• 한국정보통신학회논문지
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• 제10권12호
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• pp.2258-2263
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• 2006

본 논문은 shallow trench isolation (STI) 공정에서 ILD (inter-layer dielectric) 막의 수분에 의해 야기되는 단 채널 (short-channel) nMOSFET의 hump 특성의 원인을 분석하고 억제 방법을 제안하였다. 다양한 게이트를 가지는 소자와 TDS-APIMS(Thermal Desorption System-Atmospheric Pressure Ionization Mass Spectrometry) 측정을 이용하여 hump 특성을 체계적으로 분석하였고, 분석을 바탕으로 단 채널 hump모델을 제안하였다. 제안된 모델에 의한 단 채널 nMOSFET의 hump 현상은 poly-Si 게이트 위의 ILD 막의 수분이 상부의 SiN 막에 의해 밖으로 확산되지 못하고 게이트와 STI의 경계면으로 확산하여 발생한 것이 며, 이를 개선하기 위해 상부의 SiN 막의 증착 전 열공정을 통해 ILD 막의 수분을 효과적으로 배출시킴으로써 hump 특성을 성공적으로 억제하였다.

• 한국대기환경학회지
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• 제16권5호
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• pp.487-497
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• 2000

Spring time is a favorable season to be easily observed the Yellow Sand phenomenon in East Asia. In particular most of the phenomenon tend to occur in April. However, Yellow Sand phenomenon was observed from almost the whole country of Korea in winter of 1966, 1977 and 1999. The features of the synoptic weather pattern in the source regions, air stream flow between the source region and Korea, the measurement of TSP concentration, aerosol size distribution, and chemical composition of snow samples associated with Yellow Sand phenomenon were investigated. The result showed the characteristic evolutionary feature of the synoptic system associated with Yellow Sand phenomena, that is, a strong low level wind mobilized the dust within 2 or 3 days before Yellow Sand phenomenon being observed in Seoul. The wind was remarkably intensified in the source region on January 24, 1999 under the strong pressure gradient, A trajectory analysis showed that the Yellow Sand particle could be reached to Korea within 2 days from the source region, Gobi desert, through Loess plateau and Loess deposition region. The TSP concentration at the top of Kwanak mountain during the Yellow Sand phenomenon is abruptly increasing than the monthly mean concentration. The size resolved number concentration of aerosols ranging from 0.3 to 25${\mu}{\textrm}{m}$ was analyzed during Yellow Sand episode. It was evident that aerosols were distinguished by particles in the range of 2-3 ${\mu}{\textrm}{m}$ to result in the abrupt increase in January 1999, After Yellow Sand phenomenon, there was heavy snow in Seoul. By the analysis of snow collected during that time, it was observed that both the Ca(sup)2+ concentration and pH were increased abnormally compared to those in the other winter season.

• Asian Journal of Atmospheric Environment
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• 제5권2호
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• pp.65-78
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• 2011

Ozone ($O_3$) is a main component of photochemical oxidants, and a phytotoxic anthropogenic air pollutant. In North America and Europe, the current concentration of $O_3$ has been shown to have significant adverse effects on vegetation. In this review, we summarize the experimental studies on the effects of $O_3$ on the growth and photosynthetic activity of Japanese forest tree species to understand the present knowledge and provide sound basis for future research toward the assessment of $O_3$ impacts on Japanese forest ecosystem. Since the 1990s, several Japanese researchers have conducted the experimental studies on the effects of ambient levels of $O_3$ on growth and physiological functions such as net photosynthesis of Japanese forest tree species. Although the sensitivity to $O_3$ of whole-plant growth is quite different among the species, it was suggested that the current ambient levels of $O_3$ in Japan are high enough to adversely affect growth and photosynthetic activity of Japanese forest tree species classified into high $O_3$ sensitivity group such as Japanese beech. The N load to soil has been shown to reduce the sensitivity to $O_3$ of Japanese larch and increase that of Japanese beech. To establish the critical level of $O_3$ for protecting Japanese forest tree species, therefore, it is necessary to take into account the N deposition from the atmosphere. There is little information on the combined effects of $O_3$ and other environmental factors such as elevated $CO_2$ and drought on growth and physiological functions of Japanese forest tree species. Therefore, it is necessary to promote the experimental study and accumulate the information on the combined effects of $O_3$ and any other abiotic environmental factors on Japanese forest tree species.

