Browse > Article
http://dx.doi.org/10.4191/KCERS.2008.45.1.069

Effects of SiO2 on the High Temperature Resistivities of AIN Ceramics  

Lee, Won-Jin (Komico Ltd.)
Kim, Hyung-Tae (Korea Institute of Ceramic Engineering and Technology(Icheon))
Lee, Sung-Min (Korea Institute of Ceramic Engineering and Technology(Icheon))
Publication Information
Abstract
The effects of $SiO_2$ impurity on the high temperature resistivities of AIN ceramics have been investigated. When $SiO_2$ was added into 1 wt% $Y_2O_3$-doped AIN, DC resistivities have decreased and electrode polarizations disappeared. Impedance spectroscopy showed two semi-circles at $600^{\circ}C$, which were attributed to grain and grain boundary, respectively. $SiO_2$ doping had more significant effects on the grain resistivity than grain boundary resistivity, implying that doped Si acted as a donor in AIN lattice. In addition, voltage dependency of DC resistivity was observed, which might be related to dependency of size of grain boundary semi-circle on the bias voltage in impedance spectroscopy.
Keywords
Aluminum nitride; Resistivity; $SiO_2$ impurity;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
Times Cited By SCOPUS : 0
연도 인용수 순위
1 G. Kalkowski, S. Risse, G. Harnisch, and V. Guyenot, "Electrostatic Chucks for Lithography Applications," Microelectronic Eng., 57-58 219-22 (2001)   DOI   ScienceOn
2 R. Atkinson, "A Simple Theory of the Johnsen-Rahbek Effect," Brit. J. Appl. Phys., 2 [2] 325-32 (1969)   DOI   ScienceOn
3 T. Watnabe, T. Kitabayashi, and C. Nakayama, "Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck," Jpn. J. Appl. Phys., 31 2145-50 (1992)   DOI
4 T. Watnabe, T. Kitabayashi, and C. Nakayama, "Relationship between Electrical Resistivity and Electrostatic Force of Alumina Electrostatic Chuck," Jpn. J. Appl. Phys., 32 864-71 (1993)   DOI
5 J. van Elp, P.T.M. Giesen, and A.M.M. de Groof, "Lowthermal Expansion Electrostatic Chuck Materials and Clamp Mechanisms in Vacuum and Air," Microelectronic Eng., 73-74 941-47 (2004)   DOI
6 G. Kalkowski, S. Risse, and V. Guyenot, "Electrostatic Chuck Behavior at Ambient Conditions," Microelectronic Eng., 61-62 357-61 (2002)   DOI   ScienceOn
7 G. Kalkowski, S. Risse, S. Mller, and G. Harnisch, "Electrostatic Chucks for EUV Masks," Microelectronic Eng., 83 714-17 (2006)   DOI   ScienceOn
8 C. M. Whang, W. J. Jeong, and S. W. Choi, "Synthesis of Aluminum Nitride Powder from Aluminum Hydroxide by Carbothermal Reduction-Nitridation(in Kor)," J. Kor. Ceram. Soc., 31 [8] 893-901 (1994)   과학기술학회마을
9 S. K. Yang and J. B. Kang, "Synthesis of Aluminum Nitride Whisker by Carbothermal Reaction I. Effect of Fluoride Addition(in Kor)," J. Kor. Ceram. Soc., 41 [2] 118-24 (2004)   과학기술학회마을   DOI   ScienceOn
10 G. A. Slack, "Nonmetallic Crystals with High Thermal Conductivity," J. Phy. Chem. Solids, 34 321-35 (1973)   DOI   ScienceOn
11 S. A. Jang and G. M. Choi, "Electrical Conduction in Aluminum Nitride," J. Am. Ceram. Soc., 76 [4] 957-60 (1993)   DOI   ScienceOn
12 W.-J. Lee, S.-M. Lee, K.-B. Shim, and H.-T. Kim, "Effects of Sintering Conditions on the Electrical Conductivity of 1 wt% Y_2O_3-doped$ AlN Ceramics(in Kor)," J. Kor. Ceram. Soc., 44 [2] 116-23 (2007)   과학기술학회마을   DOI   ScienceOn
13 D. R. Clarke, "Varistor Ceramics," J. Am.Ceram. Soc., 82 [3] 485-502 (1999)   DOI   ScienceOn
14 S. Rodewald, J. Fleig, and J. Maier, "The Distribution of Grain Boundary Resistivities in SrTiO_3$ Polycrystals: a Comparison between Spatially Resolved and Macroscopic Measurements," J. Eur. Ceram. Soc., 21 [10-11] 1749-52 (2001)   DOI   ScienceOn
15 J. C. Bang, "Fabrication of Borosilicate Glass-Coated Electrostatic Chucks(in Kor.)," J. Microelectronics & Packaging Soc., 9 [1] 49-52 (2002)   과학기술학회마을