• 소성∙가공
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• 제12권4호
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• pp.382-387
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• 2003

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behaviors of the materials during indentation were studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparisons between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test.

• 한국정밀공학회지
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• 제21권3호
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• pp.139-146
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• 2004

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.273-273
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• 2003

나노인덴테이션은 압자를 수 $\mu\textrm{N}$의 힘으로 시편에 압입을 시켜 재료의 경도나 탄성계수와 같은 기계적 특성을 평가하는 압입경도 시험법이다. 압입 변위를 나노미터범위로 조절할 수 있어 기존에 접근할 수 없었던 박막의 기계적 특성을 평가하는데 응용이 넓어지고 있다. 본 연구에서는 나노인덴테이션에서 제공되는 하중-변위곡선과 유한요소해석의 결과를 비교하여 유한요소해석의 신뢰성을 검증하고, 유한요소해석에서 여러 가지 재료의 특성에 따른 파일업과 싱크인 현상을 규명 하고자 한다.

• 대한기계학회논문집A
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• 제32권1호
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• pp.35-42
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• 2008

본 연구에서는 원뿔형 압입자를 이용한 압입시험의 기초 유한요소해석으로부터 자기유사성을 나타내는 Kick's law 계수 C의 영향을 조사하고, 선단반경의 변화가 하중-변위 곡선에 미치는 영향을 회귀분석을 통해 살펴보았다. 아울러 항복강도와 변형경화지수 등의 변수들이 재료 영률평가에 미치는 영향을 분석하였다. 기존 영률 평가에 널리 사용되는 탄성이론에 기초한 Pharr 등의 식을 일반적인 탄소성 금속재료에 적용하기 위하여 다양한 재료에 대한 유한요소해석을 수행하였다. 재료 영률평가 시 압입자 선단반경과 압입깊이의 영향을 최소화하기 위해 Pharr 등의 식에 수정된 보정계수 k를 도입한 영률예측식을 제시하였다. 새로운 영률예측식은 텅스텐 카바이드와 다이아몬드 압입자일 때 모두 2%내의 평균 오차범위에서 각 재료의 영률을 평가할 수 있다.

• 대한기계학회논문집A
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• 제33권9호
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• pp.859-869
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• 2009

물성치와 하중-변위곡선을 일대일 대응 시킬 수 있는 함수를 생성함으로써, 미지 재료에 대한 압입시험 데이터로부터 바로 재료물성을 찾는 압입물성평가 기법을 제시했다. 원뿔형 압입 유한요소해석으로 압입자 중심각이 압입 하중-변위 곡선에 주는 영향을 살펴 보았다. 이로부터 한 압입자 중심각에 대해 같은 Kick's law 계수 C를 갖는 두 재료들이 압입자 중심각이 변하면 서로 다른 C 값들을 가짐을 확인했다. 이어 영률, 항복강도, 변형경화지수와 하중-변위곡선 사이의 상관관계들을 분석하고, 항복변형률이 변형경화 지수와 더불어 중요한 변수임을 확인했다. 이 두 특성들을 바탕으로 이중원뿔형 압입 물성평가 수식들을 작성했다. 1회 압입 후 재료의 영률을 평가하고, 두 압입자를 이용해 얻은 하중-변위 곡선들로부터 곡률계수들을 구해 항복변형률과 변형경화 지수를 구했다. 제시된 물성평가법은 압입 하중-변위곡선들로부터, 압입자 물성과 선단반경에 상관없이, 평균오차 2% 내에서 재료 물성값들을 준다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 춘계학술대회 논문집
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• pp.148-151
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• 2004

Mechanical properties such as Young's modulus and hardness of thin film in coated steel are difficult to determine by nano-indentation from the conventional analysis using the load-displacement curve. Therefore, an analysis of the nano-indentation loading curve was used to determine the Young's modulus, hardness and strain hardening exponent. A new method is recently being developed for plasticity properties of materials from nano-indentation. Elastic modulus of the thin films shows relatively small influence whereas yield strength and strain hardening are found to have significant effect on measured data. The load-displacement behavior of material tested with a Berkovich indenter and nano-indentation continuous stiffness method is used to measure the modulus and hardness through thin films.

• 한국정밀공학회지
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• 제22권7호
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• pp.71-78
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• 2005

The purpose of this study is to suggest a hyperfine maskless writing technique by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in $50\;wr\%$ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (etching time, normal load, loading .ate, hold-time at the maximum load) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies. Finally, sample characters were written to show the possibility of the application.

• 소성∙가공
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• 제13권8호
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• pp.731-737
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• 2004

Mechanical properties such as Young's modulus and hardness of thin film in coated steel are difficult to determine by nano-indentation from the conventional analysis using the load-displacement curve. Therefore, an analysis of the nano-indentation loading-unloading curve was used to determine the Young's modulus, hardness. A new method is recently being developed for elastic-plastic properties of materials from nano-indentation. Elastic modulus of the thin films shows relatively small influence whereas yield strength is found to have significant effect on measured data. The load-displacement curves of material tested with a Berkovich indenter and nano-indentation continuous stiffness method is used to measure the modulus and hardness through thin films, and then these are computed using the analysis procedure. The developed neural networks apply also to obtain reliable mechanical properties.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.225-228
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• 2005

The purpose of this study is to investigate effects of the plastic/elastic deformation energy on wet etching characterization on the surface of material by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex 7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in $50\;wt\%$ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (normal load, loading rate) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies.

• Tribology and Lubricants
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• 제25권3호
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• pp.163-170
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• 2009

We developed a compact micro indentation testing device (designated SNUT) which is capable to measure Young's modulus of a sample using depth and applied load data during indentation. Performance of this device was evaluated using pure Ti, pure Ni, and die steel (SKD11). As a result of analysing the indentation test data, the frame compliance $C_f$ was found to influence mainly the modulus by 80% among several factors affecting accuracy of Young's modulus. Project area, which was determined by indirect indentation method, was modified using direct SEM observation. Finally, Young's modulus error was reduced to 5% after taking into consideration the frame compliance and modified projected area from 80% error without any these two correction factors. The performance of SNUT and MTS instruments was compared using same specimen (pure Ti).