• 제목/요약/키워드: Alignment stage

검색결과 166건 처리시간 0.024초

극초정밀 스테이지의 광소자 정렬에 관한 연구 (A Study on the Optical Alignment of Multi-Axis Ultra Precision Stage)

  • 정상화;차경래;김현욱;최석봉;김광호;박준호
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2005년도 춘계학술대회 논문집
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    • pp.203-208
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    • 2005
  • In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the optical alignment characteristics of multi-axis ultra precision stage were studied. The alignment algorithms were studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Two kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, and 1 ch. input vs. 8 ch. output PLC stacks were performed for investigating the alignment characteristics.

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진공용 3 자유도 얼라인먼트 스테이지 개발 (Development of Three D.O.F. Alignment Stage for Vaccume Environment)

  • 박희재;박종호;한상진
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2000년도 추계학술대회 논문집
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    • pp.551-554
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    • 2000
  • Alignment system is a system to locate an object to it's accurate position in multi-d.o.f space. According to process of application, it is need to align an object in 3 or 6 d.o.f. space. And alignment system is used in various environments. Especially in PDP application, alignment process is carried out in vaccume environment. In this paper, we developed 3 d.o.f. alignment system for vaccume environment, performed kinematic analysis and improved it's positional accuracy.

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수직형 다단축의 축 정열 오프셋 자동 측정시스템 개발 (A Study on the Development of Automatic Measuring System on the Alignment Offset of the Vertical Multistage Shaft)

  • 박호철;김문영;이현
    • 소음진동
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    • 제8권5호
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    • pp.922-928
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    • 1998
  • This paper presents the automatic alignment measuring system for improving the accuracy and working time of alignment of large vertical hydraulic pump turbine. It is general practice that rotating shaft should run within acceptable vibration limit. In order to obtain better run-out data of multi-stage rotor, careful and accurate alignment approach must be established. Generally, present alignment procedure are required several iterative works and so many manpower. Therefore, the new system has been developed using a vector calculation algorithm, laser sensor and data acquisition devices. As a result of appling to actual machines, it is confirmed that manpower is saved up to an average 90%.

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An automatic mask alignment system using moire sensors

  • Furuhashi, Hideo;Uchida, Yoshiyuki;Ohashi, Asao;Watanabe, Shigeo;Yamada, Jun
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국제학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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    • pp.545-549
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    • 1993
  • an alignment system in the X-and Y-directions an X-Y-.theta. stage driven by piezoelectric actuators is presented. A pair of quadruple gratings and a quadruple photo-detector are used. The difference between the two 0-th order moire signals in reflection with a relative spatial phase of 180.deg. is used in each direction to control the alignment of the X-Y-.theta. stage. The stage is aligned at the position where the difference is zero. The quadruple gratings are 10 mm * 10 mm, and of a binary square-type with a 1/2 duty cycle. Their pitches are 16 .mu.m. Alignment accuracy of .+-.20nm was obtained in this system.

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다채널 광정렬 장치에서의 다자유도 회전 스테이지 동작 특성에 관한 연구 (A Study on the Mechanism of Rotational Stage with Multi Degree of Freedom for Multi-Channel Optical Alignment System)

  • 정상화;차경래;최석봉;김광호;박준호;이경형
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.219-224
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    • 2004
  • In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage, the contact sensing unit, and integrated control circuit for the optical alignment system are studied.

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다채널 광정렬 장치 로터리 스테이지 개발에 관한 연구 (A Study on the Development of the Rotary Stage for Multi-Channel Optical Alignment System)

  • 정상화;차경래
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2003년도 추계학술대회
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    • pp.143-148
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    • 2003
  • In recent years, as the optical Communication systems are developed, the demands of essential parts such as splitter, coupler, WDM, and AWG filter are grow rapidly. The fabrication process for them is not, however, automatic. On that reason, the automation is needed for the grow of productivity. The optical alignment and attach ment is the core process in fabrication. In this paper, the 6-axis rotary stage for multi-channel optical alignment system is developed and the dynamic characteristic of this system is studied.

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반도체 절단 공정의 웨이퍼 자동 정렬에 관한 연구 (A study on the automatic wafer alignment in semiconductor dicing)

  • 김형태;송창섭;양해정
    • 한국정밀공학회지
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    • 제20권12호
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    • pp.105-114
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    • 2003
  • In this study, a dicing machine with vision system was built and an algorithm for automatic alignment was developed for dual camera system. The system had a macro and a micro inspection tool. The algorithm was formulated from geometric relations. When a wafer was put on the cutting stage within certain range, it was inspected by vision system and compared with a standard pattern. The difference between the patterns was analyzed and evaluated. Then, the stage was moved by x, y, $\theta$ axes to compensate these differences. The amount of compensation was calculated from the result of the vision inspection through the automatic alignment algorithm. The stage was moved to the compensated position and was inspected by vision for checking its result again. Accuracy and validity of the algorithm was discussed from these data.

항공기에서 투하되는 수중운동체의 초기정렬기법 연구 (A Study of An Initial Alignment Method of Underwater Vehicle Dropped from Aircraft)

  • 류동기;김삼수
    • 한국군사과학기술학회지
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    • 제6권1호
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    • pp.21-29
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    • 2003
  • The Strap Down Inertial Measurement Unit(SDIMU) is recently used for the sensor package of the modern underwater vehicles such as torpedoes and unmanned underwater-vehicles. For using SDIMU, an initial alignment must be carried out before the fire or navigation stage. The general initial alignment methods require that a mother vehicle Is a stationary condition or the Inertial Navigation System(INS) of vehicle is received the specific of data navigation from the mother vehicle. But an underwater vehicle dropped from aircraft is hard to satisfy above both necessary conditions of the general initial alignment. So, we suggest a new strap down initial alignment method of an underwater vehicle dropped from aircraft without using any aided sensors. The highlight point of this method is that a period of initial alignment is not before the fire but during running stage to fix alignment error. And we verify it by analyzing various data of S/W simulations, Hardware In the Loop Simulation(HILS) tests and sea trials.

광소자 정렬용 극초정밀 다축 위치 제어장치 개발 (Development of Multi-axis Nano Positioning Stage for Optical Alignment)

  • 정상화;이경형;차경래;김현욱;최석봉;김광호;박준호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.304-307
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    • 2004
  • As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

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광소자 정렬용 초정밀 다축 스테이지 개발 (Development of Multi-Axis Ultra Precision Stage for Optical Alignment)

  • 정상화;이경형;김광호;차경래;김현욱;최석봉;박준호
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 추계학술대회 논문집
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    • pp.213-218
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    • 2004
  • As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

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