• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.220-220
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• 2012

저밀도 알곤 유도결합플라즈마(Ar-ICP) 를 적용한 그래핀 클리닝 연구를 보고한다. 알곤 축전결합플라즈마(Ar-CCP)는 높은 이온포격에너지 (수백 eV) 로 인하여 그래핀의 C-C $sp_2$ bonding을 쉽게 파괴하고 defect을 형성시킨다. 그러나 저밀도 ($n_i$ < $5{\times}10^8cm^{-3}$) Ar-ICP 에 노출된 그래핀은 낮은 이온포격에너지, 이온밀도로 인하여 defect 이 형성되지 않고 residue 제거가 가능하였다. Graphene 이 집적된 back-gated field effect transistor (G-FET) 가 저밀도 Ar-ICP 에 노출될 경우 resist residue 제거로 인하여 $V_{dirac}$ 이 0 V 방향으로 이동하고 mobility 가 증가하는 것을 확인하였다.

• Journal of the Korean Institute of Telematics and Electronics
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• v.18 no.3
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• pp.42-51
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• 1981

Boron was predeposited into p (100) Si wafer at 94$0^{\circ}C$ for 60minutes to make the back surface field. High tempreature diffusion process at 1145$^{\circ}C$ for 3 hours was immediately followed without removing boron glass to obtain high surface concentration Back boron was annealed at 110$0^{\circ}C$ for 40minutes after boron glass was removed. N+ layer was formed by predepositing with POCI3 source at 90$0^{\circ}C$ for 7~15 minutes and annealed at 80$0^{\circ}C$ for 60min1es under dry Of ambient. The triple metal layers were made by evaporating Ti, Pd, Ag in that order onto front and back of diffused wafer to form the front grid and back electrode respectively. Silver was electroplated on front and back to increase the metal thickness form 1~2$\mu$m to 3~4$\mu$m and the metal electrodes are alloyed in N2 /H2 ambient at 55$0^{\circ}C$ and followed by silicon nitride antireflection film deposition process. Under artificial illumination of 100mW/$\textrm{cm}^2$ fabricated N+PP+ cells showed typically the open circuit voltage of 0.59V and short circuit current of 103 mA with fill factor of 0.80 from the whole cell area of 3.36$\textrm{cm}^2$. These numbers can be used to get the actual total area(active area) conversion efficiency of 14.4%(16.2%) which has been improved from the provious N+P cell with 11% total area efficiency by adding P+ back.

• Current Photovoltaic Research
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• v.4 no.2
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• pp.31-41
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• 2016

n-type PERT (passivated emitter, rear totally diffused) bifacial solar cells with boron and phosphorus diffusion as p+ emitter and n+ BSF (back surface field) have attracted significant research interest recently. In this work, the influences of wafer thickness, bulk lifetime, emitter, BSF on the photovoltaic characteristics of solar cells are discussed. The performance of the solar cell is determined by using one-dimensional solar cell simulation software PC1D. The simulation results show that the key role of the BSF is to decrease the surface doping concentration reducing the recombination and thus, increasing the cell efficiency. A lightly phosphorus doped BSF (LD BSF) was experimentally optimized to get low surface dopant concentration for n type bifacial solar cells. Pre-oxidation combined with a multi-plateau drive-in, using limited source diffusion was carried out before pre-deposition. It could reduce the surface dopant concentration with minimal impact on the sheet resistance.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.8
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• pp.11-16
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• 2008

In this paper, firstly we made of the rapid thermal processor equipment with the specifically useful structure to measure wafer stress. Secondly we made of the laser interferometry to inspect the wafer surface curvature based on the large deformation theory. And then the wafer surface fringe image was obtained by experiment, and the full field stress distribution of wafer surface comes into view by signal processing with thining and pitch mapping. After wafer was ground by 1mm and polished from the back side to get easily deformation, and it was heated by three to four times thermal treatments at about 1000 degree temperature. Finally the severe deformation between wafer before and after the heat treatment was shown.

• Journal of the Microelectronics and Packaging Society
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• v.10 no.2
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• pp.33-37
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• 2003

The new textured surface epitaxial base(TSEB) cell as a high efficiency Si solar cell was fabricated and its eletro-optical characteristics were investigated. The fabricated device showed the open circuit voltage of 0.62 V, the short circuit current of 40 mA, the fill factor of 0.7, and the efficiency of 16% under the incident light of AM-1 100 mW/$cm^2$. The TSEB cell proposed in this paper has the structural superiority in the fabrication of high efficiency solar cell due to the carrier drift transport in the optical absorption region and the formation of back surface field by $P^-/P^+$ epitaxial base, and the low emitter series resistance by insertion of $n^+$ buried contact.

