• 제목/요약/키워드: Aluminum Nitride

검색결과 195건 처리시간 0.029초

SiO2 첨가가 AIN 세라믹스의 고온 비저항에 미치는 영향 (Effects of SiO2 on the High Temperature Resistivities of AIN Ceramics)

  • 이원진;김형태;이성민
    • 한국세라믹학회지
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    • 제45권1호
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    • pp.69-74
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    • 2008
  • The effects of $SiO_2$ impurity on the high temperature resistivities of AIN ceramics have been investigated. When $SiO_2$ was added into 1 wt% $Y_2O_3$-doped AIN, DC resistivities have decreased and electrode polarizations disappeared. Impedance spectroscopy showed two semi-circles at $600^{\circ}C$, which were attributed to grain and grain boundary, respectively. $SiO_2$ doping had more significant effects on the grain resistivity than grain boundary resistivity, implying that doped Si acted as a donor in AIN lattice. In addition, voltage dependency of DC resistivity was observed, which might be related to dependency of size of grain boundary semi-circle on the bias voltage in impedance spectroscopy.

Presputtering 공정변수에 따른 AIN 박막의 c축 배향특성 (The C-Axis Preferred Orientation Characteristic of AIN Thin Film as Sputtering parameter of Presputtering)

  • 박영순;김덕규;소병문;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.246-250
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    • 2000
  • Reactive radio frequency (RF)magnetron sputter has been used to deposit AlN thin film on a Si substrate. (002)Preferred orientation of AlN thin film has been obtained at low sputtering pressure and high $\textrm{N}_2$ concentration. Also it has been shown that properties of AlN thin film are affected by presputtering time. As presputtering time increased aluminum and nitride concentration of AlN thin film decreased. But oxygen concentration and grain size increased. The good preferred orientation was shown with the short presputtering time.

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RF Magnetron Sputtering 법으로 층착된 AIN 박막의 특성 (Characteristics of AIN thin film using RF Magnetron Sputtering)

  • 조인호;장철영;고성용;이용현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.509-512
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    • 2001
  • Aluminum nitride(AIN) thin films were deposited on silicon substrates using RF magnetron sputtering at various deposition conditions and investigated the characteristics. It was used XRD, AES, SEM, and HP-4145B semiconductor parameter analyzer to analysis deposited AIN thin films. The deposition conditions for the good c-axis orientation were 100 W of RF power, 200$^{\circ}C$ of substrate temperature and 15 mTorr of working Pressure. The leakage current density was less then 1.3${\times}$10$\^$-7/ A/$\textrm{cm}^2$. And it was also investigated the etching properties of deposited AIN thin films for application.

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Characteristics of SAW humidity sensor using nanocrystalline ZnO films

  • 황시홍;정귀상
    • 센서학회지
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    • 제19권5호
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    • pp.337-341
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    • 2010
  • In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

입자 강화 복합재의 등가 열전도 계수에 대한 연구 (A Study on Effective Thermal Conductivity of Particulate Reinforced Composite)

  • 이재곤
    • 동력기계공학회지
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    • 제10권4호
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    • pp.133-138
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    • 2006
  • Effective thermal conductivity of particulate reinforced composite has been predicted by Eshelby's equivalent inclusion method modified with Mori-Tanaka's mean field theory. The predicted results are compared with the experimental results from the literature. The model composite is polymer matrix filled with ceramic particles such as silica, alumina, and aluminum nitride. The preliminary examination by Eshelby type model shows that the predicted results are in good agreements with the experimental results for the composite with perfect spherical filler. As the shape of filler deviates from the perfect sphere, the predicted error increases. By using the aspect ratio of the filler deduced from the fixed filler volume fraction of 30%, the predicted results coincide well with the experimental results for filler volume fraction of 40% or less. Beyond this fraction, the predicted error increases rapidly. It can be finally concluded from the study that Eshelby type model can be applied to predict the thermal conductivity of the particulate composite with filler volume fraction less than 40%.

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직경 3인치의 AlN 단결정 성장에 관한 연구 (A study on the growth of 3 inch grade AlN crystal)

  • 강승민
    • 한국결정성장학회지
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    • 제29권3호
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    • pp.140-142
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    • 2019
  • 자외선 LED용 기판소재로 응용가능한 AlN(질화알루미늄) 단결정을 물리기상이동법(Physical Vapor Transport Method)으로 성장하기 위해 성장 거동을 조사하였다. 다결정의 종자결정을 사용하였으며, 직경은 3인치급이었고, 120시간 동안 성장공정을 수행하여 길이 약 4 mm의 다결정상을 얻었다. 본 연구에서는 성장 조건과 대형의 도가니를 사용하였을 경우의 성장 거동에 대하여 고찰하여 보고자 하였다.

The effect of alumina and aluminium nitride coating by reactive magnetron sputtering on the resin bond strength to zirconia core

  • Kulunk, Tolga;Kulunk, Safak;Baba, Seniha;Ozturk, Ozgur;Danisman, Sengul;Savas, Soner
    • The Journal of Advanced Prosthodontics
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    • 제5권4호
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    • pp.382-387
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    • 2013
  • PURPOSE. Although several surface treatments have been recently investigated both under in vitro and in vivo conditions, controversy still exists regarding the selection of the most appropriate zirconia surface pre-treatment. The purpose of this study was to evaluate the effect of alumina (Al) and aluminium nitride (AlN) coating on the shear bond strength of adhesive resin cement to zirconia core. MATERIALS AND METHODS. Fifty zirconia core discs were divided into 5 groups; air particle abrasion with 50 ${\mu}m$ aluminum oxide particles ($Al_2O_3$), polishing + Al coating, polishing + AlN coating, air particle abrasion with 50 ${\mu}m$ $Al_2O_3$ + Al coating and air particle abrasion with 50 ${\mu}m$ $Al_2O_3$ + AlN coating. Composite resin discs were cemented to each of specimens. Shear bond strength (MPa) was measured using a universal testing machine. The effects of the surface preparations on each specimen were examined with scanning electron microscope (SEM). Data were statistically analyzed by one-way ANOVA (${\alpha}$=.05). RESULTS. The highest bond strengths were obtained by air abrasion with 50 ${\mu}m$ $Al_2O_3$, the lowest bond strengths were obtained in polishing + Al coating group (P<.05). CONCLUSION. Al and AlN coatings using the reactive magnetron sputtering technique were found to be ineffective to increase the bond strength of adhesive resin cement to zirconia core.

