• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.195-198
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• 2004

For a diffusion barrier against copper, tantalum nitride films have been deposited on $SiO_{2}$ by atomic layer deposition (ALD), using PEMAT(Pentakis(ethylmethylamino)tantalum) and $NH_{3}$ as precursors, Ar as purging gas. The deposition rate of TaN at substrate temperature $250^{\circ}C$ was about $0.67{\AA}$ per one cycle. The stability of TaN films as a Cu diffsion barrier was tested by thermal annealing for 30 minutes in $N_{2}$ ambient and characterized through XRD, sheet resistance, and C-V measurement(Cu($1000{\AA}$)/TaN($50{\AA}$)/$SiO_{2}$($2000{\AA}$)/Si capacitor fabricated), which prove the TaN film maintains the barrier properties Cu below $400^{\circ}C$.

• Laser Solutions
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• v.4 no.2
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• pp.1-12
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• 2001

This study has been performed to evaluate basic characteristics of CW-CO$_2$ laser welding process of A5083 and A7N01 Al alloy. The effect of welding parameters, such as shielding gas, gas flow rate, laser power and welding speed on the bead shape and porosity from bead on plate welding tests have been investigated. Welds shielded by He gas had deeper penetration and better bead shape than those shielded by Ar. The penetration depth was augmented with the increase of laser Power and the decrease of welding speed. Welds of A7N01 alloy had deeper penetration than those of A5083 alloy In beads of A5083 alloy which has deeper penetration, the volume fraction of porosities was high due to the number of its was few, but size of its was larger. The case of deeper penetration beads of A7N01 alloy, the porosity reduced under relatively higher power The Volume fraction of porosities in weld of A5083 alloy was significantly higher than that in weld of A7N01 alloy.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.112-113
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• 2014

The submicron-rods of $Cu_2O$ with diameters of 100-700 nm and lengths of $2-8{\mu}m$ were synthesized by radio frequency magnetron sputtering. The abundance of Cu species, which is modulated by the $Ar/O_2$ ratio during the sputtering process affect directly to the growths of the $Cu_2O$ branches on the bodies of the submicron-rods. Transmission electron microscopy and elemental mapping reveal that metallic Cu are existed on the heads of the $Cu_2O$ rods. The growth rate, catalyst phase and shape reveal that vapor-quasiliquid-solid was the growth mechanism of the formations of those structures.

• Journal of Korea Foundry Society
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• v.13 no.6
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• pp.524-531
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• 1993

Dispersion behaviors of SiC particles and microstructures in Al-2%Si/SiCp composite prepared by Rheo-compocasting were studied with change of fabrication conditions(slurry temperature, agitation time) and additions of Mg($0{\sim}3wt.%$). Also, the microhardness change of matrix, interface and total in composites were examined with additions of Mg($0{\sim}3wt.%$). The dispersion of particles in the composites became relatively homogeneous with increase of Mg additions, agitation time and decrease of slurry temperature. Rate of occupied area by particle in matrix was increased as increase of Mg additions due to improvement of wettability between SiC particle and matrix. A favorable composites were obtained by melting under Ar atmospheric SiCp injection and bottom pouring system. According to the analysis of X-ray diffraction, $Mg_2Si$, $Al_4C_3$, $SiO_2$ and MgO, etc, intermetallic compounds were formed by chemical interreaction at interface of matrix and particles. The microhardness of interface is higher than that of matrix due to more strengthening of above intermetallic compounds. It was considered that the total hardness of the composites is improved by dispersing of SiCp and addition of Mg.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.278-281
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• 2009

Selective laser sintering(SLS), a kind of rapid prototyping technology, can provide a process to form many types of coatings. Coated layers by selective laser melting are highly influenced by substrate, powder and laser parameters such as laser power, scan rate, fill spacing and layer thickness. Therefore an attempt to fabricate Fe-Ni-Cr coating on AISI H13 tool steel has been performed by selective laser sintering. In this study, Fe-Ni-Cr coating was produced by experimental facilities consisting of a 200W fiber laser which can be focused to 0.08mm and atmospheric chamber which can control atmospheric pressure with Ar. With power increase or energy density decrease, line width was decreased and line surface quality was improved with energy density increase. Surface quality of coating layer was improved with fill spacing optimization or layer thickness decrease.