• Plant Journal
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• v.4 no.3
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• pp.54-59
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• 2008

The resonance of boiler is caused by exciting force in the gas path and it generates the vibration by the harmony of boiler's dimensional factor. According to trending toward the boiler of increasing capacity and a bigger size, it has a problem of the vibration at back-pass heating surfaces. We can predict such vibrations as comparison between vortex frequency and gas column's natural frequency. We can't rely on the method for the past decades because of changing parameters, such as an allowable error, gas temperature, gas velocity, Strouhal number. We can reduce the vibration to use the seasoning effect and change the operating condition in coal fired boiler but it's not essential solution. When the vibration occurred in the model boiler, we must measures the acoustic pressure and frequency of places for considering the means. So far, we confirmed the problem from field measures and theoretical analysis about the acoustic vibration of boiler. We installed anti-acoustic baffle in a existing boiler to change the acoustic natural frequency at the cavity, which results in reducing the acoustic vibration. The first, we prove that the acoustic resonance is caused by harmonizing vortex shedding frequency of tube heat surface with acoustic natural frequency of cavity in the range of 650~750 MW loads. The second, the acoustic resonance at the back-pass heating surface has the third order of acoustic natural frequency at the second economizer. We install five anti-acoustic baffles at the second economizer to reducing the resonance. We confirm considerably reducing the acoustic vibration of boiler during the commercial boiler.

• Proceedings of the KIEE Conference
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• 1991.11a
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• pp.167-170
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• 1991

The back e.m.f. of PMSM is increased as the speed is increased and it saturates the current regulator because it counteracts the available output voltage of the inverter. In the PM motor, however, the required armature terminal voltage can be reduced within the maximum output voltage of the inverter by field weakening control, in which the air gap flux is weakened by the d-axis armature current. In this paper, the field weakening control of the surface PMSM fed by a hysteresis current control led PWM inverter based on the microprocessor is presented. To show the validity of the proposed control method, the simulation and experimental results are provided.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.04b
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• pp.69-72
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• 2002

We establish a visible light emission from porous polycrystalline silicon nano structure(PPNS). The PPNS layer are formed on heavily doped n-type Si substrate. 2um thickness of undoped polycrystalline silicon deposited using LPCVD (Low Pressure Chemical Vapor Deposition) anodized in a HF: ethanol(=1:1) as functions of anodizing conditions. And then a PPNS layer thermally oxidized for 1 hr at $900^{\circ}C$. Subsequently, thin metal Au as a top electrode deposited onto the PPNS surface by E-beam evaporator and, in order to establish ohmic contact, an thermally evaporated Al was deposited on the back side of a Si-substrate. When the top electrode biased at +6V, the electron emission observed in a PPNS which caused by field-induces electron emission through the top metal. Among the PPNSs as functions of anodization conditions, the PPNS anodized at a current density of $10mA/cm^{2}$ for 20 sec has a lower turn-on voltage and a higher emission current. Furthermore, the behavior of electron emission is uniformly maintained.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.10a
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• pp.1712-1716
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• 2008

Performance of ground improvement project using prefabricated vertical drains of condition, in which approximately 10m dredged fill overlies original soft foundation layer in the coastal area has been conducted. From field monitoring results, excessive ground settlement compared to predicted settlement in design stage developed during the following one year. In order to predict the final consolidation behavior, recalculation of consolidation settlements and back analysis using observed settlements were conducted. Field monitoring results of surface settlements were evaluated, and then corrected because large shear deformation was occurred by construction events in the early stages of consolidation. To predict the consolidation behavior, material functions and in-situ conditions from laboratory consolidation test were re-analyzed. Using these results, height of additional embankment is estimated to satisfy residual settlement limit and maintain an adequate ground elevation. The recalculated time-settlement curve has been compared to field monitoring results after additional surcharge was applied.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.66 no.6
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• pp.981-987
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• 2017

In this paper, we describe the LPM structure with a two-phase, which is not used previously, and explain its operation principle. In order to predict the accurate performance of LPM reduction model, finite element model was derived and the back EMF of LPM reduction model was measured and compared. In order to investigate the thrust and normal force of the LPM reduction model, a driving circuit capable of applying two-phase pulse currents was constructed and the performance was predicted in conjunction with the finite element analysis model. Finally, the design considering actual LPM size was performed. Since the size of the reduction model is small, the field could be made of a permanent magnet. However, it is almost impossible to manufacture a permanent magnet to match the size and capacity of a real LPM for a vehicle, in terms of cost and writing. Therefore, the actual vehicle LPM was replaced by wound type that generates a magnetic field by applying current to the field winding, and the final model was derived using the reaction surface method.