• Title/Summary/Keyword: Ba/F3

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The Etching Characteristics of (Ba0.6Sr0.4)TiO3 films Using Ar/CF4 Inductively Coupled Plasma (Ar/CF4 유도결합 플라즈마를 이용한 (Ba0.6Sr0.4)TiO3 박막의 식각 특성)

  • 강필승;김경태;김동표;김창일;이수재
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.15 no.11
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    • pp.933-938
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    • 2002
  • (Ba,Sr)TiO$_{4}$ (BST) thin films on Pt/Ti/SiO$_{2}$/Si substrates were deposited by a sol-gel method and the etch characteristics of BST thin films have been investigated as a function of gas mixing ratio. The maximum etch rate of the BST films was 440 $AA$/min under such conditions as: CF$_{4}$(CF$_{4}$+Ar) of 0.2, RF-power of 700 W, DC-bias voltage of -200 V, pressure of 15 mTorr and substrate temperature of 30 $^{circ}C$. The selectivities of BST to Pt, SiO$_{2}$ and PR were 0.38, 0.25 and 0.09, respectively. In the XPS (X-ray photoelectron spectroscopy) analysis, Barium (Ba) and Strontium (Sr) component in BST thin films formed low volatile compounds such as BaFx, SrFx, which are forms by the chemical reaction with F atoms and is removed by Ar ion bombardment. Titanium (Ti) is removed by chemical reaction such as TiF with ease. The result of secondary ion mass spectrometry (SIMS) analysis confirmed the existence of the BaFx, SrFK, TiFx.

Effect of NH4F Flux on the Characteristics of Barium Strontium Silicate Phosphor Particles (NH4F 융제가 바륨 스트론튬 실리케이트계 형광체의 특성에 미치는 영향)

  • Kang Hee Sang;Koo Hye Young;Jung Dae Soo;Ju Seo Hee;Hong Seung Kwon;Kang Yun Chan;Jung Kyeong Youl;Park Seung Bin
    • Korean Journal of Materials Research
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    • v.15 no.6
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    • pp.408-412
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    • 2005
  • [ $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ ] phosphor particles with high photoluminescence intensity under long wavelength ultraviolet were prepared by spray pyrolysis. We investigated the effect of $NH_4F$ flux added into starting solution on the morphology and photoluminescence intensity of $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ phosphor prepared by spray pyrolysis. $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ phosphor particles prepared from starting solution containing $NH_4F$ flux had the maximum photoluminescence intensity at the post-treatment temperature of $1200^{\circ}C$ and the maximum photoluminescence intensity of $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ phosphor particles prepared from the starting solution containing $NH_4F$ flux was $137\%$ of that of the phosphor particles prepared from the starting solution without flux material. $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ phosphor particles prepared from starting solution containing $NH_4F$ flux had larger size and more aggregated morphology than those prepared from starting solution without flux material. The photoluminescence intensity of $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ phosphor particles prepared from starting solution containing $NH_4F$ flux above $3wt.\%$ had high photoluminescence intensities. The addition amount of $NH_4F$ flux showing the maximum photoluminescence intensity was $12wt.\%$. The optimum amount of $NH_4F$ flux was $5wt.\%$ when we considered the morphological and photoluminescence characteristics of $Ba_{1.5}Sr_{0.5}SiO_4:Eu$ ohosphor particles prepared by spray pyrolysis.

