• 제목/요약/키워드: Apparent stiffness

검색결과 35건 처리시간 0.021초

CMP 패드 강성에 따른 산화막 불균일성(WIWNU)에 관한 연구 (A Study on the Within Wafer Non-uniformity of Oxide Film in CMP)

  • 박기현;정재우;박범영;서헌덕;이현섭;정해도
    • 한국전기전자재료학회논문지
    • /
    • 제18권6호
    • /
    • pp.521-526
    • /
    • 2005
  • Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

소형동평판재하시험기로 측정한 궤도 겉보기 강성의 자갈궤도 상태평가 지표로서의 적용성 고찰 (Evaluation of Applicability of Apparent Track Stiffness Measured by Light-Weight Deflectometer as a Ballasted Track Condition Index)

  • 최영태;황성호;장승엽;박봉식;심광섭
    • 한국지반환경공학회 논문집
    • /
    • 제19권2호
    • /
    • pp.37-44
    • /
    • 2018
  • 자갈궤도는 그 유연성으로 인해 전세계적으로 널리 쓰이고 있다. 그러나 소성 변형이 발생하여 궤도선형오차가 증가하므로 지속적인 유지관리가 필요하며, 최근 통과톤수, 열차중량, 속도 증가 등으로 유지보수 비용과 횟수가 증가하고 있다. 자갈궤도 강성이 거동의 중요 지표로 알려져, 소형동평판시험기(LWD)를 레일과 침목이 체결된 상태에서 실험을 하여 궤도 겉보기 강성을 측정하였다. 예비실험을 통하여 현장시험법을 결정하였고, 측정한 겉보기 강성과 TQI(Track Quality Index), 유지관리지표와의 상관성을 분석한 결과, 평균강성이 증가함에 따라 TQI와 탬핑연장이 지수함수적으로 감소함을 밝혔다. 이로부터 겉보기 강성을 궤도상태지표로써 사용가능함을 제시하였고, 향후 정량적인 유지관리지표를 개발할 수 있을 것으로 기대된다.

노인군 보행 속도 증가에 따른 하지 강성 증가 (Vertical Limb Stiffness Increased with Gait Speed in the Elderly)

  • 홍현화;박수경
    • 한국정밀공학회지
    • /
    • 제28권6호
    • /
    • pp.687-693
    • /
    • 2011
  • Spring-mass models have been widely accepted to explain the basic dynamics of human gait. Researchers found that the leg stiffness increased with gait speed to increase energy efficiency. However, the difference of leg stiffness change with gait speed between the young and the elderly has not been verified yet. In this study, we calculated the lower limb stiffness of the elderly using walking model with an axial spring. Vertical stiffness was defined as the ratio of the vertical force change to the vertical displacement change. Seven young and eight elderly subjects participated to the test. The subjects walked on a 12 meter long, 1 meter wide walkway at four different gait speeds, ranging from their self-selected speed to maximum speed randomly. Kinetic and kinematic data were collected using three force plates and motion capture cameras, respectively. The vertical stiffness of the two groups increased as a function of walking speed. Maximum walking speed of the elderly was slower than that of the young, yet the walking speed correlated well with the optimal stiffness that maximizes propulsion energy in both groups. The results may imply that human may use apparent limb stiffness to optimize energy based on spring-like leg mechanics.

탄성변형에너지 등가원리 기반 연속체 손상모델에 대한 수치실험 (Numerical Experiment for a Strain Energy Equivalence Principle (SEEP)-based Continuum Damage Model)

  • 윤덕기;이우식
    • 한국철도학회:학술대회논문집
    • /
    • 한국철도학회 2006년도 추계학술대회 논문집
    • /
    • pp.31-34
    • /
    • 2006
  • 이 논문에서는 선관통형 균열을 포함하는 정사각형 평판과 선관통형 균열이 연속체 손상이론을 이용에서 구한 유효 직교 이방성 탄성 물성치의 등가 연속체 모델로 대체된 평판의 모드형상과 고유진동수를 비교하여 SEEP에 기반하여 Lee 등이 [5] 제안한 연속체 손상이론을 검증하였다.

