• 제목/요약/키워드: Au thin film

검색결과 302건 처리시간 0.028초

Development of IGZO TFTs and Their Applications to Next-Generation Flat-Panel Displays

  • Hsieh, Hsing-Hung;Lu, Hsiung-Hsing;Ting, Hung-Che;Chuang, Ching-Sang;Chen, Chia-Yu;Lin, Yusin
    • Journal of Information Display
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    • 제11권4호
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    • pp.160-164
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    • 2010
  • Organic light-emitting devices (OLEDs) have shown superior characteristics and are expected to dominate the nextgeneration flat-panel displays. Active-matrix organic light-emitting diode (AMOLED) displays, however, have stringent demands on the performance of the backplane. In this paper, the development of thin-film transistors (TFTs) based on indium gallium zinc oxide (IGZO) on both Gen 1 and 6 glasses, and their decent characteristics, which meet the AMOLED requirements, are shown. Further, several display prototypes (e.g., 2.4" AMOLED, 2.4" transparent AMOLED, and 32" AMLCD) using IGZO TFTs are demonstrated to confirm that they can indeed be strong candidates for the next-generation TFT technology not only of AMOLED but also of AMLCD (active-matrix liquid crystal display).

Au/Pl/Au구조의 유기박막 절연성에 관한 연구 (A Study on the Insulation Characteristics of Organic Thin Films of Au/Pl/Au structure)

  • 전동규;김영근;조제황;이경섭;최영일
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1998년도 하계학술대회 논문집 D
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    • pp.1468-1470
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    • 1998
  • Using a solution of polyamic acid salt obtained in combination with polyimide acid, we successfully prepared thermally stable multilayers(41, 35, 31 layers) films disilane-containing polyimide by Langmuir-Blodgett(LB) technique. We studied the electrically phenomena occurring at the metal(Au)/polyimide(Pl) LB film/metal(Au). Also, we then examined the of Pl LB films by means of current-voltage (I-V) and resistance measurement.

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Polyimide 터널 장벽을 이용한 Au/polyimide/유기 단분자막/Pb 구조에서 비탄성 전자 터널링에 관한 연구 (Inelastic Electron Tunneling in Au/polyimide/monolayer Organic Film/Pb Structures using a Polyimide Barrier)

  • 이호식;이원재;장경욱;최명규;이성일;김태완;;이준웅
    • 한국전기전자재료학회논문지
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    • 제17권2호
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    • pp.196-200
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    • 2004
  • Using polyimide Langmuir-Blodgett(LB) films as a tunneling harrier, we fabricated Au/Polyimide/1-layer arachidic acid/Pb structure in order to investigate electron transport properties through a junction. It was found that 9-layer polyimide LB films function as a good tunneling harrier in a study of current-voltage(I-V) chararteristics. And several peaks originating in the vibrational modes of the constituent molecules of 1-layer arachidic acid LB films were clearly observed in d$^2$V/dI$^2$- V corves.

Vertically Well-Aligned ZnO Nanowires on c-$Al_2O_3$ and GaN Substrates by Au Catalyst

  • Park, Hyun-Kyu;Oh, Myung-Hoon;Kim, Sang-Woo;Kim, Gil-Ho;Youn, Doo-Hyeob;Lee, Sun-Young;Kim, Sang-Hyeob;Kim, Ki-Chul;Maeng, Sung-Lyul
    • ETRI Journal
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    • 제28권6호
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    • pp.787-789
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    • 2006
  • In this letter, we report that vertically well-aligned ZnO nanowires were grown on GaN epilayers and c-plane sapphire via a vapor-liquid-solid process by introducing a 3 nm Au thin film as a catalyst. In our experiments, epitaxially grown ZnO nanowires on Au-coated GaN were vertically well-aligned, while nanowires normally tilted from the surface when grown on Au-coated c-$Al_2O_3$ substrates. However, pre-growth annealing of the Au thin layer on c-$Al_2O_3$ resulted in the growth of well-aligned nanowires in a normal surface direction. High-resolution transmission electron microscopy measurements showed that the grown nanowires have a hexagonal c-axis orientation with a single-crystalline structure.

