References
- Chang, W.S., Shin, B.S., Whang, K.H., 'nanoprobe application technologies,' J Kor, Soc. Precis. Eng., Vol. 20, No.4, pp. 5-11, 2003
- Sung, I.H., Yang, J.C., Kim, D.E., Shin, B.S., 'Micro/nano-tribological characteristics of selfassembled monolayer and its application in nanostructure fabrication,' Wear, Vol. 255, pp. 808-818, 2003 https://doi.org/10.1016/S0043-1648(03)00058-9
- Wiesauer, K. and Springholz, G., 'Fabrication of semiconductor nanostructures by nanoindentation of photoresist layers using atomic force microscopy,' J Appl. Phys., Vol. 88, No. 12, pp.7289-7297, 2000 https://doi.org/10.1063/1.1324693
- Li, X., Gao, H., Murphy, C.J. and Caswell, K.K., 'Nanoindenttion of silver nanowires,' Nano letters, Vol. 3, No. 11, pp. 1495-1498, 2003 https://doi.org/10.1021/nl034525b
- Youn, S.W., Kang, C.G., 'Maskless pattern fabrication on pyrex 7740 glass surface by using nano-scratch with HF wet etching,' Scripta mater. 52, pp. 117-122, 2005 https://doi.org/10.1016/j.scriptamat.2004.09.016
- Youn, S.W., Kang, C.G., 'Maskless pattern fabrication on Si(100) surface by using nanoindenter with KOH wet etching,' Scripta mater. 50, pp. 105-109, 2004 https://doi.org/10.1016/j.scriptamat.2003.09.030
- Yoshino, M., Kitamura, G., Ogawa, Y, 'Ductile mode machining of hard-brittle materials under high hydrostatic pressure 92nd report) - machining test of hard-brittle materials under high hydrostatic pressure,' Jpn. Prec. Eng., Vol. 68, no. 10, pp. 1351-1355, 2002 https://doi.org/10.2493/jjspe.68.1351
- Kim, D.E., Yi, J.J, 'Micro-patterning of silicon by frictional interaction and chemical reaction,' J. Tribol.-T. ASME, 120, pp. 353, 1998 https://doi.org/10.1115/1.2834434
- Lee, J.J., Kim, D.E., 'A Novel Micro-Machining Technique Using Mechanical and Chemical Methods,' Transactions of KSME (A), Vol. 20, No. 10,pp.3113-3125, 1996
- Lang, W., 'Silicon microstructring technology,' Mater. Sci. & Eng., Vol. R17, pp. 1-55, 1996 https://doi.org/10.1016/0927-796X(96)00190-8
- Kovalchenko, A., Gogotsi, Y, Domnich, V., Erdemir, A., 'Phase transformations in silicon under dray and lubricated sliding,' Tribology transactions, Vol. 45, pp. 372-380, 2002 https://doi.org/10.1080/10402000208982562
- Ge, D., Domnich, V., Juliano, T., Stach, E.A., Gogotsi, Y, 'Structural damage in boron carbide under contact loading,' Acta mater., Vol. 52, pp. 3921-3927, 2004 https://doi.org/10.1016/j.actamat.2004.05.007
- Kim. J.J., Choi, Y, Suresh, S., Argon, S.S., 'Nanocrystallization during nanoindenation of a bulk amorphous metal alloy at room temperature,' Science, Vol. 295, No. 5555, pp. 654-657, 2002 https://doi.org/10.1126/science.1067453
- Ashida, K., Chen, L., Moria, N., 'New maskless micro-fabrication technique of single-crystal silicon using the combination of nanometer-scale machining and wet etching,' proc. of 2nd euspen Int., Conf., Turin, Italy, May, pp. 78-81, 2001
- Attaf, M.T., 'New ceramics related investigation of the indentation energy concept,' Materials letters, Vol. 57, pp. 4684-4693, 2003 https://doi.org/10.1016/S0167-577X(03)00375-6
- Bu, M., Melvin, T., Eensell G.J., Wilkinson, J.S., Evans, A.G.R., 'A new masking technology for deep glass etching and its microfluidic application,' Sensors and Actuators A, Vol. 115, pp. 476-482, 2004 https://doi.org/10.1016/j.sna.2003.12.013
- Avouris, Ph., Hertel, T. and Martel, R., 'Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication,' Appl. Phys. Lett., Vol. 2, pp. 285-287, 1997 https://doi.org/10.1063/1.119521
- Anthony, C., Fischer-Cripps, 'Nanoindentation,' Springer- Velag, pp. 71-72, 2002
-
Wu, H.E, Lin, C.C., Shen, P., 'Structure and dissolution of
$CaO-ZrO_2-TiO_2-Al_2O_3-B_2O_3-SiO_2$ glass (II),' J. of Non-Crystalline Solids, Vol. 209, pp. 76-86, 1997 https://doi.org/10.1016/S0022-3093(96)00553-4 - Sigoli, EA., Kawano, Y., Davolos, M.R., Jafelicci Jr, M., 'Phase separation in Pyrex glass by hydrothermal treatment: evidence from micro-Roman spectroscopy,' J. of Non-Crystalline Solids, Vol. 284, pp. 49-54, 2001 https://doi.org/10.1016/S0022-3093(01)00378-7
- Youn, S.W., Kang, C.G., 2005, 'FEA study on nanodeformation behaviors of amorphous silicon and borosilicate considering tip geometry for pit array fabrication,' Materials Science and Engineering A, Vol. 319, pp. 233-239, 2005 https://doi.org/10.1016/j.msea.2004.08.041
- Elmustafa, A.A, Stone, D.S, 'Nanoindentation and the indentation size effect: kinetics of deformation and strain gradient plasticity,' J. Mechanics and Physics of Solids, Vol. 51, pp. 357-381, 2003 https://doi.org/10.1016/S0022-5096(02)00033-9
- Ichida, Y, Frej, N.B., Yousefi, R., 'Ductile-mode mirror cutting of single-crystal silicon (1st report) Effects of cutting speed on the brittle mode transition behavior in cutting process,' Jpn. Prec. Eng., Vol. 64, No.4, pp. 608-612, 1998 https://doi.org/10.2493/jjspe.64.608