  • PDF

사질토에 시공된 앵커토류벽의 토압분포에 관한 연구 (Earth Pressuroes of Tieback Walls in Sand)

  • 김낙경
    • 한국지반공학회지:지반
    • /
    • 제14권5호
    • /
    • pp.17-28
    • /
    • 1998
  • 사질토 지반에 시공된 앵커토류벽의 설 설계하중을 결정함으로서 토류벽의 설계에 있어 가장 기본적이고 필수적인 요소택에 있다. 앵커토류벽에 작용하는 토압분포는 배성, 흙의 아칭 효과 등에 따라 크게 변하 토류벽에 작용하는 토압분포의 가정은 크 한 직사각형 분포의 겉보기토압이 적용되 본 연구에서는 실물크기의 앵커토류 Function을 이용하여 토류벽에 작용하는 토압분포를 시공단계별로 산정하여 설계에 이용되는 토압 분포와 비교하였다. 또한 앵커 토류벽의 설계에 적용되는 Rankine 토압분포를 이용하는 Canadian Geotechnical Society 방법과 TerBaghi와 Peck이 제안한 겉보기토압을 이용한 설계방법을 현장시험 결과와 비교하여 분석하였다. 본 연구의 결론으로는 앵커 설계하중, 최대 휨모멘트의 산정 방법에 있어 30% 정도의 안전율을 고려할 때 Tereaghi 와 Peck 토압을 이용한 단순보 힌지법이 Rankine의 주동토압보다 적합하다는 사실을 입증하였다.

  • PDF

효소처리가 KOCC의 특성에 미치는 영향 (The Effects of Enzymatic Treatment on KOCC)

  • 김대영;원종명
    • 펄프종이기술
    • /
    • 제32권4호
    • /
    • pp.34-40
    • /
    • 2000
  • This study was carried out to evaluate the effects of enzymatic treatment on the characteristics of KOCC. Novozym 342 and Pulpzyme HC were used for this purpose. Enzymatic treatment greatly increased the freeness of KOCC and Novozym 342 was more effective. WRV was improved only when KOCC was treated with 0.1% Pulpzyme HC. Pulpzyme HC was more effective to improve the flexibility of fiber(conformability angle) than Novozym 342. Coarseness of fiber was decreased with the enzymatic treatment. Fines content greatly decreased with 0.01% addition of enzymes. Novozym 342 was more effective than Pulpzyme HC for this purpose. Apparent density, tensile index and tear index decreased with enzymatic treatment, but stiffness increased. Especially the decrease of apparent density, tensile index and tear index by the treatment with Novozym 342 was significant than those of Pulpzyme HC. Therefore Novozym 342 will be suitable for the removal of fines and for bulky sheet, otherwise Pulpzyme HC will be good.

  • PDF

Retrofitted built-up steel angle members for enhancing bearing capacity of latticed towers: Experiment

  • Wang, Jian-Tao;Wu, Xiao-Hong;Yang, Bin;Sun, Qing
    • Steel and Composite Structures
    • /
    • 제41권5호
    • /
    • pp.681-695
    • /
    • 2021
  • Many existing transmission or communication towers designed several decades ago have undergone nonreversible performance degradation, making it hardly meet the additional requirements from upgrades in wind load design codes and extra services of electricity and communication. Therefore, a new-type non-destructive reinforcement method was proposed to reduce the on-site operation of drilling and welding for improving the quality and efficiency of reinforcement. Six built-up steel angle members were tested under compression to examine the reinforcement performance. Subsequently, the cyclic loading test was conducted on a pair of steel angle tower sub-structures to investigate the reinforcement effect, and a simplified prediction method was finally established for calculating the buckling bearing capacity of those new-type retrofitted built-up steel angles. The results indicates that: no apparent difference exists in the initial stiffness for the built-up specimens compared to the unreinforced steel angles; retrofitting the steel angles by single-bolt clamps can guarantee a relatively reasonable reinforcement effect and is suggested for the reduced additional weight and higher construction efficiency; for the substructure test, the latticed substructure retrofitted by the proposed reinforcement method significantly improves the lateral stiffness, the non-deformability and energy dissipation capacity; moreover, an apparent pinching behavior exists in the hysteretic loops, and there is no obvious yield plateau in the skeleton curves; finally, the accuracy validation result indicates that the proposed theoretical model achieves a reasonable agreement with the test results. Accordingly, this study can provide valuable references for the design and application of the non-destructive upgrading project of steel angle towers.

