• 한국진공학회지
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• 제12권1호
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• pp.1-6
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• 2003

50 kW급 출력의 전자빔을 발생시킬 수 있는 축선 방식 전자총 (axial electron beam gun)과 전원장치를 제작하였다. 전자총은 전자빔 발생장치와 전자빔 궤적제어장치로 이루어졌다. 전자빔 발생장치는 필라멘트와 음극(cathode), 양극(anode)으로 구성되었고 전자빔의 최대전류는 2A, 가속전압은 평균 25kV이다. 전자빔 궤적제어장치는 전자빔의 크기를 조절하는 초점 (focusing) 코일과 전자빔의 방향을 조절하는 편향(deflection) 코일 및 주사 (scanning) 코일로 구성되었다. 전자총과 별개로 진공용기 내부에 Helmholtz 코일을 설치하여 시료의 표면에 입사되는 전자빔의 입사각도를 최적화시켰다. 각 부분의 동작 특성을 측정한 결과와 제작된 전자총으로 고융점 원소인 지르코늄 (zirconium, Zr)과 가돌리늄(gadolinium, Gd) 금속을 증발시킨 결과를 정리하였다.

• 전자공학회논문지B
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• 제32B권1호
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• pp.110-119
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• 1995

The lateral resolution in an ultrasound imaging system is one of the most important factors for quality of the image and is determined by the beam focusing. For the better lateral resolution SDF(Sampled Delay Focusing) capable of digital focusing was proposed. The second-order sampling, one of band-width sampling methods, is suggested as being the best suitable for SDF because it allows total digital processing and is simple and economical. By proving that it introduces too much error, this article shows the second-order sampling is not appropriate for sampling of the wide-band signal generally used in ultrasound imaging systems. Also, this article suggests new sampling methods that maintain the advantages and reduce the unavoidable errors of the second-order sampling method. From computer simulation it is expected that the proposed methods reduce the errors of the second-order sampling method and can be used in real applications.

• 반도체디스플레이기술학회지
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• 제9권1호
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• 비파괴검사학회지
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• 제25권6호
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• pp.467-474
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• 2005

The expanded multi-Gaussian beam model has recently been developed that can calculate the radiation beam field from a single, rectangular transducer with great computational efficiency. In this study, this model is adopted to calculate the radiation beam field for a phased array transducer with various time delays to achieve steering and/or focusing. The calculation beam fields are compared to those obtained by well known Rayleigh-Sommerfeld integral that provides the exact solution in order to explore the validity of the expanded multi-Gaussian beam model And then, this study proposes a complete ultrasonic measurement model including the expanded beam model, far-field scattering model and system efficiency, Using the proposed model, phased array ultrasonic testing signals for a flat-bottomed hole with/without focusing were performed.

• 한국레이저가공학회지
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• 제9권3호
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• pp.7-13
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber are 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• 한국레이저가공학회:학술대회논문집
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• 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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• pp.41-45
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• 2006

Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber we 780nm and $5.3{\mu}m$, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about $80{\mu}m$. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.

• 한국광학회지
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• 제19권5호
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• pp.365-369
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• 2008

정전기장 편향기를 사용하는 저전압 초소형 전자칼럼에서 전자빔 집속 적정조건에 대해 조사하였다. 일정한 전자 방출 팁 전압조건에서 소스렌즈를 이용하여 전자빔을 집속할 경우 아인젤 렌즈를 이용할 경우보다 주사면적은 컸으나 전류영상의 선명도는 낮게 측정되었다. 3차원 전산시늉 결과 소스렌즈를 사용하여 전자빔을 집속할 경우 전자빔의 초점크기와 편향이 아인젤 렌즈를 이용하여 집속할 경우보다 큰 것으로 조사되었다.

• ETRI Journal
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• 제41권6호
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• pp.850-862
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• 2019

This work investigated three-dimensional (3D) focused microwave thermotherapy (FMT) at 925 MHz for a human tissue mimicking phantom using the time reversal (TR) principle for musculoskeletal disorders. We verified the proposed TR algorithm by evaluating the possibility of 3D beam focusing through simulations and experiments. The simulation, along with the electromagnetic and thermal analyses of the human tissue mimicking phantom model, was conducted by employing the Sim4Life commercial tool. Experimental validation was conducted on the developed FMT system using a fabricated human tissue mimicking phantom. A truncated threshold method was proposed to reduce the unwanted hot spots in a normal tissue region, wherein a beam was appropriately focused on a target position. The validation results of the simulation and experiments obtained by utilizing the proposed TR algorithm were shown to be acceptable. Effective beam focusing at the desired position of the phantom could be achieved.

• 비파괴검사학회지
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• 제19권3호
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• pp.207-216
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• 1999

일반적인 하나 또는 두개의 압전소자를 사용하는 트랜스듀서에 비하여 다수의 압전소자를 사용하는 어레이 트랜스듀서는 각 압전소자에 가해지는 펄스의 지연시간을 제어함으로써 초음파 빔을 임의의 지점에 집속시킬 수 있고 기계적 구동없이 임의의 방향으로 조향시켜 실시간 주사를 할 수 있는 장점이 있다. 페이즈드 어레이 트랜스듀서의 설계조건은 압전소자의 수. 압전소자의 크기 그리고 압전소자 사이 간격 등 여러가지가 있으며, 본 연구에서는 그 중에서 압전소자수의 변화에 따른 초음파 빔의 특성을 호이겐스의 원리를 이용한 수평횡파의 시뮬레이션을 통하여 평가하였다. 그 결과 초음파 빔은 조향각이 증가 할수륵 음압이 감소하며, 초음파 빔 특성도 점차적으로 분산됨을 알 수 있었고 또한, 초점거리가 증가할수록 초점에서의 집속효과는 감소하고, 압전소자의 수가 증가되면 집속효과는 향상됨을 알 수 있었다.

• Bulletin of the Korean Chemical Society
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• 제24권5호
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• pp.600-604
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• 2003

The light pressure force from an optical standing wave (SW) can focus an atomic beam to submicrometer dimensions. To make the best of this technique it is necessary to find a set of optimal experimental parameters. In this paper we consider theoretically the chromium atoms focusing and demonstrate that the focusing performance depends not only on the strength of but also on the time atoms take to traverse the force field. The general conclusions drawn can easily be applied to other atoms. To analyze the problem we numerically integrate a coupled time-dependent $Schr{\"{o}}dinger$ equation over a wide range of experimental parameters. It is found that an optimal atomic beam speed-laser intensity pair does exist, which could give substantially improved focusing over the one with the experimental parameters given in the literature. It is also shown that the widely used classical particle optics approach can lead to erroneous predictions.