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$C_{60}$(buckminsterfullurene) 홀주입층을 적용한 유기박막트랜지스터의 성능향상 (Performance enhancement of Organic Thin Film Transistor using $C_{60}$ hole injection layer)

  • 이문석
    • 대한전자공학회논문지SD
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    • 제45권5호
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    • pp.19-25
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    • 2008
  • 본 연구에서는 유기반도체인 펜타센과 소스-드레인 금속전극사이에 $C_{60}$을 홀주입층으로 적용한 유기박막트랜지스터를 제작하여 $C_{60}$을 삽입하지 않은 소자와의 전기적특성을 비교하였다. $C_{60}/Au$ 이중전극을 사용한 소자의 경우 Au단일전극을 사용한 소자와 비교하였을 때 전하이동도는 0.298 $cm^2/V{\cdot}s$에서 0.452 $cm^2/V{\cdot}s$ 문턱전압의 경우 -13.3V에서 -10.8V로 향상되었으며, contact resistance를 추출하여 비교하였을 경우 감소함을 확인할 수 있었다. 이러한 성능의 향상은 $C_{60}$을 Au와 pentacene 사이에 삽입하였을 경우 Au-pentacene 간의 원하지 않는 화학적 반응을 막아줌으로써 홀 주입장벽를 감소시켜 홀 주입이 향상되었기 때문이다. 또한 Al을 전극으로 적용한 OTFT도 제작하였다. 기존에 Al은 OTFT에 단일전극으로 사용하였을 경우 둘간의 높은 홀 주입장벽으로 인해 채널이 거의 형성되지 않았으나, $C_{60}/Al$ 이중전극을 사용한 소자의 경우 전하이동도와 전류점멸비은 0.165 $cm^2/V{\cdot}s$, $1.4{\times}10^4$ 으로써 Al를 단일전극으로 사용하는 소자의 전기적 특성에 비해 크게 향상되어진 소자를 제작할 수 있었다. 이는 $C_{60}$과 Al이 접합시에 interface dipole의 형성으로 Al의 vacuum energy level이 변화로 인한 Al의 work function이 증가되어 pentacene과 Al간의 hole injection barrier가 감소되었기 때문이다.

The effect of 3-mercapto-5-nitro-benzimidazole (MNB) and poly (methyl methacrylate) (PMMA) treatment sequence organic thin film transistor

  • Park, Jin-Seong;Suh, Min-Chul;Jeong, Jong-Han;Kim, Su-Young;Mo, Yeon-Gon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1174-1177
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    • 2006
  • A bottom contact organic thin film transistor (OTFT) is fabricated with an organic double-layered gate insulator (GI) and pentacene. The PMMA and MNB layers are treated on gate insulator and source/drain (S/D, Au) before depositing pentacene to investigate device properties and pentacene growth. The sequence of surface treatment affects a device performance seriously. The ultra-thin PMMA (below 50A) was deposited on organic gate insulator and S/D metal by spin coating method, which showed no deterioration of on-state current (Ion) although bottom contact structure was exploited. We proposed that the reason of no contact resistance (Rc) increase may be due to a wettability difference in between PMMA / Au and PMMA / organic GI. As a result, the device treated by $PMMA\;{\rightarrow}\;MNB$ showed much better Ion behavior than those fabricated by $MNB\;{\rightarrow}\;PMMA$. We will report the important physical and electrical performance difference associated with surface treatment sequence.

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The Photosensitive Insulating Materials as a Passivation Layer on a-Si TFT LCDs

  • Lee, Liu-Chung;Liang, Chung-Yu;Pan, Hsin-Hua;Huang, G.Y.;Gan, Feng-Yuan
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.695-698
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    • 2006
  • The photosensitive poly-siloxane material used as the passivation layers for the conventional back channel etched (BCE) thin film transistors (TFTs) has been investigated. Through the organic material, the TFT array fabrication process can be reduced and higher aperture ratio can be achieved for higher LCD panel performance. The interface between the organic passivation layer and the back channel of the amorphous active region has been improved by the back channel oxygen treatment and the devices exhibits lower leakage current than the conventional silicon nitride passivation layer of BCE TFTs. The leakage currents between Indium-tin-oxide (ITO) pixels and the TFT devices and its mechanism have also been investigated in this paper.