• 한국대기환경학회지
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• 제17권2호
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• pp.193-201
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• 2001

Acidic air pollutants were collected to characterize indoor air quality in a residential area in the summer. All indoor and outdoor samples were measured simultaneously using an annular denuder system(ADS) in Seoul. The data set was collected from July 26 to September 11, 1997. The mean indoor/outdoor ratios measured from this study were : 0.34 for $HNO_3$; 0.91 for $HNO_2$; 0.22 for $SO_2$; 1.34 for $NH_3$; 0.78 for $PM_{2.5}(d_p$ <2.5 $mutextrm{m}$); 0.90 for $SO_{4}^{2-}$; 0.68 for $NO_{3}^{-}$ and 0.79 for $NH_{4}^{+}$. Indoor concentrations of $HNO_3$, $SO_2$ and $PM_{2.5}$ were highly correlated with the outdoor concentrations. The relationship between indoor and outdoor air is dependent, to a large extent, on the rate of air exchange between these two environments. A tracer-gas decay technique with sulfur hexafluoride ($SF_{6}$) as a tracer gas was used to estimate the air exchange of a private home in the summer. The average air exchange rate was estimated to be 23.7 hr(sup)-1. The deposition velocities for $SO_{4}^{2-}$, $NO_{3}^{-}$ and $NH_{4}^{+}$ calculated were 0.17, 0.69 abd 0.39 cm/sec, respectively.

• 한국대기환경학회지
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• 제14권5호
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• pp.491-498
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• 1998

Fog water samples were collected at Chunchon, Korea, by using active fog sampler during foggy Period in fall of 1996 and 1997. The average annual foggy days at Chunchon increased from 37 days, for the yearn 1963 ∼ 1973, to 63 days , for the year 1974∼1993 that followed the construction of Lake Soyang. Volume weighted mean pH of fog water was 5.5 with a range of 4.8 to 7.0 in 1996, and 5.0 with a range of 4.1 to 6.6 in 1997. These pH values were higher than those of rain water sampled in corresponding years. However the concentration of ionic species in fog water were 26 times higher than those of rain water. The major anions in fog water were in order of SO42-, NO3- and Cl-, and their average concentrations were 1770.6meq/ml, 346.2 meq/ml, 216 meq/ml in 1996, and 901.8meq/ml, 269.6meq/ml, 141.0meq/ml in 1997, respectively. The major cations were Ca2+, NH4+, Mg2+ and K+, and their average concentrations frere 408.5meq/ml, 280.0meq/ml, 43.8meq/ml, 45.2meq/ml in 1996, and 400.4 meq/ml, 299.0meq/ml, 73.1meq/ml, 44.5meq/ml in 1997, respectively. The fraction acidity of fog water was 0.006 and that of rain water was 0.2, which means fog water was much more neutralized than rain water.

• 한국대기환경학회지
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• 제14권6호
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• pp.631-642
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• 1998

Fall-out particles were collected by the modified British deposit gauges at 35 sampling sites in Suwon area from January to November, 1996. Twenty chemical species (Al. Ba, Cd, Cr, K, Pb, Sb, Zn, Cu, Fe, Ni, V, F-, Cl-, NO3-, 5042-, Na+, NH4+, Mg2+, and Ca2+) were analyzed by AAS and If. The purposes of this study were to estimate qualitatively various emission sources of the fell-out particle by applying multivariate statistical techniques such as factor analysis, multiple regression analysis, and discriminant analysis. During the study, outlier sites were determined by a z-score method. Cl-, Na+, Mg2+, and SO42- were highly correlated due to their common marine related source. Wind speed was the most influential factor for the deposition fluxes of the particle itself and all the chemical species as well. When applying the factor analysis, 8 source patterns were qualitatively obtained, such as marine source, soil source, oil burning source, Cr related source, tire source, Cd related source, agriculture source, and F- related source. As a result of the multiple regression analysis, we could suggest that some chemical compounds may possibly exist in the form of CaSO4, NaN03, NaCl, MgC12, (NH4)2SO4, NaF, and CaCl2 in the fall-out particles. Finally, spatial and seasonal classification study performed by a discriminant analysis showed th.at SO42-, Ca2+, Cl-, and Fe were dominant in the group of spatial pattern; however, SO42-, Cl-, Al, and V were in the group of seasonal pattern.

• Journal of Korean Society for Atmospheric Environment
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• 제16권E2호
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• pp.85-96
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• 2000

The concentrations of Pb, Mn, Al and Na were measured from a total of 26 snow samples collected from a 1.5-m deep snow pit in Livingston Island, South Shetland Islands, at the northern tip of the Antarctic Peninsula. Ore sampling location is great concern, because of its proximity to the southern extremity of south America, a candidate for the source regions of pollutant aerosols entering Antarctica. The mean concentrations of Pb and Mn were found to be 4.97 pg g(sup)-1 and 20.6 pgg(sup)-1, respectively. These concentrations levels are similar to those reported for recent snow at other Antarctic sites with pronounced spring maxima for both metals. Contributions form natural sources are estimated to be minor (∼16%) for Pb. For Mn, on the other hand, contribution from rock and soil dusts is found to be very important. Excess Pb over Pb from natural sources is likely to be anthropogenic, especially from South Americal. Our results show that yearly Pb fallout flux is much greater in Antarctic coastal areas than at other Antarctic locations far from the coast , indicating that the transport and deposition patterns of pollutant aerosols are not simple is Antarctica. It is also suggested that the recycling of anthropogenic Pb in seawater to the atmosphere could significantly contribute to the Pb fallout flux in the Antarctic coastal regions.

