Momose, T. Iinuma, I. Kunishima, K. Suguro, I. Katakabe, H. Nakajima, M. Ono, Y. Katsumata, and H. Iwai, 'Self-aligned nickel-mono-silicide technology for high-speed deep submicrometer logic CMOS ULSI', IEEE Trans. Electron. Dev., Vol. 42, p. 915, 1995 DOI ScienceOn |
11 | Front End Process, International Technology Roadmap semiconductors, 2005 |
12 | B. Cafra, A. Alberti, L. Ottaviano, C. Bongiorno, G. Mannino, T. Kammler, and T. Feudel, 'Thermal stability of nickel silicide on silicon on insulator (SOI) material', Mat. Sci. Eng. B, Vol. 114, p. 228, 2004 DOI ScienceOn |
13 | Y.-C. Kim, P. Adusumilli, L. J. Lauhon, D. N. Seidman, S.-Y. Jung, H.-D. Lee, R. L. Alvis, R. M. Ulfig, and J. D. Olson, 'Three-dimensional atomic-scale mapping of Pd in (100) thin films', Appl. Phys. Lett., Vol. 91, p. 113106, 2007 DOI ScienceOn |
14 | D.-H. Kim, H.-I. Seo, and Y.-C. Kim, 'Structural study of epitaxial NiSi on Si (001) substrate by using density functional theory (DFT)', J. Kor. Soc. of Semi. Equi. Tech., Vol. 6, p. 65, 2007 과학기술학회마을 |
15 | G. Profeta, S. Picozzi, A. Continenza, and R. Podloucky, 'Supersoft silicides: Ab initio study of (001) TSi surface and (001) Si/TSi (T = Fe, Co, and Ni) interface', Phys. Rev. B, Vol. 70, p. 235338, 2004 DOI ScienceOn |
16 | D.-H. Kim, H.-I. Seo, and Y.-C. Kim, 'Structural study of tetragonal-(001) using density functional theory (DFT)', J. Kor. Mat. Res., Vol. 18, p. 482, 2008 과학기술학회마을 DOI ScienceOn |