• Tribology and Lubricants
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• v.35 no.5
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• Journal of the Korean Society of Safety
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• v.8 no.4
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• pp.27-40
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• 1993

High temperature tensile tests, steady state creep tests, Internal stress tests and creep rupture tests using A17075 alloy( $T_{6}$ ) were performed over the temperature range of 9$0^{\circ}C$~50$0^{\circ}C$ (0.4 $T_{m}$ ~0.85 $T_{m}$ ) and stress range of 0.64~17.2(kgf/$\textrm{mm}^2$). The main results obtained in this paper were as follows. (1) The activation energies for yielding at the temperature of 0.4 $T_{m}$ ~0.75 $T_{m}$ were calculated to be 25.7~36.5kcal/mol, which were nearly equal to the activation energies for creep. (2) At around the temperature of 9$0^{\circ}C$~12$0^{\circ}C$ and under the stress level of 10~17.2(kgf/$\textrm{mm}^2$), and at around the temperature of 200~41$0^{\circ}C$ and under the stress level of 1.53~9.55(kgf/$\textrm{mm}^2$) and again at around the temperature of 470~50$0^{\circ}C$ and under the stress level of 0.62~l.02(kgf/$\textrm{mm}^2$), the applied stress dependence of steady state creep rate $n_{measu}$ measured were, respectively, 3.15, 6.62 and 1.1, which were in good agreement the calculated stress dependence $n_{ealeu}$ obtained by the difference of the applied stress dependence of the Internal stress and the ratio of the internal stress to the applied stress. (3) At the temperature range of 0.4~0.43 $T_{m}$ , and at the temperature range of 0.52~0.75 $T_{m}$ and again at the temperature range of 0.82~0.85 $T_{m}$ , the activation energies $Q_{measu}$ obtained by steady state creep rate, respective, 26. 16, 34.9, 36.2 and 36.1kcal/mol, which were in good agreement with those obtained with the activation energies under constant effective stress and the temperature dependence of Internal stress. (4) At the temperature range of the 0.52~0.73 $T_{m}$ and under the stress level of 1.53~9.55(kgf/$\textrm{mm}^2$), the stress dependence of rupture life(n’) measured was 6.3~6.6, which was in good agreement with the stress dependence of steady state creep rate(n). And at the same condition the activation energy for rupture( $Q_{f}$ ) measured was 32.0~36.9kca1/mol, which was also in good agreement with the activation energy obtained by steady state creep rate ( $Q_{c}$ ). (5) The rupture life( $t_{f}$ ) might be represented by athermal process attributed to the difference of the applied stress dependence of the internal stress and the ratio of the internal stress to the applied stress, and the thermal activated process attributied to the temperature dependence of the internal stress as $t_{f}$ = A'$\sigma$$_{a}$ ｛n(1-d $\sigma$$_{i}$ /d $\sigma$$_{a}$ )/(1-$\sigma$$_{i}$ / $\sigma$$_{a}$ )｝.exp[｛ $Q_{c}$ $^{*}$-( $n_{o}$ R $T^2$/ $E_{(T)}$) (d $E_{(T)}$/dT) - ( $n_{0}$ R $T^2$/ $\sigma$$_{a}$ - $\sigma$$_{i}$ ) (d $\sigma$$_{i}$ /dT)｝/RT]. (6) The relationship betwween Larson-Miller rupture parameter and logarithmic stress was linearly decreased, so creep rupture life of Al 7075 alloy seemed to be predicted exactly with Larson-Miller parameter.meter.

• Bulletin of the Korean Chemical Society
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• v.28 no.2
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• pp.251-256
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• 2007

