• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.16 no.7
• /
• pp.564-568
• /
• 2003

The etching of Au thin films have been performed in an inductively coupled CF$_4$/Cl$_2$/Ar plasma. The etch rates were measured as CF$_4$ contents added from 0 to 30 % to Cl$_2$/Ar plasma, of which gas mixing ratio was fixed at 20%. Other parameters were fixed at an rf power of 700 W, a dc bias voltage of 150 V, a chamber pressure of 15 mTorr, and a substrate temperature of 3$0^{\circ}C$. The highest etch rate of the Au thin film was 3700 $\AA$m/min at a 10% additive CF$_4$ into Cl$_2$/Ar plasma. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. XPS analysis indicated that Au reacted with Cl and formed Au-Cl, which is hard to remove on the surface because of its high melting point. The etching products could be sputtered by Ar ion bombardment.

• Transactions on Electrical and Electronic Materials
• /
• v.4 no.3
• /
• pp.1-4
• /
• 2003

The etching of Au thin films has been performed in an inductively coupled $CF_4 / Cl_2 / Ar$ plasma. The etch properties including etch rate and selectivity were examined as $CF_4$ content adds from o to $30\%$ to $Cl_2/Ar$ plasma. The $Cl_2/(Cl_2 + Ar)$ gas mixing ratio was fixed at $20\%$. Other parameters were fixed at an rf power of 700 W, a dc bias voltage of -150 V, a chamber pressure of 15 mTorr, and a substrate temperature of $30^{\circ}C$. The highest etch rate of the Au thin film was 370 nm/min at a $10\%$ additive $CF_4$ into $Cl_2/Ar$ gas mixture. The surface reaction of the etched Au thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. The XPS analysis shows that the intensities of Ail peaks are changed, indicating that there is a chemical reaction between Cl and Au. Au-Cl is hard to remove on the surface because of its high melting point. However, etching products can be sputtered by Ar ion bombardment.

• Journal of Industrial Technology
• /
• v.29 no.B
• /
• pp.229-232
• /
• 2009

We prepared gold nanoparticles (Au NPs) by reduction-oxidation reaction between $HAuCl_4$ and trisodium citrate and measured the size and morphology of Au NPs by TEM for various molar ratios of $HAuCl_4$ to citrate and for various concentrations of $HAuCl_4$. UV-vis spectroscopy was used to characterize the optical properties of Au NPs. Au NPs in the size range from 14.3 nm to 20.3 nm were prepared with monodisperse distribution.

• Bulletin of the Korean Chemical Society
• /
• v.29 no.8
• /
• pp.1441-1442
• /
• 2008

• Journal of the Korean Vacuum Society
• /
• v.22 no.5
• /
• pp.270-275
• /
• 2013

Single-layer graphene layers have been synthesized by using chemical vapor deposition, subsequently transferred on 300 nm $SiO_2/Si$ and quartz substrates, and doped with $AuCl_3$ by spin coating for various doping concentrations ($n_D$) from 1 to 10 mM. Based on the $n_D$-dependent variations of Raman frequencies/peak-intensity ratios, sheet resistance, work function, and Dirac point, measured by structural, optical, and electrical analysis techniques, the p-type nature of graphene is shown to be strengthened with increasing $n_D$. Especially, as estimated from the drain current-gate voltage curves of graphene field effect transistors, the hole mobility is very little varied with increasing $n_D$, in strong contrast with the $n_D$-dependent large variation of electron mobility. These results suggest that $AuCl_3$ is one of the best p-type dopants for graphene and is promising for device applications of the doped graphene.

• Korean Journal of Materials Research
• /
• v.16 no.8
• /
• pp.524-528
• /
• 2006

On the synthesis of Au/$TiO_2$ core-shell structure nanoparticle, the effect of concentration of $Ti^{4+}$ and reaction temperature on the morphology and optical property of Au/$TiO_2$ core-shell nanoparticles is examined. A gold colloid was prepared by $HAuCl_4{\cdot}4H_2O\;and\;C_6H_5Na_3{\cdot}2H_2O$. Titanium stock solution was prepared by mixing solution of titanium(IV) isopropoxide (TTIP) and triethanolamine (TEOA). The concentrations of $Ti^{4+}$ stock solution were adjusted to $10.01{\sim}0.3$ mM, and then the gold colloid is added to the $Ti^{4+}$ stock solution. Au/$TiO_2$ core-shell structure nanoparticles could be prepared by the hydrolysis of the $Ti^{4+}$ stock solution at $80^{\circ}C$. The size of synthesized Au nanoparticles was 15 nm. The thickness of $TiO_2$ shell on the surface of gold particles was about 10 nm. The absorption peak of synthesized Au/$TiO_2$ core-shell nanoparticles shifted towards the red end of the spectrum by about 3 nm because of the formation of $TiO_2$ shell on the surface of gold particles. The good $TiO_2$ shell is produced when $Ti^{4+}$ concentration is varied between 0.01 and 0.05 mM, and reaction temperature is maintained at $80^{\circ}C$. The crystal structure of $TiO_2$ shell was amorphous.