• Korean Membrane Journal
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• v.4 no.1
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• pp.25-35
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• 2002

The gas permeation properties have been studied on carbon molecular sieve (CMS) membranes prepared by pyrolysis of P84 polyimide under various conditions. P84 polyimide shows high permselectivities (O$_2$/N$_2$= 9.17 and CO$_2$/N$_2$= 35) for various gas pairs and has a good processibility because it is easily soluble in high polar solvents such as N-methylpyrrolidinone (NMP), dimethylformamide (DMF), and N,N-dimethylacetamide (DMAc). After pyrolysis under Ar flow, the change in the heating rate was found to affect the gas permeation properties to some extent. The permeabilities of the selected gases were shown to be in the order He ＞ CO$_2$＞ O$_2$＞ N$_2$for all the CMS membranes, whose order was in accordance with the order of kinetic gas diameters. It also revealed that the pyrolysis temperature considerably influenced the gas permeation properties of the CMS membranes derived from P84 polyimide. The CMS membranes pyrolized at 700$\^{C}$ temperature exhibited the highest permeability with relatively targe loss in permselectivity. This means that the pyrolysis temperature should be varied in accordance with target gases to be separated.

• Korean Membrane Journal
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• v.1 no.1
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• pp.65-72
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• 1999

The surface of polypropylene membrane was modified by plasma treatment using Ar,$N_{2}$, $NH_{2}$ and $O_{2}$ Permeabilities for $CO_{2}$, $N_{2}$ and separation factor for $CO_{2}$ relative to $N_{2}$ were measured. The permeation experiments were performed by a variable volume method at $25^{\circ}C$ and 0.303MPa. The effects of the plasma conditions such as treatement time power input gas flow rate and pressure in the reactor on the transport properties of modified membrane were investigated. The surface of the plasma treated membrane was analyzed by means of FTIR-ATR XPS and AFM. The surface structure of the plasma treated membrane was fairly different from that of the untreated membrane. Although the permeation rates for both $CO_{2}$ and $N_{2}$ decreased with increasing plasma treatement time the separation factor was found to be improved by the plasma treatement. The operating conditions of plasma treatement imposed on membranes had notable effect on the permeability and separation factor.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1243-1245
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• 1994

SiN films were deposited in $Si_2H_6$(99.9%), $NH_3$(99.99%) gas mixture with carrier gas $N_2$ on Si substrate by ArF Excimer Laser CVD. SiN film deposition conditions that are substrate temperature and Laser average power were varied in order to investigate the dependence of SiN film on the condition. A post-deposition anneal was performed to examine variation of fixed charge density in the films. The deposition rate was increased as the substrate temperature and Laser power were increased during film deposition. The refractive index was increased with increasing substrate temperature, but it didn't have the dependence on Laser power. The fixed charge density was decreased when a post-deposition anneal was performed.

• Journal of Surface Science and Engineering
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• v.37 no.4
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• pp.220-225
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• 2004

A new ion beam extraction system is designed using a simple ion mass filter and a micro mass balance and a QMS based detecting system. A quadrupole Mass Filter is used for selective ion beam formation from inductively coupled high density plasma sources with appropriate electrostatic lens and final analyzing QMS. Also a quartz crystal microbalance is set between a QMF and a QMS to measure the etching and polymerization rate of the mass selected ion beam. An inductively coupled plasma was used as a ion/radical source which had an electron temperature of 4-8 eV and electron density of $4${\times}$10^{11}$＃/㎤. A computer interfaced system through 12bit AD-DA board can control the pass ion mass of the qmf by setting RF/DC voltage ratio applied to the quadrupoles so that time modulation of pass ion's mass is possible. So the direct measurements of ion - surface chemistry can be possible in a resolution of $1\AA$/sec based on the qcm's sensitivity. A full set of driving software and hardware setting is successfully carried out to get fundamental plasma information of the ICP source and analysed $Ar^{+}$ beam was detected at the $2^{nd}$ QMS.

• The Bulletin of The Korean Astronomical Society
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• v.39 no.1
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• pp.75.2-75.2
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• 2014

We have developed a set of daily solar flare peak flux forecast models using the multiple linear regression (MLR), the auto regression (AR), and artificial neural network (ANN) methods. We consider input parameters as solar activity data from January 1996 to December 2013 such as sunspot area, X-ray flare peak flux, weighted total flux $T_F=1{\times}F_C+10{\times}F_M+100{\times}F_X$ of previous day, mean flare rates of a given McIntosh sunspot group (Zpc), and a Mount Wilson magnetic classification. We compute the hitting rate that is defined as the fraction of the events whose absolute differences between the observed and predicted flare fluxes in a logarithm scale are ${\leq}$ 0.5. The best three parameters related to the observed flare peak flux are as follows: weighted total flare flux of previous day (r=0.5), Mount Wilson magnetic classification (r=0.33), and McIntosh sunspot group (r=0.3). The hitting rates of flares stronger than the M5 class, which is regarded to be significant for space weather forecast, are as follows: 30% for the auto regression method and 69% for the neural network method.