제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지

An automatic mask alignment system using moire sensors

  • Furuhashi, Hideo (Department of Information Network Engineering, Aichi Institute of Electronics, Aichi Institute of Technology) ;
  • Uchida, Yoshiyuki (Department of Information Network Engineering, Aichi Institute of Electronics, Aichi Institute of Technology) ;
  • Ohashi, Asao (Department of Electrical Engineering Aichi Institute of Technology) ;
  • Watanabe, Shigeo (Department of Electrical Engineering Aichi Institute of Technology) ;
  • Yamada, Jun (Department of Electronics Aichi Institute of Technology)
  • Published : 1993.10.01
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Abstract

an alignment system in the X-and Y-directions an X-Y-.theta. stage driven by piezoelectric actuators is presented. A pair of quadruple gratings and a quadruple photo-detector are used. The difference between the two 0-th order moire signals in reflection with a relative spatial phase of 180.deg. is used in each direction to control the alignment of the X-Y-.theta. stage. The stage is aligned at the position where the difference is zero. The quadruple gratings are 10 mm * 10 mm, and of a binary square-type with a 1/2 duty cycle. Their pitches are 16 .mu.m. Alignment accuracy of .+-.20nm was obtained in this system.

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