• Title/Summary/Keyword: Atomic Oxygen

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Comparison of Nitrogen and Oxygen Annealing Effects on the Structural, Optical and Electrical Properties of ALD-ZnO Thin Films (ALD법으로 증착한 ZnO 박막의 열처리 분위기에 따른 구조적, 전기적 특성 비교)

  • Park Y. K.;Park A. N.;Lee C. M.
    • Korean Journal of Materials Research
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    • v.15 no.8
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    • pp.514-517
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    • 2005
  • Effects of nitrogen and oxygen annealing on the carrier concentration, carrier mobility, electrical resistivity and PL characteristics as well as the crystallinity of ZnO films deposited on sapphire substrates by atomic layer deposition (ALD). X-ray diffraction (XRD), Scanning electron microscope (SEM), photoluminescence (PL) analyses, and Hall measurement were performed to investigate the crystallinity, optical properties and electrical properties of the ZnO thin films, respectively. According to the XRD analysis results the crystallinity of the ZnO film annealed in an oxygen atmosphere is better than that of the ZnO film annealed in a nitrogen atmosphere. Annealing undoped ZnO films grown by ALD at a high temperature above $600^{\circ}C$ improves the crystallinity and enhances W emission but deteriorates the electrical conductivity of the flms. The resistivity of the ZnO film annealed particularly at $800^[\circ}C$ in a nitrogen atmosphere is much higher than that annealed at the same temperature in an oxygen atmosphere.

XPS Investigation and Field Emission Property of the Ar Plasma Processed Carbon Nanotube Films

  • Lee, Sun-Woo;Lee, Boong-Joo;Oda, Tetsuji
    • Transactions on Electrical and Electronic Materials
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    • v.9 no.2
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    • pp.52-56
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    • 2008
  • Carbon nanotube films were fabricated by the catalytic CVD method. Plasma processed time effects on the field emission property were studied. The atomic structure was observed by using X-ray photoelectron spectroscopy (XPS). The surface composition changes were observed on the plasma processed CNT films. The O1s/C1s signal ratio and the Fls/Cls signal ratio changed from 1.1 % to 24.65 % and from 0 % to 3.1 % with plasma process time, respectively. We could guess it from these results that the Ar plasma process could change the surface composition effectively. In the case of the original-CNT film, no carbon shift was observed. In the case of the Ar plasma processed CNT films, however the oxygen related carbon shifts were observed. This oxygen related carbon shift at higher binding energy implies the increment of amount of the oxygen. It's possible that the increment of these bonds between carbon and oxygen results in the improvement of field emission performance.

Electrical Characteristics of Resistive-Switching-Memory Based on Indium-Zinc-Oxide Thin-Film by Solution Processing (용액 공정을 이용한 Indium-Zinc-Oxide 박막 기반 저항 스위칭 메모리의 전기적 특성)

  • Kim, Han-Sang;Kim, Sung-Jin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.8
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    • pp.484-490
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    • 2017
  • We investigated the rewritable operation of a non-volatile memory device composed of Al (top)/$TiO_2$/indium-zinc-oxide (IZO)/Al (bottom). The oxygen-deficient IZO layer of the device was spin-coated with 0.1 M indium nitrate hydrate and 0.1 M zinc acetate dehydrate as precursor solutions, and the $TiO_2$ layer was fabricated by atomic layer deposition. The oxygen vacancies IZO layer of an active component annealed at $400^{\circ}C$ using thermal annealing and it was proven to be in oxygen vacancies and oxygen binding environments with OH species and heavy metal ions investigated by X-ray photoelectron spectroscopy. The device, which operates at low voltages (less than 3.5 V), exhibits non-volatile memory behavior consistent with resistive-switching properties and an ON/OFF ratio of approximately $3.6{\times}10^3$ at 2.5 V.

Effects of Oxygen Partial Pressure and Post-Annealing Temperature on Structure of ZnO Thin Film Prepared by Pulsed Laser Deposition (PLD를 이용한 ZnO 박막의 구조에 산소 분압 및 후열처리 온도가 미치는 영향)

  • Cho, Dae-Hyung;Kim, Ji-Hong;Koo, Sang-Mo;Moon, Byung-Moo
    • Proceedings of the KIEE Conference
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    • 2007.11a
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    • pp.88-89
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    • 2007
  • ZnO thin films were deposited on $Al_2O_3$ (alumina) substrates by pulsed laser deposition (PLD) using Nd:YAG laser with a wavelength of 355nm, at room temperature and oxygen partial pressure of 1, 10, 30, 50, 100, and 200m Torr. Furthermore, deposited ZnO thin films were post-annealed at 400, 550, $600^{\circ}C$. The effects of oxygen partial pressure and post-annealing temperature on structural properties of the deposited films have been investigated by means of X-ray diffraction (XRD), and atomic force microscope (AFM), respectively. It has been found that ZnO thin films exhibit c-axis orientation, exhibiting an increased foil width at half maximum (FWHM) value of (002) diffraction peak at 30m Torr oxygen partial pressure and higher post-annealing temperature ($700^{\circ}C$).

