• Title/Summary/Keyword: Ar rate

Search Result 981, Processing Time 0.03 seconds

Study on Pt thin film property of Resistance Temperature Detect (측온 저항체의 Pt 박막 특성 연구)

  • Park, Jung-Ho;Ji, Mi-Jung;Choi, Byung-Heon;Lee, Jung-Min;Ju, Byeong-Kwon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.11a
    • /
    • pp.29-29
    • /
    • 2008
  • Platinum Thin films were deposited on $Al_2O_3$ by Rf magnetic Sputtering. The physical and electrical characteristics of these films were analyzed under various deposition conditions(Ar gas pressure, input power, substrate temperature.) and annealing condition. The deposition rate was increased with increasing the input power but not increased linear. In the other factor, The Pt thin films property was associated with resistance. so lower resistance had more and more good Pt thin films condition. For the purpose of this study, we will get the best Pt thin film characteristics.

  • PDF

A Numerical Study on Effective Smoke-Control System of a Rescue Station in a Tunnel Fire (터널내 열차 화재시 효과적인 구난역 제연 설비를 위한 수치 해석 연구)

  • Yang, Sung-Jin;Won, Chan-Shik;Hur, Nahm-Keon;Cha, Chul-Hyun
    • 유체기계공업학회:학술대회논문집
    • /
    • 2006.08a
    • /
    • pp.575-578
    • /
    • 2006
  • In designing smoke-control system of rescue station in train tunnel, a purpose is to prevent a disaster by proposing the jet fan operation together with smoke-control curtain in tunnel fire. This study has investigated the relationship of the Heat Release Rate(HRR) and a adequate ventilation velocity to control the fire propagation in tunnel fire, and has improved the effect of the smoke-control curtain on preventing the flow of pollutants. In this study, Computational Fluid Dynamics(CFD) simulations with ST AR-CD(ver 3.24) were carried out on predicting the fire spreading and the flow of pollutants, considering jet fan operations and effect of smoke-control curtain. Our simulation domain is the full scale model of the 'DAEGWALLYEONG' 1st tunnel. The results represent that ventilation operation can control the fire spreading and pollutants effectively to prevent a disaster.

  • PDF

Structural and Electrical Properties of Reactively Sputtered Titanium Nitride Films (DC 반응성 스퍼터링된 TiN 박막의 구조적 및 전기적 특성)

  • 류성용;오원욱;백수현;신두식;오재응;김영남;심태언;이종길
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.29A no.8
    • /
    • pp.49-55
    • /
    • 1992
  • We Have investigated the properties of the titanium nitrite films widely used in VLSI devices as diffusion barrier in Al-based metallization. TiN films were formed by reactive sputtering from Ti target in Ar-N$_2$ mixtures, varying deposition parameters such as N$_2$ partial pressure, substrate temperature, power, and total pressure. All the samples received the heat treatment at 45$0^{\circ}C$ for 30 min. The resulting films are characterized by mechanical stylus($\alpha$-step), x-ray diffraction(XRD), scanning electron microscopy(SEM), and four point probe method. The Tin film properties strongly depend on the deposition condition. The stoichiometry and Ti deposition rate are critically affected by nitrogen partial pressure, and the resistivity, in particular, is dependent on both the substrate temperature and sputtering power.

  • PDF

Speech Recognition in the Car Noise Environment (자동차 소음 환경에서 음성 인식)

  • 김완구;차일환;윤대희
    • Journal of the Korean Institute of Telematics and Electronics B
    • /
    • v.30B no.2
    • /
    • pp.51-58
    • /
    • 1993
  • This paper describes the development of a speaker-dependent isolated word recognizer as applied to voice dialing in a car noise environment. for this purpose, several methods to improve performance under such condition are evaluated using database collected in a small car moving at 100km/h The main features of the recognizer are as follow: The endpoint detection error can be reduced by using the magnitude of the signal which is inverse filtered by the AR model of the background noise, and it can be compensated by using variants of the DTW algorithm. To remove the noise, an autocorrelation subtraction method is used with the constraint that residual energy obtainable by linear predictive analysis should be positive. By using the noise rubust distance measure, distortion of the feature vector is minimized. The speech recognizer is implemented using the Motorola DSP56001(24-bit general purpose digital signal processor). The recognition database is composed of 50 Korean names spoken by 3 male speakers. The recognition error rate of the system is reduced to 4.3% using a single reference pattern for each word and 1.5% using 2 reference patterns for each word.

  • PDF

Analysis of the Structure of Lockstitched Seam according to Sewing Thread Tension (봉사장력에 따른 본봉 Seam의 구조해석)

  • Suh, Jung-Kwon
    • The Korean Fashion and Textile Research Journal
    • /
    • v.3 no.1
    • /
    • pp.25-30
    • /
    • 2001
  • In order to investigate the influence of thread tension on the structure of lockstitch seam, stitch tightness and seam balance ratio are measured at various tensions of needle thread and bobbin thread. The structure of lockstitch was shown in terms of skeleton stitch models to obtain quantitative analysis of stitch tightness. The balanced seam formed to the rectangu1ar stitch model under low bobbin thread tension, but the fabric tightness produced by interlaced needle and bobbin thread under high bobbin thread tension. In this paper, new equation to obtain seam balance ratio was proposed for a lockstitch seam. By using the new equation, the seam balance ratio was not affected by the stitch density and fabric thickness. In order to form the balanced seam, the ratio on tension of needle thread and bobbin thread was about 6:1~7:1 in this experiment.

