• Title/Summary/Keyword: Arc Chamber

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비정질 실리콘 박막의 주울 가열 유도 결정화 공정 중 발생하는 Arc-Instability 기구 규명 및 방지책

  • Hong, Won-Ui;No, Jae-Sang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.375-375
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    • 2012
  • 최근 차세대 평판 디스플레이의 응용에 많은 주목을 받고 있는 AMOLED의 경우 전류구동 방식이기 때문에 a-Si TFT 보다는 LTPS-TFT가 요구되며, 대면적 기판에서의 결정립 크기의 균일도가 매우 중요한 인자이다. 비정질 실리콘 박막 상부 혹은 하부에 도전층을 개재하고, 상기도전층에 전계를 인가하여 그것의 주울 가열에 의해 발생한 고열에 의해 비정질 실리콘 박막을 급속 고온 고상 결정화하는 방법에 관한 기술인 JIC (Joule-heating Induced Crystallization) 결정화 공정은 기판 전체를 한번에 결정화 하는 방법이다. JIC 결정화 공정에 의하여 제조된 JIC poly-Si은 결정립 크기의 균일성이 우수하며 상온에서 수 micro-second내에 결정화를 수행하는 것이 가능하고 공정적인 측면에서도 별도의 열처리 Chamber가 필요하지 않는 장점을 가지고 있다. 그러나 고온 고속 열처리 방법인 JIC 결정화 공정을 수행 하면 Arc에 의하여 시편이 파괴되는 현상이 발견되었다. 본 연구에서는 Arc현상의 원인을 파악하기 위해 전압 인가 조건 및 시편 구조 조건을 변수로 결정화실험을 진행하였다. ARC가 발생하는 Si층과 Electrode 계면을 식각 분리하여 Electrode와 Si층 사이의 계면이 형성되지 않는 조건에서 전계를 인가하는 실험을 통하여 JIC 결정화 공정 중 고온에 도달하게 되면, a-Si층이 변형되어 형성된 poly-Si층이 전도성을 띄게 되고 인가된 전압이 도전층과 Poly-Si 사이에 위치한 $SiO_2$의 절연파괴(Dielectric breakdown)전압보다 높을 경우 전압 인가 방향에 수직으로 $SiO_2$가 절연 파괴되며 면저항 형태의 전도층의 단락이 진행되며 전도층이 완전히 단락되는 순간 Arc가 발생한다는 것을 관찰 할 수 있었다. 본 실험의 연구 결과를 바탕으로 Arc 발생을 방지하는 다양한 구조의 Equi-Potential 방법이 개발되었다.

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A Study on the Characteristics of Silicon Nanopowders Produced by Transferred Type Arc Plasma Apparatus (이송식 아크플라즈마 장치에 의해 제조된 실리콘 나노분말의 특성에 대한 연구)

  • Kan, Woo-Seop;Park, Sang-Hee
    • Journal of the Korean Society of Industry Convergence
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    • v.24 no.6_2
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    • pp.909-917
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    • 2021
  • This study was carried out experimentally on the production and properties of silicon nanopowders characteristics using a transferred type arc plasma apparatus. To investigate the properties of silicon nanopowder, the purity of argon gas(99.999%, 99.9%) and the partial pressure ratio of nitrogen gas(0~90%) were varied. The total pressure in chamber is 400Torr and the silicon chunk amount used as raw material is 300g. The power supplied to the cathode to generate arc plasma was 9~12kW/h, and the electrode was made of tungsten and graphite with a diameter of 13mm. The particle size, impurity elements and powder evaporation rate of the silicon powder were analyzed using the XRD, FE-SEM, TEM and electronic scale. According to the purity of argon gas, the silicon evaporation rate and the particle size were similar, and impurities were generated more in the case of 99.9% purity than 99.999%. When argon gas and nitrogen gas were mixed in the chamber, the silicon evaporation rate and particle size increased as the partial pressure ratio of nitrogen gas increased. In particular, when the partial pressure ratio of nitrogen gas was 80%, the silicon evaporation rate 80g/h, and the particle size was about 80~100nm.

