• Journal of the Korean institute of surface engineering
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• v.41 no.2
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• pp.43-47
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• 2008

Cubic boron nitride(c-BN) films were deposited on tungsten carbide insert tool by microwave plasma enhanced chemical vapor deposition(MPECVD) from a gas mixture of triethyl borate$(B(C_2H_5O)_3)$, ammonia $(NH_3)$, hydrogen$(H_2)$ and argon(Ar). The qualities of deposited thin film were investigated by x-ray diffrac-tion(XRD), field emission scanning electron microscopy(FE-SEM) and micro Raman spectroscope. The surface morphologies of the synthesised BN as well as crystallinity appear to be highly dependent on the flow rate of $B(C_2H_5O)_3$ and $(NH_3)$ gases. The deposited film had more crystallized phases with 5 scem of $B(C_2H_5O)_3$ and $(NH_3)$ gases than with 2 sccm, and the phase was identified as c-BN by micro Raman spectroscope and XRD. The adhesion strength were also increased with increasing flow rates of $B(C_2H_5O)_3$ and $(NH_3)$ gases.

• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.195-198
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• 2004

For a diffusion barrier against copper, tantalum nitride films have been deposited on $SiO_{2}$ by atomic layer deposition (ALD), using PEMAT(Pentakis(ethylmethylamino)tantalum) and $NH_{3}$ as precursors, Ar as purging gas. The deposition rate of TaN at substrate temperature $250^{\circ}C$ was about $0.67{\AA}$ per one cycle. The stability of TaN films as a Cu diffsion barrier was tested by thermal annealing for 30 minutes in $N_{2}$ ambient and characterized through XRD, sheet resistance, and C-V measurement(Cu($1000{\AA}$)/TaN($50{\AA}$)/$SiO_{2}$($2000{\AA}$)/Si capacitor fabricated), which prove the TaN film maintains the barrier properties Cu below $400^{\circ}C$.

• Journal of the Korean Society for Heat Treatment
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• v.11 no.4
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• pp.241-246
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• 1998

It is well known for 410L ferritic stainless steel powder to applicate a sensor ring in anti-lock brake system of automobile, several studies, because of its excellent magnetic properties. This study was carried out to investigate the magnetic properties such as the maximum magnetic induction, coercivity and maximum permeability of the materials with functions of sintering density, time and temperature, and concluded as follows: 1. Sintering under the circumstances of Ar gas and the temperature of $1250^{\circ}C$ for 60min, showed that nitrogen was increased, whereas carbon and oxygen decreased in quantities. 2. Both maximum magnetic induction value of 4700Gauss and permeability of 200 were obtained at the maximum sintering density of $6.89g/cm^2$. Here, the properties showed a linear increasement with increasing the sintering density. 3. Coercivity sharply decreased with incresing the sintering density and reached to 7.6Oe at the maximum sintering density of $6.89g/cm^2$.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.250-251
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• 2014

This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.2
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• pp.71.2-71.2
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• 2011

To investigate the properties of the narrow-line regions and the accretion disks of YRGs, we study a sample of 28 young radio galaxies (YRGs) observed with the Kast Double Spectrograph at the Shane 3-m telescope and with the DBSP (Double Spectrograph for the Palomar 200-inch Telescope) at Palomar observatory. In addition we collect an addition sample of 15 YRGs with the optical spectra from the SDSS archive. We present the measured narrow-line region properties based on the various emission line ratios, i.e., [O III]/$H{\beta}$, [N II]/$H{\alpha}$, [S II] 6716/6731, [O I]/[O III], [O II]/[O III] and [Ar III]/[O III], which are useful to constrain the gas properties and the states of the accretion disk. We will discuss the characteristics of YRG.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.8
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• pp.701-706
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• 2006

In addition to its similarity to genuine diamond film, diamond-like carbon (DLC) film has many advantages, including its wide band gap and variable refractive index. In this study, DLC films were prepared by the RF PECVD (Plasma Enhanced Chemical Vapor Deposition) method on silicon substrates using methane $(CH_4)$ and hydrogen $(H_2)$ gas. We examined the effects of the post annealing temperature on the structural variation of the DLC films. The films were annealed at temperatures ranging from 300 to $900^{\circ}C$ in steps of $200^{\circ}C$ using RTA equipment in nitrogen ambient. The thickness of the film and interface between film and substrate were observed by surface profiler, field emission scanning electron microscopy (FESEM), high resolution transmission electron microscopy (HRTEM), respectively. Raman and X-ray photoelectron spectroscopy (XPS) analysis showed that DLC films were graphitized ($I_D/I_G$, G-peak position and $sp^2/sp^3$ increased) ratio at higher annealing temperature. The variation of surface as a function of annealing treatment was verified by a AFM and contact angle method.