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Cd$_{80}$ Zn$_{20}$Te를 사용한 MIM 구조의 감마선 탐지 소자 제작 및 탐지 특성에 관한 연구 (A Study on the Fabrication and Detection of Cd$_{80}$ Zn$_{20}$Te Gamma-ray detector with MIM Structure)

  • 최명진;왕진석
    • 전자공학회논문지D
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    • 제34D권4호
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    • pp.47-53
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    • 1997
  • We fabricated gamma radiation detector using high resistive p-Cd$_{80}$Zn$_{20}$Te grown by high pressure bridgman method and forming au thin film electrode by chemically electroless deposition method. The device of Au/Cd$_{80}$Zn$_{20}$Te/Au is a typical MIM structure. The characteristic of current-voltage showed good linearity to 3kV/cm but it depend on the square of electric field over 3kV/cm. As the results of rutherford backscattering spectroscope(RBS) and auger spectroscope on the Au/Cd$_{80}$Zn$_{20}$Te, Au penetrated to the surface of Cd$_{80}$Zn$_{20}$Te detector absorbed slightly high energy radiation like a few hundred keV and showed good performance to detect low energy gamma ray.mma ray.

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증착조건 및 열처리 온도에 따른 유기 TFT의 활성층용 펜타센 박막의 전기적 특성 연구 (The Electrical Characteristics of Pentacene Thin-Film for the active layer of Organic TFT deposited at the Various Evaporation conditions and the Annealing Temperatures)

  • 구본원;정민경;김도현;송정근
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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    • pp.80-83
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    • 2000
  • 본 연구에서는 유기물 전자소자 개발을 위한 기초 연구로서 증착시 기판의 온도, 증칙비, 열처리 온도에 따른 펜타신 박막의 수평방향 전기전도도, 접촉저항, 면저항 둥 전기적 특성을 측정 하였다. 시료는 분말형 펜타신을 유기분자선 성막장치(OMBD)를 이용하여 성막 하였다. 전도도 계산을 위한 두께의 측정은 $\alpha$-step을 이용하였으며, TLM(transfer length method)으로 접촉저항, 면저항등 전기적 특성을 측정하였다. 전극은 Au를 사용하여 진공 증착법으로 제작하였다. 기판의 온도는 3$0^{\circ}C$, 4$0^{\circ}C$, 5$0^{\circ}C$, 6$0^{\circ}C$, 7$0^{\circ}C$, 8$0^{\circ}C$, 10$0^{\circ}C$ 일곱 종류로 하여 증착비를 달리 하였고, 열처리에 의한 효과는 10$0^{\circ}C$에서 증착한 시료를 10$0^{\circ}C$, 14$0^{\circ}C$에서 각각 10초간 열처리를 실시하였다. 기판 온도에 따른 막의 형상은 AFM을 이용하여 관찰하였다. 기판의 온도가 상승할수록 박막의 결정화가 활발히 진행되었으며 최대단일결정은 4$\mu\textrm{m}$였다. 전기전도도는 7.40$\times$$10^{-7}$ S/cm ~ 0.778$\times$$10^{-5}$ S/cm의 값을 나타내었으며, 접족저항은 10$0^{\circ}C$에서 증착하고 14$0^{\circ}C$에서 10초간 열처리 한 경우 2.5324㏁으로 가장 작았으며, 면저항은 약간의 차이는 있으나 전체적으로 ≒ $10^{9}$ Ω/ 의 값을 보였다

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Pentacene 박막의 전기적 특성에 관한 연구 (Electrical characteristics of Pentacene thin film)

  • 김대엽;강도열;최종선;김영관;신동명;최돈수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1950-1952
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    • 1999
  • Pentacene thin films are a component for active layer of Organic thin film transistors. Pentacene film was deposited by Organic Molecular Beam Deposition(OMBD) and electrodes were deposoted by vacuum evaporation. Electrical characterization of Pentacene films were measured by two probe methods, as the results. The Au/Pentacene/Al contact is Ohimic contact. Band diagram of pentacene films were measured by UV-spectrum and Cyclic-Voltammetry method.

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