• 한국표면공학회지
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• 제41권2호
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• pp.43-47
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• 2008

Cubic boron nitride(c-BN) films were deposited on tungsten carbide insert tool by microwave plasma enhanced chemical vapor deposition(MPECVD) from a gas mixture of triethyl borate$(B(C_2H_5O)_3)$, ammonia $(NH_3)$, hydrogen$(H_2)$ and argon(Ar). The qualities of deposited thin film were investigated by x-ray diffrac-tion(XRD), field emission scanning electron microscopy(FE-SEM) and micro Raman spectroscope. The surface morphologies of the synthesised BN as well as crystallinity appear to be highly dependent on the flow rate of $B(C_2H_5O)_3$ and $(NH_3)$ gases. The deposited film had more crystallized phases with 5 scem of $B(C_2H_5O)_3$ and $(NH_3)$ gases than with 2 sccm, and the phase was identified as c-BN by micro Raman spectroscope and XRD. The adhesion strength were also increased with increasing flow rates of $B(C_2H_5O)_3$ and $(NH_3)$ gases.

• 센서학회지
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• 제13권3호
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• pp.195-198
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• 2004

For a diffusion barrier against copper, tantalum nitride films have been deposited on $SiO_{2}$ by atomic layer deposition (ALD), using PEMAT(Pentakis(ethylmethylamino)tantalum) and $NH_{3}$ as precursors, Ar as purging gas. The deposition rate of TaN at substrate temperature $250^{\circ}C$ was about $0.67{\AA}$ per one cycle. The stability of TaN films as a Cu diffsion barrier was tested by thermal annealing for 30 minutes in $N_{2}$ ambient and characterized through XRD, sheet resistance, and C-V measurement(Cu($1000{\AA}$)/TaN($50{\AA}$)/$SiO_{2}$($2000{\AA}$)/Si capacitor fabricated), which prove the TaN film maintains the barrier properties Cu below $400^{\circ}C$.

• 열처리공학회지
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• 제11권4호
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• pp.241-246
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• 1998

It is well known for 410L ferritic stainless steel powder to applicate a sensor ring in anti-lock brake system of automobile, several studies, because of its excellent magnetic properties. This study was carried out to investigate the magnetic properties such as the maximum magnetic induction, coercivity and maximum permeability of the materials with functions of sintering density, time and temperature, and concluded as follows: 1. Sintering under the circumstances of Ar gas and the temperature of $1250^{\circ}C$ for 60min, showed that nitrogen was increased, whereas carbon and oxygen decreased in quantities. 2. Both maximum magnetic induction value of 4700Gauss and permeability of 200 were obtained at the maximum sintering density of $6.89g/cm^2$. Here, the properties showed a linear increasement with increasing the sintering density. 3. Coercivity sharply decreased with incresing the sintering density and reached to 7.6Oe at the maximum sintering density of $6.89g/cm^2$.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.250-251
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• 2014

This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.

• 천문학회보
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• 제36권2호
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• pp.71.2-71.2
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• 2011

To investigate the properties of the narrow-line regions and the accretion disks of YRGs, we study a sample of 28 young radio galaxies (YRGs) observed with the Kast Double Spectrograph at the Shane 3-m telescope and with the DBSP (Double Spectrograph for the Palomar 200-inch Telescope) at Palomar observatory. In addition we collect an addition sample of 15 YRGs with the optical spectra from the SDSS archive. We present the measured narrow-line region properties based on the various emission line ratios, i.e., [O III]/$H{\beta}$, [N II]/$H{\alpha}$, [S II] 6716/6731, [O I]/[O III], [O II]/[O III] and [Ar III]/[O III], which are useful to constrain the gas properties and the states of the accretion disk. We will discuss the characteristics of YRG.

