• 제목/요약/키워드: Au thin film

검색결과 302건 처리시간 0.027초

Enhanced Electrical Performance of SiZnSnO Thin Film Transistor with Thin Metal Layer

  • Lee, Sang Yeol
    • Transactions on Electrical and Electronic Materials
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    • 제18권3호
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    • pp.141-143
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    • 2017
  • Novel structured thin film transistors (TFTs) of amorphous silicon zinc tin oxide (a-SZTO) were designed and fabricated with a thin metal layer between the source and drain electrodes. A SZTO channel was annealed at $500^{\circ}C$. A Ti/Au electrode was used on the SZTO channel. Metals are deposited between the source and drain in this novel structured TFTs. The mobility of the was improved from $14.77cm^2/Vs$ to $35.59cm^2/Vs$ simply by adopting the novel structure without changing any other processing parameters, such as annealing condition, sputtering power or processing pressure. In addition, stability was improved under the positive bias thermal stress and negative bias thermal stress applied to the novel structured TFTs. Finally, this novel structured TFT was observed to be less affected by back-channel effect.

Polyimide초박막의 전계인가에 따른 전기특성 (Electrical Properties by Applied Electric Field of Polyimide Ultra Thin Films)

  • 최영일;전동규;구할본;김철;권영수;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.73-76
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    • 1998
  • We give pressure stimulation into organic thin films and detect the induced displacement current. then manufacture a device under the accumulation condition that the state surface pressure is 15[mN/m]. In processing of a device manufacture. We can see the process is good from the change of a surface pressure for organic thin films and transfer ratio of area per molecule. The structure of manufactured device is Au/organic thin films(polyimide)/Au, the number of accumulated layers are 31,35, and 41. I-V characteristic of the device is measured from 0[V] to +5[V]. The maximum value of measured current is increased as the number of accumulated layers are decreased. The resistance for the number of accumulated layers, the energy density for an input voltage show desired results, and the insulation of a thin film is better as the interval between electrodes is larger.

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LB 초박막을 이용한 전지전자 공업용 MIM소자의 온도변화에 의한 발생전압 특성 (Characteristics of Generated Voltage by Temperature Change of Electrical, Elecrtronic and Industrial MIM Element Using LB Ultra Thin Film)

  • 김병인;국상훈
    • 한국조명전기설비학회지:조명전기설비
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    • 제11권3호
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    • pp.80-87
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    • 1997
  • Polyimide LB막 의 시료 와 {{{{Al/{Al}_{2}{O}_{3}/PI(nL)/Au}}}} 에 대해 전압의 온도특성 실험에서 상부전극과 하부전극간에 일함수차를 발견하였다. Polyimide LB\ulcorner은 Z형으로 누적하거나 , imide화하면 막에 분극이 발생하지 않았다. 또 {{{{{C}_{15} TCNQ}}}} LB 막 시료{{{{Al/{Al}_{2}{O}_{3}/{C}_{15} TCNQ(10L)/Al}}}} 은 상, 하부 전극이 같아 일차함수가 없었으며 막에 분극이 발생하였다. LB 초박막 MIM 소자를 시료로 하여 실험한 결과 수백 mV 이상의 직류가 발생하였으므로 전기.전자 및 정보통신 분야의 산업용 전원으로 이용할 수 있다고 생각한다.

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자기장 내 열처리에 의한 퍼멀로이 박막의 일축 이방성 자기장의 회전에 관한 연구 (A Study on the Rotation of Uniaxial Anisotropy Field of NiFe Thin Film by Magnetic Annealing)

  • 송용진;김기출;이충선
    • 한국자기학회지
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    • 제11권4호
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    • pp.163-167
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    • 2001
  • DC 마그네트론 스퍼터링법으로 증착된 700 $\AA$의 NiFe 박막을 박막 증착시 형성시킨 자화용이축에 수직한 자기장을 인가하여 열처리한 후 일축 이방성 자기장의 회전을 조사하였다. NiFe 박막은 열처리온도 160 $^{\circ}C$에서 자화용이축과 자화곤란축을 구분할 수 없는 등방적인 상태가 되었고, 열처리온도가 증가함에 따라 다시 일축 이방성을 갖는 상태가 되었다. 열처리 온도가 400 $^{\circ}C$ 이상인 경우에 급격한 보자력의 증가를 보였다. 열처리 온도가 400 $^{\circ}C$인 경우에 XRD 분석과 AES depth profile은 NiFe 박막 내에서 (111) 방향으로 결정성장이 활발히 일어나며 인접한 전극 Au와 상호화산 현상도 광범위하게 일어남을 보여주었다.

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Organic transistor comprising a polymer gate insulator

  • Kang, Gi-Wook;Kang, Hee-Young;Ahn, Young-Joo;Lee, Nam-Heon;Lee, Mun-Jae;Lim, Jong-Tae;Lee, Chang-Hee
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.777-779
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    • 2002
  • We report the performance of pentacene-based organic thin film transistors (OTFT) with PMMA (polymethyl methacrylate) as the gate insulator which was spin-coated on the ITO (indium tin oxide) glass substrate which was used as the gate contact. The pentacene thin film was deposited on the PMMA film and then Au source/drain contacts were deposited through shadow mask. The pentacene film shows better molecular ordering on PMMA compared with $SiO_2$ of Si wafer. The devices exhibited the field effect mobility of ${\sim}0.004cm^2$/Vs and on/off current ratio of ${\sim}10^3$.

