Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Effect of Deposition Parameters and Post-annealing on the Luminescent Properties of CaWO4 Phosphor

증착조건 및 열처리 분위기가 CaWO4 형광체의 발광특성에 미치는 영향

  • 한상혁 (경기대학교 첨단산업공학부 신소재공학전공) ;
  • 정승묵 (경기대학교 첨단산업공학부 신소재공학전공) ;
  • 송국현 (기술표준원 광전재료과) ;
  • 김영진 (경기대학교 첨단산업공학부 신소재공학전공)
  • Published : 2003.10.01
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Abstract

Blue emitting CaWO$_4$ thin films were deposited by rf magnetron sputtering. The effect of sputtering parameters and annealing conditions on the luminescent properties were investigated. Structural and stoichiometric properties of thin films were affected by $O_2$/Ar gas ratio and substrate temperature. Post-annealing caused the phosphor thin films to emit improved luminescent properties. The atomic composition of films might depend on annealing atmosphere, which resulted in the changes of luminescent properties. Blue-green emission that was due to oxygen vacancies was observed. However, by controlling oxygen defects, only blue emission could be obtained.

청색 발광특성을 갖는 CaWO$_4$ 형광체를 rf 마그네트론 스퍼터링 방법으로 박막화를 시도하고,증착변수와 열처리 조건이 발광특성에 미치는 영향을 관찰하였다. 증착조건인 산소/아르곤 가스비, 기판온도에 따라서 박막의 구조적, 화학양론적 물성이 크게 영향을 받고 있었다. 후 열처리 공정에 의하여 발광특성의 향상을 얻을 수 있었다. 산소공공에 의한 청록색 영역의 발광도 관찰되었으며, 박막내의 산소결함이 제어되면서 청색 발광스펙트럼을 얻을 수 있었다.

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References

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