국내산 Kenaf 이용에 관한 연구 (제2보) - Kenaf TMP와 KP의 물리적 성질 - (Utilization of Kenaf Cultivated in Korea (II) - Physical properties of kenaf TMP and KP -)

  • 이명구;윤승락
    • 펄프종이기술
    • /
    • 제39권4호
    • /
    • pp.45-52
    • /
    • 2007
  • Whole, bast and core fibers of kenaf cultivar Tainung-2 were pulped under different pulping methods, thermomechanical and kraft pulping methods. The physical and optical properties of kenaf TMP(thermomechanical pulp) and KP(kraft pulp) handsheets were investigated and the results from the study are summarized as follows: Yields of TMP and KP were $77{\sim}87%\;and\;43{\sim}52%$, respectively. There was no significant change in apparent density between kenaf KP and USKP(unbleached softwood kraft pulp) but TMP showed a little lower apparent density. Bast pulp had the lowest apparent density regardless of pulping methods. Tensile strength of kenaf KP was higher than that of TMP but similar to that of USKP. Both TMP and KP handsheets of bast fraction showed the highest tear strengths among whole, bast, and core fractions. Core fraction showed the lowest tear strengths under different pulping methods. In general burst strength of kenaf pulp under different pulping methods was lower than that of USKP, and kenaf pulp had better stiffness than USKP. Brightness of kenaf KP and TMP was higher than that of USKP. There was no significant variation in opacity between kenaf pulp and USKP even though kenaf pulp showed a little lower opacity. The main difference in paper quality between the core fiber and bast fiber is derived from the fact that bast fiber is long and thin, whereas core fiber is short and thick.

Behavior of grouped stud shear connectors between precast high-strength concrete slabs and steel beams

  • Fang, Zhuangcheng;Jiang, Haibo;Chen, Gongfa;Dong, Xiaotong;Shao, Tengfei
    • Steel and Composite Structures
    • /
    • 제34권6호
    • /
    • pp.837-851
    • /
    • 2020
  • This study aims to examine the interface shear behavior between precast high-strength concrete slabs with pockets and steel beam to achieve accelerated bridge construction (ABC). Twenty-six push-out specimens, with different stud height, stud diameter, stud arrangement, deck thickness, the infilling concrete strength in shear pocket (different types of concrete), steel fiber volume of the infilling concrete in shear pocket concrete and casting method, were tested in this investigation. Based on the experimental results, this study suggests that the larger stud diameter and higher strength concrete promoted the shear capacity and stiffness but with the losing of ductility. The addition of steel fiber in pocket concrete would promote the ductility effectively, but without apparent improvement of bearing capacity or even declining the initial stiffness of specimens. It can also be confirmed that the precast steel-concrete composite structure can be adopted in practice engineering, with an acceptable ductility (6.74 mm) and minor decline of stiffness (4.93%) and shear capacity (0.98%). Due to the inapplicability of current design provision, a more accurate model was proposed, which can be used for predicting the interface shear capacity well for specimens with wide ranges of the stud diameters (from13 mm to 30 mm) and the concrete strength (from 26 MPa to 200 MPa).

국내 석탑의 강성, 고유진동수 및 감쇠비에 관한 연구 (Study on the Joint Stiffness, Natural Frequency and Damping Ratio of Stone Pagodas in Korea)

  • 이성민;최희수;이기학;이찬희;조영훈
    • 한국공간구조학회논문집
    • /
    • 제18권1호
    • /
    • pp.45-53
    • /
    • 2018
  • Following the earthquake that shook the city of Gyeongju, Korea, in 2016, it became apparent that research on the safety of cultural heritages against the seismic hazards is necessary in Korea. Predictions of how historically significant stone pagodas would behave the earthquakes anticipated in near future, which are the subject of this study, is also required. In this study, the dynamic characteristics of 15 cultural heritage designated stone pagodas of Korea were investigated, including natural frequency and damping ratio, and the stiffness of the stone material and its contact area were determined using eigenvalue analysis by assuming the stone pagodas to be multi-degree-of-freedom structures. The results of this study enable the structural modeling of stone pagodas using a finite element analysis program and the method is expected to be useful in assessing the structural safety of stone pagodas against vertical loads as well as lateral forces, including earthquakes. Also, by identifying the dynamic characteristics of the structures, the results of this study can be utilized as a nondestructive testing method to determine the rigidity of cultural heritage structures and to identify inherent problems. The natural frequencies of the Korean stone pagodas were measured to be within 3.5~8.3Hz, excluding cases with distinct natural frequency results, and it was determined that the natural frequencies of the stone pagodas are influenced by various parameters including the height and joint stiffness of the structures.