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보자력 향상을 위한 Ti/CoCrPt박막의 하지층 (Underlayer for Coercivity Enhancement of Ti/CoCrPt Thin Films)

  • 장평우
    • 한국자기학회지
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    • 제12권3호
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    • pp.94-98
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    • 2002
  • 20nm이하의 얇은 박막에서도 높은 보자력이 요구되는 Ti/CoCrPt 수직자기기록박막의 보자력 향상을 위해 Al, Cu, Ni, Cr, Ag, Mg, Fe, Co, Pd, Au, Pt, Mo, Hf등의 여러 하지층과 제조조건이 보자력에 미치는 영향을 조사하였다 이들 중 Ag과 Mg하지층은 Ti/CoCrPt박막의 보자력을 향상시켰으며 특히 2nm Ag 하지층을 사용할 경우 10nm CoCrPt 박막에서 2200 Oe의 높은 보자력을 보일뿐 아니라 $\alpha$값을 낮추는 효과가 있었다. 그러나 Ag를 하지층으로 사용하면 기대와는 달리 Ti(002)면의 우선배향 성장이 전혀 일어나지 않아 보자력 증대에 다른 기구가 작용하는 것으로 판단되었다. 그리고 표면의 거칠기가 큰 기판에서는 보자력뿐만 아니라 역자구생성자계도 감소하였다.

Photoacryl을 게이트 절연층으로 사용한 유기 박막트랜지스터의 전기적 특성에 관한 연구 (A Study on the Electrical Characteristics of Organic Thin Film Transistor using Photoacryl as Gate Dielectric Layer)

  • 김윤명;표상우;김준호;신재훈;김영관;김정수
    • 한국전기전자재료학회논문지
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    • 제15권2호
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    • pp.110-118
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    • 2002
  • Organic thin film transitors(OTFT) are of interest for use in broad area electronic applications. And recently organic electroluminescent devices(OELD) have been intensively investigated for using in full-color flat-panel display. We have fabricated inverted-staggered structure OTFTs at lower temperature using the fused-ring polycyclic aromatic hydrocarbon pentacene as the active eletronic material and photoacryl as the organic gate insulator. The field effect mobility is 0.039∼0.17 ㎠/Vs, on-off current ratio is 10$\^$6/, and threshold voltage is -7V. And here we report the study of driving emitting, Ir(ppy)$_3$, phosphorescent OELD with all organic thin film transistor and investigated its electrical characteristics. The OELD with a structure of ITO/TPD/8% Ir(ooy)$_3$ doped in BCP/BCP/Alq$_3$/Li:Al/Al and OTFT with a structure of inverted-stagged Al(gate electrode)/photoacry(gate insulator)/pentacene(p-type organic semiconductor)/ Au(source-drain electrode) were fabricated on the ITP patterned glass substrate. The electrical characteristics are turn-on voltage of -10V, and maximum luminance of about 90 cd/㎡. Device characteristics were quite different with that of only OELD.

3차원 구조의 다공성 금 박막을 이용한 GABA의 전기화학적 측정 (Electrochemical Determination of GABA using a 3-D Nanoporous Gold Thin Film)

  • 표수현;이진호;오병근
    • 공업화학
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    • 제22권5호
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    • pp.575-578
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    • 2011
  • 전기화학적 증착 기법을 이용하여 간단하고 빠르게 3차원적 구조를 가지는 다공성 금 박막(NPGF : nanoporous gold thin film)을 금 기판 위에 제작하였다. 제작된 3차원적 구조의 NPGF는 주사 전자 현미경(SEM)을 이용하여 표면을 분석하였고, 이를 통하여 표면상에 30~50 nm 크기의 균일한 다공성 박막이 생성되었음을 확인하였다. Differential pulse voltammetry(DPV) 기법을 기반으로 3차원적 구조체를 가진 NPGF기판을 전극으로 사용하여 GABA를 농도별($10{\sim}100{\mu}M$)로 측정하였다. 본 연구에서 제안된 방법은 향후, 바이오센서 응용분야에 널리 사용될 수 있을 것으로 기대된다.

A Method to Predict the Performance of a-Si TFT device

  • Shih, Ching-Chieh;Wei, Chun-Ching;Wu, Yang-En;Gan, Feng-Yuan
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.52-55
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    • 2006
  • The driving-current degradation of a-Si:H thin-film transistor(TFT) device has been analyzed for the first time. A method to analyze the performance of TFT circuits is presented, which is different from the conventional one by threshold voltage shift method. It can be also used to evaluate the performance of gate driver on array (GOA) circuit, which is integrated in a 12.1" WXGA ($1280{\ast}3{\ast}800$) TFT-LCD panel.

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Ti/Au 이중층을 이용한 초전도 상전이 센서 제작 (Fabrication of Superconducting Transition Edge Sensors based on Ti/Au Bilayer Formation)

  • 이영화;김용함
    • 한국전기전자재료학회논문지
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    • 제21권10호
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    • pp.943-949
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    • 2008
  • We report on the development of transition edge sensors for x-ray detection. The sensor technology was based on the fabrication of a superconducting film on a thin membrane. A bilayer of a superconductor, Ti, and a noble metal, Au, was e-beam evaporated on a micromachined SiNx. Another Au layer was evaporated on the two side edges of the bilayer in order not to be affected by structural imperfections at the boundaries. With the method described in the present report, the superconducting transition temperature of the device was consistently achieved to near 80 mK with a sharp transition. The energy spectrum ueasured with the device provided 37 eV FWHM for 5.9 x-rays. We also discuss the design and fabrication considerations as well as the performance of the device in detail.