Development of IGZO TFTs and Their Applications to Next-Generation Flat-Panel Displays

  • Received : 2010.11.12
  • Accepted : 2010.12.15
  • Published : 2010.12.31

Abstract

Organic light-emitting devices (OLEDs) have shown superior characteristics and are expected to dominate the nextgeneration flat-panel displays. Active-matrix organic light-emitting diode (AMOLED) displays, however, have stringent demands on the performance of the backplane. In this paper, the development of thin-film transistors (TFTs) based on indium gallium zinc oxide (IGZO) on both Gen 1 and 6 glasses, and their decent characteristics, which meet the AMOLED requirements, are shown. Further, several display prototypes (e.g., 2.4" AMOLED, 2.4" transparent AMOLED, and 32" AMLCD) using IGZO TFTs are demonstrated to confirm that they can indeed be strong candidates for the next-generation TFT technology not only of AMOLED but also of AMLCD (active-matrix liquid crystal display).

Keywords

References

  1. C. W. Tang and S. A. VanSlyke, Applied Physics Letters 51, 913 (1987). https://doi.org/10.1063/1.98799
  2. C.-C. Wu, C.-W. Chen, C.-L. Lin, and C.-J. Yang, Journal of Display Technology 01, 248 (2005). https://doi.org/10.1109/JDT.2005.858942
  3. K. Nomura, H. Ohta, K. Ueda, T. Kamiya, M. Hirano, H. Hosono, Science 300, 1269 (2003). https://doi.org/10.1126/science.1083212
  4. K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature 432, 488 (2004). https://doi.org/10.1038/nature03090
  5. H. Hosono, Journal of Non-Crystalline Solids 352, 851 (2006). https://doi.org/10.1016/j.jnoncrysol.2006.01.073
  6. R. Hayashi, M. Ofuji, N. Kaji, K. Takahashi, K. Abe, H. Yabuta, M. Sano, H. Kumomi, K. Nomura, T. Kamiya, M. Hirano, and H. Hosono, Journal of the Society for Information Display 15, 915 (2007). https://doi.org/10.1889/1.2812992
  7. H.-H. Hsieh, T. Kamiya, K. Nomura, H. Hosono, and C.-C. Wu, Applied Physics Letters 92, 133503 (2008). https://doi.org/10.1063/1.2857463
  8. H.-N. Lee, J. Kyung, M.-C. Sung, D. Y. Kim, S. K. Kang, S.-J. Kim, C. N. Kim, H.-G. Kim, and S.-T. Kim, Journal of the Society for Information Display 16, 265 (2008). https://doi.org/10.1889/1.2841860
  9. J. K. Jeong, J. H. Jeong, H. W. Yang, T. K. Ahn, M. Kim, K. S. Kim, B. S. Gu, H.-J. Chung, J.-S. Park, Y.-G. Mo, H. D. Kim, and H. K. Chung, Journal of the Society for Information Display 17, 95 (2009). https://doi.org/10.1889/JSID17.2.95
  10. M. Furuta, M. Kimura, T. Hiramatsu, T. Nakanishi, C. Li, and T. Hirao, Journal of the Society for Information Display 18, 773 (2010). https://doi.org/10.1889/JSID18.10.773
  11. H.-H. Hsieh, C.-H. Wu, C.-W. Chien, C.-K. Chen, C.-S. Yang, and C.-C. Wu, Journal of the Society for Information Display 18, 796 (2010). https://doi.org/10.1889/JSID18.10.796
  12. S.-H. K. Park, M. Ryu, S. Yang, C. Byun, C.-S. Hwang, K. I. Cho, Woo-Bin Im, Y.-E. Kim, T.-S. Kim, Y.-B. Ha, and K.-B. Kim, in SID Technical Digest (2010), p. 245.
  13. C. R. Kagan and P. Andry, Thin-Film Transistors (Marcel Dekker, New York, 2003).
  14. H.-H. Hsieh, T.-T. Tsai, C.-Y. Chang, H.-H. Wang, J.-Y. Huang, S.-F. Hsu, Y.-C. Wu, T.-C. Tsai, C.-S. Chuang, L.-H. Chang, and Y.-H. Lin, in SID Technical Digest (2010), p. 140.
  15. H.-H. Hsieh, T.-T. Tsai, C.-Y. Chang, S.-F. Hsu, C.-S. Chuang, and Y. Lin, Journal of the Society for Information Display, (accepted).
  16. H.-H. Lu, H.-C. Ting, T.-H. Shih, C.-Y. Chen, C.-S. Chuang, and Y. Lin, in SID Technical Digest (2010), p. 1136.