Effects of $B_2O_3$ Additives on the Sintering Temperature and Microwave Dielectric Properties of $Ba(Zn_{1/3}Nb_{2/3})O_3$ Ceramics ($B_2O_3$의 첨가가 $Ba(Zn_{1/3}Nb_{2/3})O_3$ 세라믹스의 소결 온도와 고주파 유전 특성에 미치는 영향)

  • Kim, Min-Han;Son, Jin-Ok;Nahm, Sahn;Yoo, Myong-Jae;Park, Jong-Cheol;Lee, Hwack-Joo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.611-614
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    • 2004
  • [ $Ba(Zn_{1/3}Nb_{2/3})O_3$ ] (BZN) 세라믹스의 소결 온도는 약 $1350^{\circ}C$ 이다. 그러나 $B_2O_3$가 첨가된 경우, BZN 세라믹스는 $900^{\circ}C$에서 소결되었다. $BaB_4O_7$, $BaB_2O_4$ 그리고 $BaNb_2O_6$ 이차상이 $B_2O_3$가 첨가된 BZN 세라믹스에서 관찰되었다. $BaB_4O_7$$BaB_2O_4$ 이차상은 약 $900^{\circ}C$에서 공정 온도를 가지기 때문에 $B_2O_3$를 첨가한 BZN 세라믹스론 $900^{\circ}C$에서 소결하는 동안 액상으로 존재할 것으로 여겨지며, 그것이 BZN 세라믹스의 소결온도를 낮출 것으로 생각된다. 소결 온도의 증가에 따라 유전 상수 ($\varepsilon_r$)와 품질 계수 ($Q{\times}f$)의 값은 증가하였는데, 이는 밀도의 증가에 기인한다. 그러나 $B_2O_3$의 첨가량이 많은 경우 Q 값은 감소하는데, 이는 이차상의 존재가 품질계수의 저하를 초래한다고 생각된다. 2.0 mol% $B_2O_3$가 첨가된 BZN 세라믹스를 $950^{\circ}C$에서 2시간 동안 소결하는 경우, $Q{\times}f$=13.600 GHz, $\varepsilon_r$=37.6 그리고 공진 주파수 온도계수 ($\tau_f$) = 19 ppm/$^{\circ}C$의 유전특성을 얻을 수 있었다.

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Thermal Phenomenon of $BaMgAl_{10}O_{17}$:$Eu^{2+}$ Blue Phosphor by XANES and Rietveld Method

  • Kim, Kwang-Bok;Koo, Kyung-Wan;Chun, Hui-Gon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07a
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    • pp.210-213
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    • 2002
  • The blue phosphor, $BaMgAl_{10}O_{17}$:$Eu^{2+}$, showing a blue emission band at about 450 nm were prepared by solid state reaction of BaC $O_3$, A $l_2$ $O_3$, MgO and E $u_2$ $O_3$ with Al $F_3$ as a flux. The thermal quenching of BaMgAl $O_{17}$:E $u^{2+}$ phosphor significantly reduces the intensity of the blue emission. It is reduced by an amount of 50% after heating at around 800$^{\circ}C$ for 1 hr. The red emission in the 580∼720 nm region of $^{5}$ $D_{0}$\longrightarro $w^{7}$ $F_1$ and $^{5}$ $D_{0}$\longrightarro $w^{7}$ $F_2$ transition of $Eu^{3+}$ is produced from the phosphor heated above 1,100$^{\circ}C$. The EPR spectrum also reveals that some part of E $u^{2+}$ ions are oxidized to trivalent ions above 1,100$^{\circ}C$ at around 90 and 140mT. This oxidation evidence is also detected from XANES absorption spectra for $L_{III}$ shell of Eu ions: an absorption peak is at 6,977eV of E $u^{2+}$ and 6,984eV of $Eu^{3+}$. The combined X-ray and neutron data suggests that the new phase of EuMgA $l_{11}$ $O_{19}$ magnetoplumbite structure may be formed by heat treatment.eat treatment.tment.eat treatment.tment.t.