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NOx Formation Characteristics with Oxygen Enrichment in Nonpremixed Counterflow Flames (비예혼합 대향류화염에서 산소부화에 따른 NOx 생성특성)

  • Lee, Chang-Eon;Hwang, Cheol-Hong;Yoo, Byung-Hun;Han, Ji-Woong
    • Journal of the Korean Institute of Gas
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    • v.11 no.4
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    • pp.17-22
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    • 2007
  • The NOx emission characteristics with oxygen enrichment in non-premixed counterflow flames were investigated numerically. To consider systematically the situation of inevitable $N_2$ contamination by air infiltration in the process of pure-oxygen combustion, the volume ratio of $O_2$ in an oxidizer was changed from 21% to 100%. As a result the NO emission index $(EI_{NO})$ has the highest value under condition of 75% oxygen enrichment. This result can be explained by the change of $N_2$ destruction rate with oxygen enrichment rather than flame temperature, flame thickness and residence time. In particular, it was found that the reaction of N+NO=$N_2+O$ has the largest contribution on NOx production in oxygen-enrichment flames.

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Characterization of Epoxy Resin Containing Nano Clay Prepared by Electron Beam (전자선에 의해 제조된 나노 clay 함유 에폭시 수지의 특성)

  • Park, Jong-Seok;Lee, Seung-Jun;Lim, Youn-Mook;Jeong, Sung-In;Gwon, Hui-Jeong;Shin, Young-Min;Kang, Phil-Hyun;Nho, Young-Chang
    • Journal of Radiation Industry
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    • v.9 no.1
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    • pp.9-13
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    • 2015
  • Epoxy resin is widely used as aerospace, automobile, construction and electronics due to their good mechanical and electrical properties and environmental advantages. However, the inherent flammability of epoxy resin has limited its application in some field where good flame retardancy is required. Nano clay can enhance the properties of polymers such as flames retardancy and thermal stability. In this study, we have investigated the nanoclay filled epoxy composite, which has good flame retardancy while maintaining high mechanical properties. The cured epoxy resins were obtained using an electron beam curing process. The nano clays were dispersed in epoxy acrylate solution and mechanically stirred. The prepared mixtures were irradiated using an electron beam accelerator. The composites were characterized by gel content and thermal/mechanical properties. Moreover, the flammability of the composite was evaluated by limited oxygen index (LOI). The flame retardancy of nano clay filled epoxy composite was evidently improved.

Different Physiological Response to Salt in Salt Tolerant Rice Mutants Induced by Gamma-Mutagenesis

  • Jang, Duk-Soo;Song, Mira;Kim, Sun-hee;Kim, Jin-Baek;Kim, Sang Hoon;Ha, Bo-Keun;Kang, Si-Yong;Kim, Wook;Kim, Dong Sub
    • Journal of Radiation Industry
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    • v.5 no.3
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    • pp.259-266
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    • 2011
  • When plants undergo stress, Reactive oxygen species (ROS) which remove bad elements such as mildew and virus is activated in plant body. However, if ROS is excessively increased, plant will be harmed itself by destruction of cell and signal system and phenomenon of lipid peroxidation. In order to identify content of lipid peroxidation and activity of some enzymes scavenging ROS, phenotypical and physiological analysis was performed with two mutant lines, Till-II-877 and Till-II-894, comparing with cv. Dongan (WT). In phenotype analysis, two mutant lines give to well-conditioned growth better than WT in since 5 days after salt treatment. In enzyme activities, there was a modest difference in the content of catalase (CAT) and peroxidase (POD) between Till-II-877 and Till-II-894, two mutant lines showed high levels in CAT contents than WT. However, they express low levels in POD contents. In MDA analysis, the content of Till-II-877 was higher than that of WT, but Till-II-894 was lower. This result indicates that two mutants have different mechanism against salt stress.