The Design and Implementation of Arc Power supply for Neutral Beam Injection (중성입자빔 가열을 위한 아크 전원 공급장치 설계 및 구현)

  • Lee, Hee-Jun;Shin, Soo-Cheol;Lee, Seung-Gyo;Jung, Yong-Chae;Won, Chung-Yuen
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.27 no.6
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    • pp.50-58
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    • 2013
  • The Neutral Beam Injection(NBI) generates ultra-high temperature energy in the tokamak of nuclear fusion. The NBI consists of filament power supply acceleration and deceleration power supply and arc power supply(APS). The APS has characteristics of low voltage and high current. APS generate arc through constant output of voltage and current. So this paper proposed suitable buck converter for low voltage and high current. The case of proposed buck converter used parallel switch because it can increase capacity and decrease conduction loss. When an arc is generated, the NBI chamber occur high voltage. And it will break output capacitor of buck converter. Therefore the output capacitor was removed in the proposed converter. Thus buck converter with constant output is the most important design of the output inductor. In this paper, designed APS verified operation of system and stability through simulation and prototype.

Development of Hybrid Extinction $SF_6$ Interrupter using Analytical and Experimental Method ($SF_6$ 자력팽창 소호부 개발에 관한 실험 및 해석적 고찰)

  • Sohn, J.M.;Kang, J.S.;Lee, B.W.;Kim, Y.K.;Kim, D.K.
    • Proceedings of the KIEE Conference
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    • 2001.07b
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    • pp.696-698
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    • 2001
  • This paper considers the research of the hybrid interrupter which adopts both rotating arc and thermal expansion technology. The operating principle of this device depends on rapid arc rotation due to the magnetic field created by the fault current through a coil which is mounted on contacts and also relies on the principle of thermal expansion created by arc energy in extinguishing chamber and finally causes pressure rise in expansion volume. To develope this type of interrupter, we introduced analytical analysis including electromagnetic and arc fluid simulation and experimental analysis including construction of current source generation facility and arc behavior measurements. In this research, the principle of the interrupting techniques are given and analytical and experimental results of hybrid interrupter which is developed by new technology is introduced.

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The numerical analysis of gas blast arcs for 800kV GCB (800kV 가스차단기의 아크특성 해석)

  • Chulkov, V.V.;Shin, Y.J.;Park, K.Y.;Song, K.D.;Choi, Y.K.
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1287-1289
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    • 1995
  • For the analysis of hot gas flow due to arc in puffer type $SF_6$ gas circuit breakers(GCBs), a program has been developed by adding function for arcing to the Fluid-in Cells(FLIC) method, which is often used for a two dimensional compressible flow problems, utilizing a simplified enthalpy flow arc model available for arcing. In this paper, the results of arc modelling for 800kV GCB are presented and compared with that of cold gas flow in the interrupters. It is shown that the nozzle clogging is the dominating factor in the pressure rise of the puffer chamber. It permits to estimate the dielectric strength of interrupters.

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Effect of the Process Parameters on the Fe Nano Powder Formation in the Plasma Arc Discharge Process (플라즈마 아크 방전법에서 Fe 나노 분말 형성에 미치는 공정변수의 영향)

  • 이길근;김성규
    • Journal of Powder Materials
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    • v.10 no.1
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    • pp.51-56
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    • 2003
  • To investigate the effect of the parameters of the plasma arc discharge process on the particle formation and particle characteristics of the iron nano powder, the chamber pressure, input current and the hydrogen volume fraction in the powder synthesis atmosphere were changed. The particle size and phase structure of the synthesized iron powder were studied using the FE-SEM, FE-TEM and XRD. The synthesized iron powder particle had a core-shell structure composed of the crystalline $\alpha$-Fe in the core and the crystalline $Fe_3O_4$ in the shell. The powder generation rate and particle size mainly depended on the hydrogen volume fraction in the powder synthesis atmosphere. The particle size increased simultaneously with increasing the hydrogen volume fraction from 10% to 50%, and it ranged from about 45nm to 130 nm.

