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Study on the evaporation of high melting temperature metal by using the manufactured electron hem gun system  

정의창 (한국원자력연구소 양자광학부)
노시표 (한국원자력연구소 양자광학부)
김철중 (한국원자력연구소 양자광학부)
Publication Information
Journal of the Korean Vacuum Society / v.12, no.1, 2003 , pp. 1-6 More about this Journal
Abstract
An axial electron beam gun system, which emits the electron beam power of 50 kW, has been manufactured. The electron beam gun consists of two parts. One is the electron beam generation part. including the filament, cathode, and anode. The maximum beam current is 2 A and the acceleration voltage is 25 kV. The other part includes the focusing-, deflection-, and scanning coils. The beam diameter and ham trajectory can be controlled by these coils. The characteristic of each part is measured ior the optimum condition of evaporation process. Moreover, Helmholtz coil is installed inside the vacuum chamber to adjust the incident angel of the beam to the melting surface for the maximum evaporation. We report on the evaporation rates for zirconium(Zr) and gadolinium(Gd) metals which have the high melting temperatures.
Keywords
Electron beam gun; Evaporation; Zr;
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