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Effect of Excess ZnO on Microwave Dielectric Characteristics of Ba(${Zn}_{1/3}{Ta}_{2/3}$)$O_3$ Ceramics (ZnO의 과잉첨가가 Ba(${Zn}_{1/3}{Ta}_{2/3}$)$O_3$세라믹스의 마이크로파 유전특성에 미치는 영향)

  • 이두희;윤석진;박창엽
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.43 no.4
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    • pp.613-619
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    • 1994
  • Dielectric properties of Ba(ZnS11/3TTaS12/3T)OS13T+x ZnO(x=0, 0.4, 0.8, 1.0 wt%) ceramics have been investigated at microwave frequencies. With excess ZnO, the sinterability was improved and the dielectric constant($\varepsilon$S1rT) and the unloaded quality factor(QS1UT) were increased. The structure changed into hexagonal from pseudocubic as being annealed at 140$0^{\circ}C$ in excess ZnO composition. Also, the temperature coefficient of the resonant frequency ($\tau$S1fT) turned into (-)ppm/$^{\circ}C$ when sintered at 155$0^{\circ}C$ for 2 hours. But the specimen sintered in ZnO muffling showed increased density and $\varepsilon$S1rT but lowerde QS1uT. Among the specimen investigated, expecially the composition added with 0.4wt% excess ZnO showed the most optimum dielectric values ($\varepsilon$S1rT=28, QS1uT x f=120000GHz) better than those of original Ba(ZnS11/2T TaS12/3T)OS13T ceramics.

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The Effects of (Ba0.4Ca0.6)SiO3 Nano Spheroidization Glass Additives on the Microstructure and Microwave Dielectric Properties of Ba(Zn1/3Ta2/3)O3 Ceramics

  • Choi, Cheal Soon;Kim, Ki Soo;Rhie, Dong Hee;Yoon, Jung Rag
    • Journal of Electrical Engineering and Technology
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    • v.9 no.5
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    • pp.1719-1723
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    • 2014
  • In this study, the microwave dielectric properties of nano spheroidization glass powders added $Ba(Zn_{1/3}Ta_{2/3})O_3$ ceramics prepared by solid state reaction have been investigated. Adding $(Ba_{0.4}Ca_{0.6})SiO_3$ nano spheroidization glass powders could effectively promote the densification even in the case of decreasing the sintering temperature. When the glass frit is 0.3 wt% and sintering is carried out at a temperature of $1500^{\circ}C$ for 6 hr, a temperature stable microwave dielectric ceramic could be obtained, which has a dielectric constant (${\varepsilon}_r$) of 30.2, a quality factor ($Q{\times}f_0$) of 124,000 GHz and a temperature coefficient of resonance frequency (${\tau}_f$) of $2ppm/^{\circ}C$.

A study on the preparation of $(Ba_{1-X}Sr_X)ZrO_3$ using oxalate method and its dielectric properties (수산염법에 의한 $(Ba_{1-X}Sr_X)ZrO_3$의 합성 및 그의 유전특성에 관한 연구)

  • Oh Seong Kweon;Nam Seok Baik;Byung Ha Lee
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.4 no.3
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    • pp.252-261
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    • 1994
  • The $(Ba_{1-X}Sr_X)ZrO_3$ powder showing chemically pure and fine particle size was attempted to be synthesized by the oxalate method. The objective of this study is to determine the optimum synthesis condition of stable $(Ba_{1-X}Sr_X)ZrO_3$ powder in terms of the temperatures coefficient of resonant frequency ${\tau}_f$ by examining the microstructure and dielectric properties of the synthesized powder. The six compounds (x=0, 0.2, 0.4, 0.6, 0.8, 1) of $(Ba_{1-X}Sr_X)ZrO_3$ were prepared by the oxalate method, and then calcined at $1000^{\circ}C$ to obtain the crystalline $(Ba_{1-X}Sr_X)ZrO_3$ powder. The synthesized powder showed the globular-shape and average particle size of less than $0.2 \mu\textrm{m}$. The composition of x=0.5, i.e., half of Ba was replaced by Sr, is experted to show the zero value of temperatures coefficient of capacitance ${\tau}_c$.