• Proceedings of the KIEE Conference
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• 1997.07e
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• pp.1752-1754
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• 1997

The Kaufman type ion beam source with focusing lens was prepared to measure $\gamma$-coefficient of MgO thin film. Initial discharge of the system was started with the discharge voltage of 25V, the cathode filament current of 5.5A at the constant magnetic field of 150G. The system shows the maximum ion current density of $120{\mu}A/cm^2$, energy dispersion of 200eV and beam divergence of $30^{\circ}$ under the condition of Ar gas pressure $2.5{\times}10^{-4}Torr$, the beam voltage of 500V, the discharge voltage of 90V, the accelerator voltage of -200V and the cathode filament current of 6.1A. When the focusing lens was installed onto the ion beam source, the spreadness diameter of ion beam was about 10mm.

• Carbon letters
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• v.1 no.1
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• pp.22-26
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• 2000

Raman spectroscopy has been used to investigate the structure of coal tar pitch heat-treated up to $3000^{\circ}C$ by using 514.5 run Ar ion laser line. Four critical temperature ranges were found on pyrolyzing coal tar pitch, which correspond to four distinct processes from disordered carbons to the well-ordered graphite structure. The range of heat treat temperature (HTT) below $1000^{\circ}C$ corresponds to gas evolution during the pyrolysis of coal tar pitch. Above the HTT are correlated to rearrangements of enlarged molecules, growth of the molecules along the direction of plane, finally stacking in the normal direction of the plane, in the respective HTT ranges of 1000-2000, above 2000 and $2500-3000^{\circ}C$.

• Journal of the Korean Ceramic Society
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• v.40 no.10
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• pp.949-953
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• 2003

Blue emitting CaWO$_4$ thin films were deposited by rf magnetron sputtering. The effect of sputtering parameters and annealing conditions on the luminescent properties were investigated. Structural and stoichiometric properties of thin films were affected by $O_2$/Ar gas ratio and substrate temperature. Post-annealing caused the phosphor thin films to emit improved luminescent properties. The atomic composition of films might depend on annealing atmosphere, which resulted in the changes of luminescent properties. Blue-green emission that was due to oxygen vacancies was observed. However, by controlling oxygen defects, only blue emission could be obtained.

• Journal of Magnetics
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• v.3 no.4
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• pp.99-104
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• 1998

The $ Sm_2Fe_{17}N_x $materials were prepared by the combination consisting of the HDDR (hydrogenation, disproportionation, desorption, and recombination) process and nitrogenation or by the conventional way consisting of nitrogenation only, and the magnetic and thermomagnetic properties of the materials were investigated. The magnetic characterisation of the prepared $ Sm_2Fe_{17}N_x $ materials was performed using a VSM. Thermal stability of the materials was evaluated using a DTA under Ar gas atmosphere. The thermomagnetic characteristics of the materials were examined using a Sucksmith-type balance. The previously HDDR-treated Sm2Fe17parent alloy was found to be nitrogenated more easily compared to the ordinary $ Sm_2Fe_{17}N_x $alloy. The $ Sm_2Fe_{17}N_x $ material produced by the combination method showed a high coercivity (12.9 kOe) even in the state of coarse particle size (around 60 ${\mu}{\textrm}{m}$). It was also revealed that the $ Sm_2Fe_{17}N_x $ material produced by the material produced by the combination showed an unusual TMA tracing featured with a low and constant magnetisation at lower temperature range and a peak just before the Curie temperature. This thermomagnetic characteristic was interpreted in terms of the competition between two counteracting effects; the decrease in magnetisation due to the thermal agitation at an elevated temperature and the increase in magnetisation resulting from the rotation of magnetisation of the fine grains comparable to a critical single domain size due to the decreased magnetocrystalline anisotropy at an elevated temperature.