Development of Medium Voltage $SF_6$ Interrupter for RMU ($SF_6$ 가스를 이용한 배전급 RMU용 소호부 개발)

  • Lee, B.W.;Sohn, J.M.;Seo, J.M.;Choe, J.W.
    • Proceedings of the KIEE Conference
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    • 2001.05a
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    • pp.301-304
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    • 2001
  • This paper considers the research of the hybrid interrupter which adopts both rotating arc and thermal expansion technology. The operating principle of this device defends on rapid arc rotation due to the magnetic field created by the fault current through a coil which is mounted on contacts and also relies on the principle of thermal expansion created by arc energy in extinguishing chamber and finally causes pressure rise in expansion volume. In this research, the principle of the interrupting techniques are given and experimental results of hybrid interrupter which is developed by new technology is introduced.

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Prediction of Performance considering Ablated PTFE in High Voltage Self-blast Circuit Breaker (PTFE 용삭을 고려한 초고압 복합소호 차단기의 성능 예측)

  • Kim, Jin-Bum;Kweon, Ki-Yeoung;Lee, Hahk-Sung
    • 한국전산유체공학회:학술대회논문집
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    • 2008.03b
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    • pp.695-698
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    • 2008
  • Self-blast circuit breakers utilize the energy dissipated by the arc itself to create the required conditions for arc quenching during the current zero. During the arcing period, high pressure, temperature and radiation of the arc could burn in pure SF6 gas and PTFE nozzle. Ablated nozzle shape and $SF_6$-PTFE mixture vapor affect the performance of an self-blast circuit breaker. After a number of tests, nozzle in circuit breaker is disassembled, a section of ablated nozzle is investigated precisely. Using computational fluid dynamics, the conservation equation for the gas and temperature, velocity and electric fields within breaker is solved. Before applying a section model, developed program is verified with experimental data. Performance of ablated nozzle shape is compared with original model through analysis program.

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Analysis of SLF Interruption Performance of Self-Blast Circuit Breaker by Means of CFD Calculation

  • Kim, Hong-Kyu;Chong, Jin-Kyo;Lee, Se-Hee
    • Journal of Electrical Engineering and Technology
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    • v.9 no.1
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    • pp.254-258
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    • 2014
  • This paper presents the performance analysis results of a short line fault interruption of a gas circuit breaker, particularly a self-blast type breaker. Hot gas flow analysis was carried out using a CFD calculation combined with the arc model and nozzle ablation model. To evaluate the interruption performance, the index function was defined using the pressure in the heating chamber and the density above the arc region. The simulation and test results showed that the gas flow field and suitable choice of an interruption performance index can be used to predict the interruption characteristics and provide guidelines for designing self-blast breakers with a higher interruption capability.

Hot Gas Analysis of Circuit Breakers By Combining Partial Characteristic Method with Net Emission Coefficient

  • Park, Sang-Hun;Bae, Chae-Yoon;Jung, Hyun-Kyo
    • KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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    • v.3B no.3
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    • pp.115-121
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    • 2003
  • This paper proposes a radiation model, which considers radiation transport as an important component in hot gas analysis. This radiation model is derived from combining the method of partial characteristics (MPC) with net emission coefficient (NEC), and it covers the drawbacks of existing models. Subsequently, using this proposed model, the arc-flow interaction in an arcing chamber can be efficiently computed. The arc is represented as an energy source term composed of ohmic heating and the radiation transport in the energy conservation equation. Ohmic heating term was computed by the electric field analysis within the conducting plasma region. Radiation transport was calculated by the proposed radiation model. Also, in this paper, radiation models were introduced and applied to the gas circuit breaker (GCB) model. Through simulation results, the efficiency of the proposed model was confirmed.