• 공업화학
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• 제29권4호
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• pp.484-487
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• 2018

본 논문에서는 유기전자소자에서 사용되는 수분 차단막의 투습도 분석을 위하여 ytterbium의 광학적 전기적 특성을 연구하였다. Ytterbium 박막은 다양한 성막 두께(20-100 nm)에 따라 넓은 범위의 광투과도(70-10%)와 비저항($6.0-0.16m{\Omega}{\cdot}cm$) 값을 나타내었다. 25 nm의 ytterbium 박막은 수분과 반응하여 산화되며 투과도와 저항이 실시간으로 변화하였고 이를 통해 parylene 고분자와 aluminum nitride 적층형 박막 봉지 필름을 분석한 결과 $4.3{\times}10^{-3}g/m^2{\cdot}day$의 투습도를 측정할 수 있었다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제13권1호
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• pp.15-21
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• 2013

In this paper, a MEMS tunable capacitor was successfully designed and fabricated using an aluminum nitride film and a gold suspended membrane with two air gap structure for commercial RF applications. Unlike conventional two-parallel-plate tunable capacitors, the proposed tunable capacitor consists of one air suspended top electrode and two fixed bottom electrodes. One fixed and the top movable electrodes form a variable capacitor, while the other one provides necessary electrostatic actuation. The fabricated tunable capacitor exhibited a capacitance tuning range of 375% at 2 GHz, exceeding the theoretical limit of conventional two-parallel-plate tunable capacitors. In case of the contact state, the maximal quality factor was approximately 25 at 1.5 GHz. The developed fabrication process is also compatible with the existing standard IC (integrated circuit) technology, which makes it suitable for on chip intelligent transceivers and radios.

• Bulletin of the Korean Chemical Society
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• 제35권4호
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• pp.1139-1143
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• 2014

The adsorption behavior of the sulphate ($SO{_4}^{2-}$) on the external surface of (5,0), (8,0), and (10,0) zigzag AlNNTs was studied by using density functional calculations. Adsorption energies in the nanotubes are about -8.59, -8.04, -8.60 eV with a charge transfer of 0.59, 0.48, 0.56|e| from the sulphate ion to the nanotubes, respectively. The adsorption energies indicated that sulphate ion can be absorbed strongly on the nanotubes. Therefore, these nanotubes can be used for adsorption of sulphate ion from the environmental systems. It was found that diameter of the AlNNTs has slight role in the adsorption of sulphate ion. The electronic properties of the nanotubes showed notable changes upon the adsorption process.

• 한국세라믹학회지
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• 제24권5호
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• pp.453-460
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• 1987

β'-sialon(Z=2.7) specimens with <30%wt. graphite as a reducing agent were decomposed at 1350°up to 1,450℃ under the atmosphere of 90% N2-10%H2. The decomposition of β'-sialon was calculated from the change in Z-value, and the formation of new minerals was identified from X-ray diffraction patterns. The decomposition reactions of sialon were considered to yield a stable sialon close to β-silicon nitride and some aluminum compounds according to the following equations; β'-sialon(s)＋C(s)＋N2(g)→β2-sialon(metastable)＋β3-sialon(stalbe phase) β2-sialon(s)＋C(s)＋N2(g)→β3-sialon(s)＋AlN(s)＋α-Al2O3(s)＋15R(s)＋SiO(g)＋Al2O(g)＋CO(g) Z-value; β2( 3.5)>β'( 2.7)>β3( 0.5) The decomposition rate of sialon was controlled by two mechanisms ; One was characterized by the interface area of contact, corresponding to an apparent activation energy of 50.5Kcal/mol in the initial stage, and the other by the diffusion, corresponding to that of 104.3Kcal/mol in the final stage of the decomposition.

• 대한화학회지
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• 제61권1호
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• pp.16-24
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• 2017

본 연구는 그래핀과 유사한 2차원 붕소-질소(BN)와 알루미늄-질소(AlN) 시트에 여러 대기 유해 가스($CO_x$, $NO_x$, $SO_x$)가 흡착될 때의 구조적 특징과 결합에너지를 밀도 범함수 이론(DFT)과 MP2 방법을 사용하여 연구하였다. 분자 구조는 $B3LYP/6-31G^{**}$와 $CAM-B3LYP/6-31G^{**}$이론 수준에서 최적화하고, 진동 주파수를 계산하여 열역학적으로 가장 안정한 분자 구조를 확인하였다. 결합에너지는 $MP2/6-31G^{**}$ 이론 수준에서 한 점(single point) 에너지를 계산하고, 영점 진동에너지(ZPVE)와 바탕집합 중첩에러(BSSE)를 모두 보정하였다. BN 시트에 가스의 흡착은 모두 물리흡착으로 예측되었으며, AlN 시트에 대한 가스 흡착은 $CO_x$나 $NO_x$에 대해서는 물리흡착이 그리고 $SO_x$에 대해서는 화학 흡착이 일어날 것으로 예측되었다.