Unusual ALD Behaviors in Functional Oxide Films for Semiconductor Memories

  • Hwang, Cheol Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.77.1-77.1
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    • 2013
  • Atomic layer deposition (ALD) is known for its self-limiting reaction, which offers atomic-level controllability of the growth of thin films for a wide range of applications. The self-limiting mechanism leads to very useful properties, such as excellent uniformity over a large area and superior conformality on complex structures. These unique features of ALD provide promising opportunities for future electronics. Although the ALD of Al2O3 film (using trimethyl-aluminum and water as a metal precursor and oxygen source, respectively) can be regarded as a representative example of an ideal ALD based on the completely self-limiting reaction, there are many cases deviating from the ideal ALD reaction in recently developed ALD processes. The nonconventional aspects of the ALD reactions may strongly influence the various properties of the functional materials grown by ALD, and the lack of comprehension of these aspects has made ALD difficult to control. In this respect, several dominant factors that complicate ALD reactions, including the types of metal precursors, non-metal precursors (oxygen sources or reducing agents), and substrates, will be discussed in this presentation. Several functional materials for future electronics, such as higher-k dielectrics (TiO2, SrTiO3) for DRAM application, and resistive switching materials (NiO) for RRAM application, will be addressed in this talk. Unwanted supply of oxygen atoms from the substrate or other component oxide to the incoming precursors during the precursor pulse step, and outward diffusion of substrate atoms to the growing film surface even during the steady-state growth influenced the growth, crystal structure, and properties of the various films.

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Isolation and Characterization of Humic Acids Present in the Soils at the Vicinity of Domestic Atomic Power Plants(NPPs) (국내 원자력 발전소 주변 토양 휴믹산의 추출 및 특성 규명)

  • Lee, Chang-Hoon;Shin, Hyun-Sang;Chung, Kun-Ho;Cho, Young-Hyun;Lee, Chang-Woo
    • Journal of Radiation Protection and Research
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    • v.28 no.3
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    • pp.165-172
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    • 2003
  • Humic acids present in the soils at the vicinity of domestic atomic power plants(NPPs), located in Yeongkwang(YK), Uljin(UJ), Kori(KR), Koseong(KS), Wolseong(WS) area were isolated, and characterized using elemental analysis and UV/Vis, IR, CPMAS $^{13}C$ NMR spectroscopic methods. The characteristics were compared with one another and with commercial humic acid (Aldrich Co.). Molecular size distributions of the humic acids were determined using a stirred cell ultrafiltration technique. The results of elemental analysis showed that soil humic acid from UJ contains higher oxygen content than humic acids from KR and KS (O/C ratios: 0.51 (UJHA) us. 0.45(KRHA), 0.43(KSHA)). The molecular size distribution revealed that the soil humic acids of UJ and YK contained a higher percentage of larger molecules of > 30,000 daltons, compared to those of KR and KS. The spectral features obtained from UV/vis., IR and CPMAS $^{13}C$ NMR showed that the aromatic character and oxygen containing functional groups in the humic acids from UJ and YK were relatively higher than those of KR and KS. These results indicate that the soil humic acids from UJ and YK were in a higher degree of humification, which may suggest higher affinity of the humic acids with radionuclides released in the soil environments.

Post annealing effect on the photoluminescence properties of ZnO thin films prepared by atomic layer epitaxy (Atomic Layer Epitaxy에 의해 제작된 ZnO 박막의 후열처리에 따른 발광특성 연구)

  • 신경철;임종민;강승모;이종무
    • Journal of the Korean Vacuum Society
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    • v.13 no.3
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    • pp.103-108
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    • 2004
  • High-quality ZnO films were grown on sapphire (001) substrates by the atomic layer epitaxy (ALE) technique using DEZn as a Zinc precusor and $H_2O $ as an oxidant at both $170^{\circ}C$ and $400^{\circ}C$ which are in the ALE and the CVD process temperature ranges, respectively. The films were annealed in an oxygen atmosphere in the temperature range from 600 to 100$0^{\circ}C$ for an hour and then investigate photoluminescence (PL) properties using He-Cd laser. PL intensity tends to increases as the annealing temperature increase for both the annealed ZnO films grown at $170^{\circ}C$ and $400^{\circ}C$ , while PL did not nearly occur at the as-deposited ones. The PL intensity of the ZnO film grown at $400^{\circ}C$ is low after it is annealed at high temperature owing to a large number of Zn-Zn bonds although it has increased in the visible light wavelength region after annealing. In contrast the PL intensity has increased significant in the visible light region after annealing