• 제목/요약/키워드: Alignment &deposition

검색결과 124건 처리시간 0.027초

표면 처리한 $SiO_2$를 게이트 절연막으로 하는 박막 트랜지스터의 특성 연구 (A STUDY ON THE ELECTRICAL CHARACTERISTICS OF ORGANIC THIN FILM TRANSISTORS WITH SURFACE-TREATED GATE DIELECTRIC LAYER)

  • 이재혁;이용수;박재훈;최종선;김유진
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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    • pp.455-457
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    • 2000
  • In this work the electrical characteristics of organic TFTs with the semiconductor-insulator interfaces, where the gate dielectrics were treated by the two methods which are the deposition of Octadecyltrichlorosilane (OTS) on the insulator and rubbing the insulator surface. Pentacene is used as an active semiconducting layer. The semiconductor layer of pentacene was thermally evaporated in vacuum at a pressure of about $2{\times}10^{-7}$ Torr and at a deposition rate of $0.3{\AA}/sec$. Aluminum and gold were used for the gate and source/drain electrodes. OTS is used as a self-alignment layer between $SiO_2$ and pentacene. The gate dielectric surface was rubbed before pentacene is deposited on the insulator. In order to confirm the changes of the surface morphology the atomic force microscopy (AFM) was utilized. The characteristics of the fabricated TFTs are measured to clarify the effects of the surface treatment.

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플라즈마 화학 기상 증착법을 이용한 탄소나노튜브의 성장 분석 및 전계방출 특성 (Field Emission Characteristics and Growth Analysis of Carbon Nanotubes by Plasma-enhanced Chemical Vapor Deposition)

  • 오정근;주병권;김남수
    • 한국전기전자재료학회논문지
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    • 제16권12S호
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    • pp.1248-1254
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    • 2003
  • Carbon nanotubes(CNTs) are grown by using Co catalyst metal. CNTs fabricated by PECVD(plasma enhanced chemical vapor deposition) method are studied in terms of surface reaction and surface structure by TEM and Raman analysing method and ate analysed in its electrical field emission characteristics with variation of space between anode and cathode. Acetylene(C$_2$H$_2$) gas is used as the carbon source, while ammonia and hydrogen gas are used as catalyst and dilution gas. The CNTs grown by hydrogen(H$_2$) gas plasma indicates better vortical alignment, lower temperature process, and longer tip, compared to that grown by ammonia(NH$_3$) gas plasma. The CNTs fabricated with Co(cobalt) catalyst metal and PECVD method show the multiwall structure in mid-circle type in tip-end and the inner vacancy of 10nm. Emission properties of CNTs indicate the turn-on field to be 2.6 V/${\mu}{\textrm}{m}$ We suggest that CNTs can be possibly applied to the emitter tip of FEDs and high brightness flat lamp because of low temperature CNTs growth, low turn-on field.

One-Dimensional Core/Shell Structured TiO2/ZnO Heterojunction for Improved Photoelectrochemical Performance

  • Ji, In-Ae;Park, Min-Joon;Jung, Jin-Young;Choi, Mi-Jin;Lee, Yong-Woo;Lee, Jung-Ho;Bang, Jin-Ho
    • Bulletin of the Korean Chemical Society
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    • 제33권7호
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    • pp.2200-2206
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    • 2012
  • One-dimensional $TiO_2$ array grown on optically transparent electrode holds a promise as a photoelectrode for photoelectrochemical water splitting; however, its crystal structure is rutile, imposing constraints on the potent use of this nanostructure. To address this issue, a heterojunction with type-II band alignment was fabricated using atomic layer deposition (ALD) technique. One-dimensional core/shell structured $TiO_2$/ZnO heterojunction was superior to $TiO_2$ in the photoelectrochemical water splitting because of better charge separation and more favorable Fermi level. The heterojunction also possesses better light scattering property, which turned out to be beneficial even for improving the photoelectrochemical performance of semiconductor-sensitized solar cell.