The crystal structure of fully dehydrated partially Cs+-exchanged zeolite X, [Cs52Na40Si100Al92O384], a = 24.9765(10) A, has been determined by single-crystal X-ray diffraction techniques in the cubic space group Fd3 at 21 °C. The crystal was prepared by flow method for 5 days using exchange solution in which mole ratio of CsOH and CsNO3 was 1 : 1 with total concentration of 0.05 M. The crystal was then dehydrated at 400 °C and 2 × 10-6 Torr for 2 days. The structure was refined to the final error indices, R1 = 0.051 and wR2 (based on F2) = 0.094 with 247 reflections for which Fo > 4σ (Fo). In this structure, about fifty-two Cs+ ions per unit cell are located at six different crystallographic sites with special selectivity; about one Cs+ ion is located at site I, at the centers of double oxygen-rings (D6Rs), two Cs+ ions are located at site I', and six Cs+ ions are found at site II'. This is contrary to common view that Cs+ ions cannot pass sodalite cavities nor D6Rs because six-ring entrances are too small. Ring-opening by the formation of ?OH groups and ring-flexing make Cs+ ions at sites I, I', and II' enter six-oxygen rings. The defects of zeolite frameworks also give enough mobility to Cs+ ions to enter sodalite cavities and D6Rs. Another six Cs+ ions are found at site II, thirty-six are located at site III, and one is located at site III' in the supercage, respectively. Forty Na+ ions per unit cell are located at two different crystallographic sites; about fourteen are located at site I, the centers of D6Rs and twenty-six are also located at site II in the supercage. Cs+ ions and Na+ ions at site II are recessed ca. 0.34(1) A and 1.91(1) A into the supercage, respectively. In this work, the highest exchange level of Cs+ ions per unit cell was achieved in zeolite X by conventional aqueous solution methods and it was also shown that Cs+ ion could pass through the sixoxygen rings.

• Journal of Microbiology and Biotechnology
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• v.17 no.9
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• pp.1504-1512
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• 2007

The fpr gene, which encodes a ferredoxin-$NADP^+$ reductase, is known to participate in the reversible redox reactions between $NADP^+$/NADPH and electron carriers, such as ferredoxin or flavodoxin. The role of Fpr and its regulatory protein, FinR, in Pseudomonas putida KT2440 on the oxidative and osmotic stress responses has already been characterized [Lee at al. (2006). Biochem. Biophys. Res. Commun. 339, 1246-1254]. In the genome of P. putida KT2440, another Fpr homolog (FprB) has a 35.3% amino acid identity with Fpr. The fprB gene was cloned and expressed in Escherichia coli. The diaphorase activity assay was conducted using purified FprB to identify the function of FprB. In contrast to the fpr gene, the induction of fprB was not affected by oxidative stress agents, such as paraquat, menadione, $H_2O_2$, and t-butyl hydroperoxide. However, a higher level of fprB induction was observed under osmotic stress. Targeted disruption of fprB by homologous recombination resulted in a growth defect under high osmotic conditions. Recovery of oxidatively damaged aconitase activity was faster for the fprB mutant than for the fpr mutant, yet still slower than that for the wild type. Therefore, these data suggest that the catalytic function of FprB may have evolved to augment the function of Fpr in P. putida KT2440.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.6
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• pp.483-489
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• 2019

For machine learning techniques, a large amount of high-quality material property data should be accumulated. In this study, several data for an alumina tape casting process were produced with the variables of slurry viscosity, gap size, and coating speed. The alumina tapes were manufactured in the range of 1,000~6,000 cps for slurry viscosity, $300{\sim}1,000{\mu}m$ for gap size, and 0.5~2.0 m/min for coating speed. As a result, the lower the viscosity, coating speed, and gap size, the more pore-free tapes could be manufactured. The viscosity of the slurry limited the minimum thickness of the tape. Green sheets with high packing density were manufactured from the slurry of 100~6,000 cps slurry viscosity, coating speed of 0.5 m/min, and a $300{\sim}500{\mu}m$ gap size.

• The Journal of Korean Academy of Prosthodontics
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• v.39 no.2
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• pp.157-170
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• 2001

The bond strength is the most important factor in establishing long-term success of resin-retained fixed prostheses. So, various surface treatment methods have been introduced to improve the bond strength of metal surface and bonding resin till now This study was performed to compare the effect of silicoating with that of metal primer and analyze the correlation between treatment time of sandblasting and the bond strength, so that meant to find more effective surface treatment method that could enhance the bond strength of resin-retained fixed prostheses. The surfaces of all specimens made of $Verabond^{(R)}$ alloys were air abraded with $250{\mu}m\;Al_2O_3$ according to treatment time of sandblasting and they were subdivided to be treated with only sandblasting(S group), silicoating following sandblasting(SS group) and metal primer application after sandblasting(SM group). Then pairs of metal specimens (${\phi}10mm{\times}h\;2mm,\;{\phi}6{\times}h\;2mm$) were bonded with Super bond $C&B^{(R)}$. The specimens were stored in $38^{\circ}C$ water for 48 hours and shear bond strength was measured using the universal testing machine. The results were as follows, 1. In the comparison of shear bond strength according to treatment time of sandblasting, bond strength was increased in the order of 0', 15', 30', 45', 60' group. 0' group had significantly lower value than any other, while 0', 15' group were significantly different with 30', 45', 60' group(p<0.05). 2. In the comparison of shear bond strength according surface treatment methods, bond strength was increased in the order of S group. SS group and SM group. S group was significantly different with SS group and SM group(p<0.05). 3. Observing the mode of bond failure. 0', 15' group showed only adhesive failure, and 30', 45', 60' group did mostly adhesive & cohesive failure in S group. In SS group and SM group, all other groups except 0', 15' group showed mostly cohesive failure. From the above results, it is considered that sandblasting should be treated for more than 30 seconds, and metal primer be more effective and available clinically than silicoater system which is complicate, technique-sensitive and time-consuming method, when nonprecious metal surface is planning be treated with in order enhance the bond strength of resin-retained fixed prostheses.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.20 no.3
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• pp.219-223
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• 1987