• 한국대기환경학회지
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• 제29권2호
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• pp.186-198
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• 2013

The present work is an attempt to improve the performance of a regional air quality model by means of liking it with a global chemistry transport model. The global chemical transport model of GEOS-Chem is used to provide BC (Boundary Condition)s which reflect temporal and spatial variations at boundaries of regional chemical transport model of CMAQ over East Asia. First, GEOS-Chem outputs are evaluated by comparing predicted concentrations with observed monthly data of gas phase species and secondary inorganic aerosols from EANET (Acid Deposition Monitoring Network in East Asia) sites. The results show that predicted PM10 concentrations are in good agreement with the observations. This implies that GEOS-Chem outputs could be used to provide BCs to CMAQ. Simulated daily and monthly mean PM10 concentrations of CMAQ with the linkage of GEOS-Chem's BCs and constant BCs are then evaluated by comparing predicted concentrations with observations at API (Air Pollution Index) sites in China as well as EANET sites in Korea. CMAQ with the GEOS-Chem outputs improves model simulation in depicting observed PM10 concentrations comparing with those with constant BCs. It is also found that influence of aerosol species are largely dependent on the BCs over East Asia and Korea. Mean biases between simulated versus observed daily and monthly mean concentrations of PM10 with the GEOS-chem were improved by 1~8 ${\mu}g/m^3$ in China region, 3.26 ${\mu}g/m^3$ in Korea.

• Journal of Korean Society for Atmospheric Environment
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• 제19권E3호
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• pp.137-148
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• 2003

In this study, we examined the influence of long-range transport of dust particles and air pollutants on the photochemistry of NO$_3$on Jeju Island, Korea (33.17 N, 126.10$^{\circ}$E) during the Asian Dust-Storm (ADS) period of April 2001. Three ADS events were observed during the periods of 10∼12, 13∼14, and 25∼26 April. Average concentration level of nighttime NO$_3$on Jeju Island during the ADS period was estimated to be about 2 x 10$^{8}$ molecules cm$^{-3}$ ( - 9 pptv). Decreases in NO$_3$levels during the ADS period was likely to be determined mainly by the enhancement of the $N_2$O$_{5}$ heterogeneous reaction on dust aerosol surfaces. The reaction of N20s on aerosol surfaces was a more important sink for nighttime N03 during the ADS due to the significant loading of dust particles. The reaction of $N_2$O$_{5}$ with NMHCs and the gas-phase reaction of N20s with water vapor were both significant loss mechanisms during the study period, especially during the NADS. However, dry deposition of these oxidized nitrogen species and a heterogeneous reaction of NO$_3$were of no importance. Short-term observations of $O_3$, NO$_2$, DMS, and SO$_2$in the MBL indicated that concentrations of most of these chemical species were different between the ADS and non - Asian - Dust-Storm (NADS) periods, implying that their levels were affected sensitively by the differences in air mass trajectories.

• 한국대기환경학회지
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• 제15권1호
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• pp.23-32
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• 1999

Deposition is one of the important removal mechanisms for the ambient aerosol, and it also leads to adverse environmental and economic impacts. The purpose of this study was to investigate chemical compositions and spatial distributions of fall-out aerosols. A total number of 340 samples were collected at 35 sampling sites in Suwon area from January to November, 1996. Twelve inorganic elements (Al, Ba, Cd, Cr, K, Pb, Sb, Zn, Cu, Fe, Ni, and V) and eight ionic components ($F^-$, Cl, $NO_3^-$, $SO_4^{2-}$, $Na^+$, $NH_4^+$, $Mg^{2+}$, and $Ca^{2+}$) were analyzed by AAS and IC, respectively. The monthly variation showed that the flux of fall-out particles was increased in the spring season(March, April, and May) and decreased from August to October. Arithmetic mean flux of fall-out particles was 176.8 kg/$ extrm{km}^2$/day during the study period. The fluxes of each chemical species were $SO_4^{2-}$ 12.414, $Ca^{2+}$ 7.369, $NO_3^-$ 5.812, $Cl^-$ 3.566, $NH_4^+$ 3.176, Fe 3.107 kg/$\textrm{km}^2$/day, and so on. By using a kriging analysis, spatial distribution pattern of those fluxes was intensively studied. Total fluxes estimated in Suwon city were 8424.72t/y of fall-out particles, 519.27t/y of $SO_4^{2-}$, 336.79t/y of $Ca^{2+}$,267.34 t/y of $NO_3^+$, 155.36t/y of $Cl^-$, 147.79t/y of Fe.