• 한국전기전자재료학회논문지
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• 제19권8호
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• pp.701-706
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• 2006

In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. We examined the effects of the post annealing temperature on the structural variation of the DLC films. The films were annealed at temperatures ranging from 300 to $900^{\circ}C$ in steps of $200^{\circ}C$ using RTA equipment in nitrogen ambient. The thickness of the film and interface between film and substrate were observed by surface profiler, field emission scanning electron microscopy (FESEM), high resolution transmission electron microscopy (HRTEM), respectively. Raman and X-ray photoelectron spectroscopy (XPS) analysis showed that DLC films were graphitized ($I_D/I_G$, G-peak position and $sp^2/sp^3$ increased) ratio at higher annealing temperature. The variation of surface as a function of annealing treatment was verified by a AFM and contact angle method.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 E
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• pp.1752-1754
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• 1997

The Kaufman type ion beam source with focusing lens was prepared to measure $\gamma$-coefficient of MgO thin film. Initial discharge of the system was started with the discharge voltage of 25V, the cathode filament current of 5.5A at the constant magnetic field of 150G. The system shows the maximum ion current density of $120{\mu}A/cm^2$, energy dispersion of 200eV and beam divergence of $30^{\circ}$ under the condition of Ar gas pressure $2.5{\times}10^{-4}Torr$, the beam voltage of 500V, the discharge voltage of 90V, the accelerator voltage of -200V and the cathode filament current of 6.1A. When the focusing lens was installed onto the ion beam source, the spreadness diameter of ion beam was about 10mm.

• Carbon letters
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• 제1권1호
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• pp.22-26
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• 2000

Raman spectroscopy has been used to investigate the structure of coal tar pitch heat-treated up to $3000^{\circ}C$ by using 514.5 run Ar ion laser line. Four critical temperature ranges were found on pyrolyzing coal tar pitch, which correspond to four distinct processes from disordered carbons to the well-ordered graphite structure. The range of heat treat temperature (HTT) below $1000^{\circ}C$ corresponds to gas evolution during the pyrolysis of coal tar pitch. Above the HTT are correlated to rearrangements of enlarged molecules, growth of the molecules along the direction of plane, finally stacking in the normal direction of the plane, in the respective HTT ranges of 1000-2000, above 2000 and $2500-3000^{\circ}C$.

• 한국세라믹학회지
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• 제40권10호
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• pp.949-953
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• 2003

청색 발광특성을 갖는 CaWO$_4$ 형광체를 rf 마그네트론 스퍼터링 방법으로 박막화를 시도하고,증착변수와 열처리 조건이 발광특성에 미치는 영향을 관찰하였다. 증착조건인 산소/아르곤 가스비, 기판온도에 따라서 박막의 구조적, 화학양론적 물성이 크게 영향을 받고 있었다. 후 열처리 공정에 의하여 발광특성의 향상을 얻을 수 있었다. 산소공공에 의한 청록색 영역의 발광도 관찰되었으며, 박막내의 산소결함이 제어되면서 청색 발광스펙트럼을 얻을 수 있었다.

• Journal of Magnetics
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• 제3권4호
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• pp.99-104
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• 1998

The $ Sm_2Fe_{17}N_x $materials were prepared by the combination consisting of the HDDR (hydrogenation, disproportionation, desorption, and recombination) process and nitrogenation or by the conventional way consisting of nitrogenation only, and the magnetic and thermomagnetic properties of the materials were investigated. The magnetic characterisation of the prepared $ Sm_2Fe_{17}N_x $ materials was performed using a VSM. Thermal stability of the materials was evaluated using a DTA under Ar gas atmosphere. The thermomagnetic characteristics of the materials were examined using a Sucksmith-type balance. The previously HDDR-treated Sm2Fe17parent alloy was found to be nitrogenated more easily compared to the ordinary $ Sm_2Fe_{17}N_x $alloy. The $ Sm_2Fe_{17}N_x $ material produced by the combination method showed a high coercivity (12.9 kOe) even in the state of coarse particle size (around 60 ${\mu}{\textrm}{m}$). It was also revealed that the $ Sm_2Fe_{17}N_x $ material produced by the material produced by the combination showed an unusual TMA tracing featured with a low and constant magnetisation at lower temperature range and a peak just before the Curie temperature. This thermomagnetic characteristic was interpreted in terms of the competition between two counteracting effects; the decrease in magnetisation due to the thermal agitation at an elevated temperature and the increase in magnetisation resulting from the rotation of magnetisation of the fine grains comparable to a critical single domain size due to the decreased magnetocrystalline anisotropy at an elevated temperature.