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Synthesis and Emission Properties of Dy3+-doped BaMoO4 Phosphors (Dy3+ 이온이 도핑된 BaMoO4 형광체의 합성과 발광 특성)

  • Cho, Shinho
    • Journal of the Korean Vacuum Society
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    • v.22 no.4
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    • pp.181-187
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    • 2013
  • $Dy^{3+}$-doped $BaMoO_4$ phosphor powders were synthesized by using the solid-state reaction method and their crystalline structure, morphology and size of particles, excitation and emission properties were investigated. The structure of all the phosphor powders, irrespective of the mol ratio of $Dy^{3+}$ ions, was found to be the tetragonal system with the main diffraction peak at (112) plane. The grain particles agglomerate together to form larger clusters with increasing the mol ratio of $Dy^{3+}$ ions. The excitation spectra were composed of a broad band centered at 293 nm and weak multiline peaked in the range of 230~320 nm, which were due to the transitions of $Dy^{3+}$ ions. The emission of the phosphors peaking at 666 and 754 nm, originating from the transitions of $^4F_{9/2}{\rightarrow}^6H_{11/2}$ and $^4F_{9/2}{\rightarrow}^6H_{9/2}$ of $Dy^{3+}$ ions, was rather weak, while the intensity of blue and yellow emission peaking at 486 nm and 577 nm due to the transitions of $^4F_{9/2}{\rightarrow}^6H_{15/2}$ and $^4F_{9/2}{\rightarrow}^6H_{13/2}$ of $Dy^{3+}$ ions was significantly stronger. The experimental results suggest that the white-light emission can be realized by controlling the yellow-to-blue intensity ratio of $Dy^{3+}$ emission.

Fabrication of zirconiumfluoride Glasses used for 1.54um Fiber Amplifier (1.54um 광섬유 광증폭기 Er-doped Zirconiumfluoride 유리제조)

  • 조운조
    • Proceedings of the Optical Society of Korea Conference
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    • 1989.02a
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    • pp.140-142
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    • 1989
  • 1.54um 파장에서 최대 형광을 나타내는 ZrF4-BaF2-LaF3-AlF3-NaF : ErF3 유리를 built-in-casting 법에 의해 제조하였다. Er+3 이온을 0.2몰부터 4몰까지 첨가하였으며, Er+3 이온의 4I13/2 준위의 lifetime 은 Er+3 이온 0.2몰부터 2몰까지 28msec로 최대값을 갖으며 4몰일때는 급격히 감소하였다.

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Effect of $({Zn}_{1/3}{Nb}_{2/3}){O}_{2}$ Addition on the phase changes and dielectric properties of ${BaTiO}_{3}-{3TiO}_{2}$ceramics ($({Zn}_{1/3}{Nb}_{2/3}){O}_{2}$의 첨가가 세라믹스의 상변화 및 유전특성에 미치는 영향)

  • 김상근;박찬식;변재동;김경용
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.44 no.8
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    • pp.1068-1074
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    • 1995
  • Effect of (Zn$_{1}$3/Nb$_{2}$3/) $O_{2}$ addition on the phase changes and microwave dielectric properties of BaTi $O_{3}$-3Ti $O_{2}$ ceramics were investigated. Addition of (Zn$_{1}$3/Nb$_{2}$3/) $O_{2}$ to BaTi $O_{3}$-3Ti $O_{2}$ resulted in the formation of Ba $Ti_{4}$$O_{9}$, $Ba_{2}$ $Ti_{9}$ $O_{20}$, Ba(Zn$_{1}$3/Nb$_{2}$3/) $O_{3}$, and Ti $O_{2}$ phases. Ba $Ti_{4}$$O_{9}$ phase was gradually transformed to $Ba_{2}$ $Ti_{9}$ $O_{20}$. This was identified by XRD and microstructure. As the Ba $Ti_{4}$$O_{9}$ phase transformed to $Ba_{2}$ $Ti_{9}$ $O_{20}$ phase, the dielectric constant increased to 37.5. Q*f$_{o}$ value was 40000 at x=0.04, and the temperature coefficient of resonant frequency was +10ppm/.deg. C.C.. C.C.

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