  • PDF

Grating fabrication for DFB laser diode using holographic interferometer system (DFB 레이저 다이오드를 위한 홀로그래픽 시스템을 이용한 회절격자 제작)

  • 강명구;오환술
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.33A no.6
    • /
    • pp.108-113
    • /
    • 1996
  • Periodic gratings for 1.55$\mu$m distributed feedback laser diode (DFB LD) have been fabricated by a holographic interference exposure system using an etalon stabilized Ar ion laser. We obtain a good development condition at developer concentration of 65% and obtain etching rate of 1000$\AA$/min at 20.deg. C by the mixed solution HBr:HNO$_{3}$:H$_{2}$O(1:1:10 in volume ratio). We obtain good first order grating with period of 2400${\AA}[\pm}2{\AA}$ at etching time of 45 sec from grating period and diffraction efficiency measurement, and SEM observation of grating fabricated on InP substrate.

  • PDF

Determination of Interfacial Fracture Toughness by Bimaterial Eccentric Compression Test (이질재 편심압축실험에 의한 계면 파괴 인성치 산정)

  • 김형균;홍창우;양성철;윤경구
    • Proceedings of the Korea Concrete Institute Conference
    • /
    • 2000.04a
    • /
    • pp.78-81
    • /
    • 2000
  • The test specimen proposed in this study, named the bimaterial eccentric compression specimen, is a rectangular prism of two dissimilar materials with a notch at their interface. Normalized energy release rates and phase angles were calibrated with the finite element method. The normalized energy release rate increases with notch ratio but decreases with E2/E2, loading point, and phase angle, Bimaterial specimens consisting of mortar and ploymer as well as mortar and rock were prepared and tested to simulate fracture behavior ar the interface. Test results have confirmed that initial notch has significant effect on the apparent interfacial toughness.

  • PDF

A Via-Hole Process for GaAs MMIC's using Two-Step Dry Etching (2단계 건식식각에 의한 GaAs Via-Hole 형성 공정)

  • 정문식;김흥락;이지은;김범만;강봉구
    • Journal of the Korean Institute of Telematics and Electronics A
    • /
    • v.30A no.1
    • /
    • pp.16-22
    • /
    • 1993
  • A via-hole process for reproducible and reliable GaAs MMIC fabrication is described. The via-hole etching process consists of two step dry etching. During the first etching step a BC $I_{3}$/C $I_{2}$/Ar gas mixure is used to achieve high etch rate and small lateral etching. In the second etching step. CC $L_{2}$ $F_{2}$ gas is used to achieve selective etching of the GaAs substrate with respect to the front side metal layer. Via holes are formed from the backside of a 100$\mu$m thick GaAs substrate that has been evaporated initially with 500.angs. thick chromium and subsequently a 2000.angs. thick gold layer. The fabricated via holes are electroplated with gold (~20$\mu$m thick) to form via connections. The results show that established via-hole process is satisfactory for GaAs MMIC fabrication.

  • PDF

A study on the characteristics of the OXYNITRIDE film deposited by Laser CVD (Laser CVD법에 의해 퇴적된 OXYNITRIDE막의 특성에 관한 고찰)

  • Kim, C.D.;Shin, S.W.;Jung, M.N.;Kim, J.K.;Sung, Y.S.
    • Proceedings of the KIEE Conference
    • /
    • 1996.07c
    • /
    • pp.1428-1430
    • /
    • 1996
  • Thin Silicon oxynitride(SiON) films have been chemically deposited using 193nm ArF Excimer Laser CVD, with $Si_{2}H_{8}$, $N_{2}O$, and $NH_3$ as the reactive gases and $N_2$ as the carrier gas. Experimental results show that deposition rate and refractive index have a strong dependence on substrate temperature, chamber pressure, gas ratio, laser power and laser beam height. Electrical characterization of oxynitride films demonstrates that for $NH_{3}/N_{2}O$ flow ratios ranging from 0.25 to 1, the leakage currents, the interface trap density and the capacitances (dielect ric constant) increase and the dielectric breakdown fields decrease

  • PDF

Effect and Development of Automatic Control of Dissolved Oxygen on Growth of Phellinus linteus WI-001 (Phellinus linteus WI-001 균사체의 성장에 미치는 용존산소농도의 영향 및 자동 조절방법 개발)

  • 김종래;권호균;전계택;이계관
    • Microbiology and Biotechnology Letters
    • /
    • v.28 no.5
    • /
    • pp.285-290
    • /
    • 2000
  • The effects of dissolved oxy-gen(DO) concentration and DO control modes on cell growth in a 4L computer-controlled bioreactor system were investigated using Phellinus linteus WI-001, a producer of protein-polysaccharides having potent anticancer activi-ties. When DO was controlled at about 20%, maximum cell concentration and specific growth rate of the strain were observed to increase 36% and 64%, respectively, as compared to the experiment performed without DO control. By adopting cascade automatic control of DO ar 20% in a mixed automatic control mode using computer-con-trolled program, 19.5g/L of maximum cell concentration was obtained. These results showed that the mixed auto-matic control mode was the effective method for enhancing cell growth of the shear sensitive Phellinus linteus.

  • PDF