Electrochemical Capacitors Based on Aligned Carbon Nanotubes Directly Synthesized on Tantalum Substrates

  • Kim, Byung-Woo;Chung, Hae-Geun;Min, Byoung-Koun;Kim, Hong-Gon;Kim, Woong
    • Bulletin of the Korean Chemical Society
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    • 제31권12호
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    • pp.3697-3702
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    • 2010
  • We demonstrate that vertically aligned carbon nanotubes can be synthesized directly on tantalum substrate via water-assisted chemical vapor deposition and evaluate their properties as electrochemical capacitors. The mean diameter of the carbon nanotubes was $7.1{\pm}1.5\;nm$, and 70% of them had double walls. The intensity ratio of G-band to D-band in Raman spectra was as high as 5, indicating good quality of the carbon nanotubes. Owing to the alignment and low equivalent series resistance, the carbon nanotube based supercapacitors showed good rate performance. Rectangular shape of cyclic voltammogram was maintained even at the scan rate of > 1 V/s in 1 M sulfuric acid aqueous solution. Specific capacitance was well-retained (~94%) even when the discharging current density dramatically increased up to 145 A/g. Consequently, specific power as high as 60 kW/kg was obtained from as-grown carbon nanotubes in aqueous solution. Maximum specific energy of ~20 Wh/kg was obtained when carbon nanotubes were electrochemically oxidized and operated in organic solution. Demonstration of direct synthesis of carbon nanotubes on tantalum current collectors and their applications as supercapacitors could be an invaluable basis for fabrication of high performance carbon nanotube supercapacitors.

마이크로웨이브 플라즈마 화학기상증착법에 의한 탄소나노튜브의 성장특성 (Growth of Carbon Nanotubes by Microwave Plasma Enhanced Chemical Vapor Deposition)

  • 최성헌;이재형
    • 한국전기전자재료학회논문지
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    • 제19권6호
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    • pp.501-506
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    • 2006
  • Carbon nanotubes (CNTs) were grown with a microwave plasma enhanced chemical vapor deposition (MPECVD) method, which has been regarded as one of the most promising candidates for the synthesis of CNTs due to the vertical alignment, the low temperature and the large area growth. MPECVD used methane ($CH_4$) and hydrogen ($H_2$) gas for the growth of CNTs. 10 nm thick Ni catalytic layer were deposited on the Ti coated Si substrate by RF magnetron sputtering method. In this work, the pretreatment was that the Ni catalytic layer in different microwave power (600, 700, and 800 W). After that, CNTs deposited on different pressures (8, 12, 16, and 24 Torr) and grown same microwave power (800 W). SEM (Scanning electron microscopy) images showed Ni catalytic layer diameter and density variations were dependent with their pretreatment conditions. Raman spectroscopy of CNTs shows that $I_D/I_G$ ratios and G-peak positions vary with pretreatment conditions.

마이크로 웨이브를 이용한 탄소나노튜브 성장시 바이어스 전압의 효자 (Influence of bias voltage on properties of carbon nanotubes prepared by MPECVD)

  • 최성헌;이재형;양종석;박대희
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1440-1441
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    • 2006
  • In this study, we synthesized CNTs(carbon nanotubes) on the glass substrate by microwave plasma enhanced chemical vapor deposition (MPECVD), Effect of bias voltage on the grown behavior and morphology of CNTs were investigated. Recently, it has been proposed that aligned CNTs can also be achieved by the application of electric bias to the substrate during growth, the first time reported the bias effect such that the nanotube alignment occurred only when a positive bias was applied to the substrate whereas no aligned growth occurred under a negative bias and no tube growth was observed without bias. On the country, several researchers reported some different observations that aligned nanotubes could also be grown under negative substrate biases. This discrepancy as for the effect of positive and negative bias may indicate that the bias effect is not fully understood yet. The glass and Si wafers were first deposited with TiN buffer layer by r.f sputtering method, and then Ni catalyst same method, The thickness of TiN and Ni layer were 200 nm and 60 nm, respectively. The main process parameters include the substrate bias (0 to - 300 V), and deposition pressure (8 to 20 torr).

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플라즈마 화학 기상 증착법을 이용한 탄소나노튜브의 성장 분석 및 전계방출 특성 (Field Emission Characteristics and Growth Analysis of Carbon Nanotubes by plasma-enhanced chemical vapor deposition)

