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http://dx.doi.org/10.21289/KSIC.2021.24.6.909

A Study on the Characteristics of Silicon Nanopowders Produced by Transferred Type Arc Plasma Apparatus  

Kan, Woo-Seop (Dept. of mechanical engineering, Kumoh National Institute of Technology)
Park, Sang-Hee (Dept. of mechanical engineering, Kumoh National Institute of Technology)
Publication Information
Journal of the Korean Society of Industry Convergence / v.24, no.6_2, 2021 , pp. 909-917 More about this Journal
Abstract
This study was carried out experimentally on the production and properties of silicon nanopowders characteristics using a transferred type arc plasma apparatus. To investigate the properties of silicon nanopowder, the purity of argon gas(99.999%, 99.9%) and the partial pressure ratio of nitrogen gas(0~90%) were varied. The total pressure in chamber is 400Torr and the silicon chunk amount used as raw material is 300g. The power supplied to the cathode to generate arc plasma was 9~12kW/h, and the electrode was made of tungsten and graphite with a diameter of 13mm. The particle size, impurity elements and powder evaporation rate of the silicon powder were analyzed using the XRD, FE-SEM, TEM and electronic scale. According to the purity of argon gas, the silicon evaporation rate and the particle size were similar, and impurities were generated more in the case of 99.9% purity than 99.999%. When argon gas and nitrogen gas were mixed in the chamber, the silicon evaporation rate and particle size increased as the partial pressure ratio of nitrogen gas increased. In particular, when the partial pressure ratio of nitrogen gas was 80%, the silicon evaporation rate 80g/h, and the particle size was about 80~100nm.
Keywords
Partial Pressure Ratio of Nitrogen Gas; Purity of Argon Gas; Silicon Nanopowders; Transferred Type Arc Plasma Apparatus;
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Times Cited By KSCI : 3  (Citation Analysis)
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