• 한국세라믹학회지
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• 제51권4호
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• pp.324-331
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• 2014

The dispersion characteristics of AlN-4.5 wt% $Y_2O_3$ powder mixture by various dispersants were investigated in ethanol and methyethly-ketone (MEK) solvents. In general, the cationic polymer dispersants demonstrated superior dispersion of the powder as compared to the non-ionic ester-type dispersants or anionic phosphate-ester-based ones. The dispersion performance of the cationic polymer dispersants was sensitive to the type of solvent. An anhydric maleic-acid-based graft copolymer dispersant, AFB-1521, demonstrated a very good dispersion capability in ethanol but exhibited a much inferior dispersion in MEK. On the other hand, the dispersion of the powder mixture was very good with a phosphate-ester-based block polymer dispersant, BYK-111, in MEK solvent, while dispersionwas much degraded in ethanol.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2002년도 종합학술발표회 논문집 Vol.12 No.1
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• pp.3-6
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• 2002

In this paper, Thin film bulk acoustic resonate.(TFBAR) fillers tuned by gold plated on-wafer inductors are presented. The air-gap type TEBAR is used with aluminum nitride(AIN) as piezoelectric material and platinum as top and bottom electrodes. Inductor equivalent model and modified Butterworth-Van Dyke(MBVD) model are employed for the frequency tuning of fabricated TFBAR bandpass filters. Fabricated inductor has inductance of 3 nH and Q factor of about 8 at 2 ㎓. It is clearly revealed that inductor tuning can enhance the bandwidth of ladder filters and improve out-of-band rejection characteristic around 10㏈.

• 자원리싸이클링
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• 제25권5호
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• pp.75-83
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• 2016

탄소환원질화법을 이용하여 질화알루미늄(Aluminum Nitride: AlN)을 제조하는 연구를 배치당 0.7 ~ 1.5 kg 규모로 규모 확대하여 수행하였다. 고품위 알루미나 분말과 탄소(carbon black)를 배합하여 흑연 도가니에 장입하고, 노내 진공도 $2.0{\times}10^{-1}Torr$에서 온도($1,550{\sim}1,750^{\circ}C$), 시간(0.5 ~ 4 hr), $N_2$유량($10{\sim}40{\ell}/min$)을 변화시키면서 AlN을 합성하였다. 실험결과 합성온도 $1,700{\sim}1,750^{\circ}C$, 합성시간 3시간, 질소유량 $40{\ell}/min$가 적정 조건이었다. 또한, 합성한 AlN에 잔존하는 탄소를 제거하기 위하여 관상로에서 온도 $650-750^{\circ}C$, 1 - 2시간 범위에서 탈탄을 시킨 결과, 알루미나와 탄소 몰배합비 1 : 3.2 로 합성한 시료를 대기 분위기에서 탈탄온도 $750^{\circ}C$, 관상로의 회전속도 1.5 rpm에서 2시간 탈탄하는 것이 적정조건이었다. 시험 제조한 AlN의 성분 분석 결과 C 함량 835 ppm, O 함량 0.77%으로서 순도 99% 이상의 고품위 제품을 제조할 수 있었다.

• 한국결정성장학회지
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• 제18권6호
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• pp.237-241
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• 2008

AlN 소결체를 제조함에 있어서 $Y_2O_3$를 소결 첨가제로 하여 일축 가압 소결법을 적용하여 소결 조제 첨가량의 변화와 소결 시간의 변화에 따른 소결 특성, 미세구조 및 열전도도 측성에 대하여 조사하였다. $Y_2O_3$의 첨가로 인하여 AlN의 치밀화가 첨가하지 않은 경우보다 증진됨을 확인할 수 있었으며, 결정립계 및 결정립계 삼중점에서 YAG 이차상을 형성함으로써 AlN 결정 격자 내의 산소 결함 농도를 낮춰 열전도도를 향상시킴을 알 수 있었다. 특히, 소결 시간을 증대함에 따라 결정립 성장 및 열전도도의 방해 요소인 YAG 이차상이 고온에서 휘발됨에 따라 열전도도가 크게 향상됨을 확인할 수 있었다.

• 반도체디스플레이기술학회지
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• 제12권1호
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• pp.29-33
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• 2013

We have fabricated transparent polymer composite films with high thermal emissivity, which can be used for heat dissipation of transparent electronics. PMMA (poly(methyl methacrylate)) solution with high transparency and thermal emissivity is mixed with various fillers (carbon nanotubes (CNTs), aluminum nitride (AlN), or silicon carbide (SiC)) with high thermal conductivity. We have achieved the thermal emissivity as high as 0.94 by the addition of CNTs. Compared with the PMMA film on glass, however, the addition of AlN or SiC is shown to rather decrease the thermal emissivity. It is also observed that the thickness of the PMMA film does not affect its thermal emissivity. To avoid any degradation of the thermal conductivity, therefore, the PMMA film thickness is desirable to be $1{\mu}m$. There also exists a tradeoff between the optical transmittance and thermal conductivity on the selection of the amount of fillers.