13%Cr 스테인리스강의 표면 질소침투처리에 미치는 Al첨가의 영향 (Effect of Al Addition on the Surface Nitrogen Permeation Treatment of 13%Cr Stainless Steels)

  • 윤삼석;김기돈;이해우;강창룡;성장현
    • 열처리공학회지
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    • 제12권3호
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    • pp.221-230
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    • 1999
  • The surface nitrogen permeation of Al alloyed 0.14%C-13%Cr stainless steels was investigated after heat treating at $1050^{\circ}C{\sim}1150^{\circ}C$ in the nitrogen gas atmosphere. The strong affinity between Al and nitrogen permeates the nitrogen through the interior of the steels. Two precipitates of round type and needle type are observed at the surface layer. These precipitates mainly consist of AlN containing plenty of aluminum. The surface layer of 0.53%Al alloyed specimen shows ferrite phase, while the surface layers of 1.65%Al and 2.27%Al alloyed specimens appear ${\gamma}$ plus ${\alpha}$ phases. The depth of nitrogen permeation depends upon the Al content and microstructure of the matrix. The 1.65%Al alloyed specimen representing ${\alpha}+{\gamma}$ matrix phases at the nitrogen permeation temperature shows the maximum case depth in this experiment. Although the surface hardness increases by raising the Al content of the specimen owing to the increase of nitride precipitation density, the nitride precipitation deteriorates the corrosion resistance in the solution of HCl, $H_2SO_4$, and $FeCl_3$.

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육방정질화붕소 나노플레이크/폴리이미드 복합체를 이용한 마찰전기 나노발전기 평가 (Evaluation of h-BN Nanoflakes/Polyimide Composites for a Triboelectric Nanogenerator)

  • 박선영;변도영;조대현
    • Tribology and Lubricants
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    • 제37권4호
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    • pp.125-128
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    • 2021
  • A means of enhancing the performance of triboelectric nanogenerators (TENGs) is increasing the differences in work functions between contacting materials. Hexagonal boron nitride (h-BN) exhibits excellent mechanical properties and high chemical stability as well as a high work function. As a result, engineers in the field of energy harvesting have envisioned using h-BN in the electrification layer in TENGs. For the industrial application of h-BN in TENGs, large-scale production is necessary, and h-BN is generally exfoliated and dispersed in various solvents. In this study, we evaluate the performance of a TENG with h-BN nanoflakes in the polyimide (PI) layer. To synthesize a PI composite containing h-BN nanoflakes, h-BN powders are exfoliated and dispersed in poly(amic acid) (PAA), which is the precursor of PI. Then, h-BN dispersion is spin-coated onto the PI film and cured for 2 h under 300℃. This composite material can then be used for the electrification layer in TENGs. Below the electrification layer, an aluminum foil is placed and used as an electrode. When the contact and separation processes with polyethylene terephthalate are repeated, the fabricated TENG shows a maximum power density of 190.8 W/m2. This study shows that h-BN is a promising material for enhancing the performance of the electrification layer in TENGs.

Effectiveness of medical coating materials in decreasing friction between orthodontic brackets and archwires

  • Arici, Nursel;Akdeniz, Berat S.;Oz, Abdullah A.;Gencer, Yucel;Tarakci, Mehmet;Arici, Selim
    • 대한치과교정학회지
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    • 제51권4호
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    • pp.270-281
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    • 2021
  • Objective: The aim of this in vitro study was to evaluate the changes in friction between orthodontic brackets and archwires coated with aluminum oxide (Al2O3), titanium nitride (TiN), or chromium nitride (CrN). In addition, the resistance of the coatings to intraoral conditions was evaluated. Methods: Stainless steel canine brackets, 0.016-inch round nickel-titanium archwires, and 0.019 × 0.025-inch stainless steel archwires were coated with Al2O3, TiN, and CrN using radio frequency magnetron sputtering. The coated materials were examined using scanning electron microscopy, an X-ray diffractometer, atomic force microscopy, and surface profilometry. In addition, the samples were subjected to thermal cycling and in vitro brushing tests, and the effects of the simulated intraoral conditions on the coating structure were evaluated. Results: Coating of the metal bracket as well as nickel-titanium archwire with Al2O3 reduced the coefficients of friction (CoFs) for the bracket-archwire combination (p < 0.01). When the bracket and stainless steel archwire were coated with Al2O3 and TiN, the CoFs were significantly lower (0.207 and 0.372, respectively) than that recorded when this bracket-archwire combination was left uncoated (0.552; p < 0.01). The friction, thermal, and brushing tests did not deteriorate the overall quality of the Al2O3 coatings; however, some small areas of peeling were evident for the TiN coatings, whereas comparatively larger areas of peeling were observed for the CrN coatings. Conclusions: Our findings suggest that the CoFs for metal bracket-archwire combinations used in orthodontic treatment can be decreased by coating with Al2O3 and TiN thin films.