  • 오정근;주병권;김남수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.71-75
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    • 2003
  • Carbon nanotubes(CNTs) are grown by using Co catalyst metal. CNTs fabricated by PECVD(plasma enhanced chemical vapor deposition) method are studied in terms of surface reaction and surface structure by TEM and Raman analysing method and are analysed in its electrical field emission characteristics with variation of space between anode and cathode. Acetylene($C_2H_2$) gas is used as the carbon source, while ammonia and hydrogen gas are used as catalyst and dilution gas. The CNTs grown by hydrogen($H_2$) gas plasma indicates better vertical alignment, lower temperature process and longer tip, compared to that grown by ammonia($NH_3$) gas plasma. The CNTs fabricated with Co(cobalt) catalyst metal and PECVD method show the multiwall structure in mid-circle type in tip-end and the inner vacancy of 10nm. Emission properties of CNTs indicate the turn-on field to be $2.6\;V/{\mu}m$. We suggest that CNTs can be possibly applied to the emitter tip of FEDs and high brightness flat lamp because of low temperature CNTs growth, low turn-on field.

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분자배열된 4,4',4''-tris(N-(1-naphthyl)-N-phenylamino)-triphenylamine 박막 제조와 전기적 특성 (Formation and Current-voltage Characteristics of Molecularly-ordered 4,4',4''-tris(N-(1-naphthyl)-N-phenylamino)-triphenylamine film)

  • 강도순;최영선
    • 공업화학
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    • 제18권5호
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    • pp.506-510
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    • 2007
  • 전기적 특성을 가지는 4,4',4''-tris(N-(1-naphthyl)-N-phenylamino)-triphenylamine (1-TNATA)가 유기발광소자(OLED)에서 전극으로 사용되는 ITO (Indium Tin Oxide)와 홀 수송층(Hole Transport Layer, HTL) 사이에 박막으로 진공증착되었다. 분자배열이 잘 되어진 1-TNATA의 경우 ITO와 홀 수송층 사이의 계면에서 생기는 전하주입장벽을 줄임으로 소자의 안정성과 효율을 높여준다. 본 연구에서의 라만 스펙트라(Raman spectra) 분석 결과, 증착된 1-TNATA 박막의 열처리와 증착하는 동안 전자기장 처리에 의해서 박막이 집적되고 분자배열이 이루어짐을 확인하였다. 열처리를 한 경우 1-TNATA 박막으로의 전류 흐름이 25% 증가하였다. 또한, $110^{\circ}C$에서 열처리한 1-TNATA 박막으로 제조된 다층유기발광소자의 전원 효율과 발광효율이 향상되었다. 열처리한 박막이 전자기장으로 처리한 박막에 비해 높은 효율을 나타내었다.

Simple fabrication route for vertically-aligned CZTS nanorod arrays for photoelectrochemical application based on AAO template

  • 김지민;양우석;오윤정;문주호
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.402.2-402.2
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    • 2016
  • In photoelectrochemical (PEC) water splitting, Cu2ZnSnS4 (CZTS) compound has attracted intense attention as a photocathode due to not only large optical absorption coefficient, but also earth-abundance of constituent elements and suitable band alignment. With rapid development of nanotechnology, one-dimensional nanostructures of CZTS have been investigated as a potential form to achieve high efficiency because the nanostructures are expected to be capable of capturing more light and enhancing charge separation and transport. Here, we report a well-controlled fabrication route for vertically-aligned CZTS nanorod arrays on anodic aluminium oxide (AAO) template via simple sol-gel process followed by deposition of ZnS or CdS buffer layers on the CZTS nanorod to enhance charge separation. The structure, morphology, composition, optical absorption, and PEC properties of the resulting CZTS nanorod samples were characterized using X-ray diffraction, Raman spectroscopy, transmission electron microscopy, energy dispersive X-ray spectrometry, scanning electron microscopy, and UV-vis spectroscopy.

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Nanotransfer Printing for Large-Scale Integrated Nanopatterns of Various Single-Crystal Organic Materials

  • 백장미;박경선;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.361.2-361.2
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    • 2016
  • The manufacture of organic electronic circuits requires effective heterogeneous integration of different nanoscale organic materials with uniform morphology and crystallinity in a desired arrangement on a substrate. Herein, we present a new direct printing method, which enables monolithic integration of crystalline nanowire arrays with a diverse range of organic materials. In this method, we use a nanoscale patterned soft mold, which contains an assembly of simple nanoline patterns but, in combination with droplet of various organic inks, can produce a large-scale integration of various nanopatterns with multiple kinds of organic materials. The morphology of organic nanowires can controlled by nanoconfinement in nanoline of mold. And mutual alignment of nanopatterns can be controlled by adjusting the ink droplet size, number of droplets, ink deposition locations.

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