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A Study of Mechanochemical Hyperfine-Writing Technique Using Deformation Induced Etch Hillock Phenomena  

Kang Chung Gil (부산대학교 기계공학부)
Youn Sung Won (부산대학교 정밀기계공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.7, 2005 , pp. 71-78 More about this Journal
Abstract
The purpose of this study is to suggest a hyperfine maskless writing technique by using the nanoindentation and HF wet etching technique. Indents were made on the surface of Pyrex7740 glass by the hyperfine indentation process with a Berkovich diamond indenter, and they were etched in $50\;wr\%$ HF solution. After etching process, convex structure was obtained due to the deformation-induced hillock phenomena. In this study, effects of indentation process parameters (etching time, normal load, loading .ate, hold-time at the maximum load) on the morphologies of the indented surfaces after isotopic etching were investigated from an angle of deformation energies. Finally, sample characters were written to show the possibility of the application.
Keywords
Mastless patterning; Nanoindentation; Deformation induced etch hillock; Pyrex 7740 g1ass; HF etching;
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Times Cited By KSCI : 2  (Citation Analysis)
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