• Bulletin of the Korean Chemical Society
• /
• v.35 no.7
• /
• pp.2072-2076
• /
• 2014

Sub-micrometer size gold particles were electrodeposited on a transparent fluorine-doped tin oxide (FTO) from acetonitrile solution containing $AuCl_4{^-}$ and tetramethylammonium tetraflouroborate (TMATFB) for detecting $NO_2{^-}$. A series of two-electron ($2e^-$) and one-electron ($1e^-$) reductions of the $AuCl_4{^-}-AuCl_2{^-}-Au$ redox systems were observed at FTO and a highly stable and homogeneous distribution of Au on FTO (Au/FTO) was obtained by stepping the potential from 0 to -0.55 V (vs. Ag/$Ag^+$). The Au/FTO electrode exhibited sufficiently high catalytic activity toward the oxidation of $NO_2{^-}$ with a detection limit (S/N = 3) and sensitivity of 2.95 ${\mu}M$ and 223.4 ${\mu}A{\cdot}cm^{-2}{\cdot}mM^{-1}$, respectively, under optimal conditions. It exhibited an interference-free signal for $NO_2{^-}$ detection with excellent recoveries from real samples.

• Journal of the Korean Ceramic Society
• /
• v.43 no.2 s.285
• /
• pp.114-120
• /
• 2006

Nano-size Au particle doped $TiO_2$ films were prepared with $Ti(OC_3H_7^i)_4$, polyvinylpyrrolidone(PVP), $HAuCl_4$ and $C_3H_7OH$ etc. by sol-gel method. $TiO_2$ gel films were obtained by the dip-coating method on the $SiO_2$ glass substrates, and then heat-treated at $700^{\circ}C$ for 10 min. The thickness of $TiO_2$ films were $0.7\~1.8\;{\mu}m$. It was found that the thickness of films prepared from PVP containing solution was about $2\~8$ times higher values than that of thin films without PVP. The size of Au particles doped in the films were about $350\~750\;nm$. Nano-size Au particle dispersed $TiO_2$ films showed high absorption peak at visible region 450nm, which made them good candidates for non-linear optical materials and photo-catalytic materials. The contact angle of $TiO_2$ film for water was $12.5^{\circ}$, and therefore it is clear that $TiO_2$ films have very high hydrophilic properties and the self-cleaning effects.

• Analytical Science and Technology
• /
• v.37 no.1
• /
• pp.47-62
• /
• 2024

Abu Gurdi area is located in the South-eastern Desert of Egypt which considered as volcanic massive sulfide deposits (VMS). The present work aims at investigating the ore mineralogy of Abu Gurdi region in addition to the effectiveness of the hydrometallurgical route for processing these ores using alkaline leaching for the extraction of Zn, Cu, and Pb in the presence of hydrogen peroxide, has been investigated. The factors affecting the efficiency of the alkaline leaching of the used ore including the reagent composition, reagent concentration, leaching temperature, leaching time, and Solid /Liquid ratio, have been investigated. It was noted that the sulfide mineralization consists mainly of chalcopyrite, sphalerite, pyrite, galena and bornite. Gold is detected as rare, disseminated crystals within the gangue minerals. Under supergene conditions, secondary copper minerals (covellite, malachite, chrysocolla and atacamite) were formed. The maximum dissolution efficiencies of Cu, Zn, and Pb at the optimum leaching conditions i.e., 250 g/L NaCO₃ - NaHCO₃ alkali concentration, for 3 hr., at 250 ℃, and 1/5 Solid/liquid (S/L) ratio, were 99.48 %, 96.70 % and 99.11 %, respectively. An apparent activation energy for Zn, Cu and Pb dissolution were 21.599, 21.779 and 23.761 kJ.mol^-1, respectively, which were between those of a typical diffusion-controlled process and a chemical reaction-controlled process. Hence, the diffusion of the solid product layer contributed more than the chemical reaction to control the rate of the leaching process. High pure Cu(OH)₂, Pb(OH)₂, and ZnCl₂ were obtained from the finally obtained leach liquor at the optimum leaching conditions by precipitation at different pH. Finally, highly pure Au metal was separated from the mineralized massive sulfide via using adsorption method.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.29 no.4
• /
• pp.179-186
• /
• 2019

In this study, we investigated the structural properties of $Ga_2O_3$ thin films and the photo-electrical properties of metal-semiconductor-metal (MSM) photodetectors deposited by Ti/Au electrodes. $Ga_2O_3$ thin films were grown at different temperatures using metal organic chemical vapor deposition (MOCVD). The crystal phase of $Ga_2O_3$ changed from ${\varepsilon}$-phase to ${\beta}$-phase depending on the growth temperature. The crystal structure of ${\varepsilon}-Ga_2O_3$ was confirmed by X-ray diffraction (XRD) analysis and the formation mechanism of crystal structure was discussed by scanning electron microscopy (SEM) images. From the results of current-voltage (I-V) and time-dependent photoresponse characteristics under the illumination of external lights, we confirmed that the MSM photodetector fabricated by ${\varepsilon}-Ga_2O_3$ showed much better photocurrent characteristics in the 266 nm UV range than in the visible range.