A slightly modified method of Rashid and Potts(1980) to determine riboflavin in milk in which lead acetate was used as a precipitant was employed in tile present study to test applicability to determine that of fish as well. The lead acetate method was found to be sensitive, simple, inexpensive and rapid compared to the modified A.O.A.C. method by Cordon et al. (1979). But higher riboflavin values were obtained in this study than those reported so far. The riboflavin contents of 9 white fleshed fishes were in the range of $0.29\~0.48mg$ per 100g fresh sample. Linear regression equation Y=125.70X+0.71 (R=0.9993) was obtained for the calculation of riboflavin content in the white fleshed fish. Y is the concentration of riboflavin in the final solution to be chocked its OD at fluorometer and X is the dial reading of fluorometer. The stability of riboflavin as the freshness changes during icing storage$(at\;0^{\circ}C)$ was studied with file fish. During the initial stage of storage, the riboflavin content was found to by increased by $14\%$, but the difference was not statistically significant (p>0.05). K-value and VBN-value were increased along with storage time, but Proximate composition was not changed significantly during entire storage of 18 days.

• Journal of the Korea Institute of Building Construction
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• v.17 no.5
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• pp.419-427
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• 2017

In order to examine the possibility of practical use of aluminate cement concrete at low-temperature environment with insulation method, an experimental studies on flowability, setting time, freezing temperature, size variation and compressive strength of the mortar at low-temperature were conducted. Compressive strength was increased in use of CSA, aluminate cement with gypsum. Workability and physical properties were improved by using aluminate cement and gypsum. In addition, freezing resistance and physical properties were improved by applying the insulation curing method. Especially, when alumina cement and gypsum were used together, the insulation curing method was more effective in improving the compressive strength.

• Restorative Dentistry and Endodontics
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• v.23 no.1
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• pp.183-196
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• 1998

The purpose of this study was to determine the effect of bleaching technique on the shear bond strength of esthetic restorative materials to bovine enamel. The bleaching agent was used 35% $H_2O_2$(Hi-Lite, Shofu, U.S.A.). Experimental groups were divided into two divisions as group A and B. Experimental A groups for the effect of number of bleaching were as follows ; Group Al : no bleaching Group A2 : bleaching 1 time ( for 5 minutes ) Group A3 : bleaching 3 times ( each for 5 minutes ) Group A4 : bleaching 6 times ( each for 5 minutes ) Group A5 : bleaching 9 times ( each for 5 minutes ) Experimental B groups for the effect of storage period in artificial saliva were as follows ; Group B1 : not stored in artificial saliva after bleaching Group B2 : stored in artificial saliva for 1 day after bleaching Group B3 : stored in artificial saliva for 1 week after bleaching Group B4 : stored in artificial saliva for 2 weeks after bleaching Group B5 : stored in artificial saliva for 4 weeks after bleaching Composite resin and glass ionomer cement were bonded to all specimens, and the shear bond strength between enamel and r~storative material were measured in Instron Universal Testing Machine(Instron, 4467, U.S.A,), Additionally, the bleached enamel specimens were examed after etching with 37.4% $H_3PO_4$ for 1 min under SEM(S-2300, Hitachi Co., Japan) to observe the effect of bleaching procedure on enamel surface morphology. The result were as follows ; 1. In SEM findings, bleached bovine enamel was found to be superficially rough. 2. In bleached bovine enamel, the effect of acid etching was reduced with the increase of number of bleaching. 3. The mean shear bond strength of composite resin and glass ionomer cement to bleached enamel surface tended to be lower than those to non-bleached enamel surface. 4. With the increase of number of bleaching, the shear bond strength of composite resin and glass ionomer cement to bleached enamel were progressively decreased. 5. Increasing the, storage period in artificial saliva after bleaching, the shear bond strength of composite resin and glass ionomer cement to bleached enamel were progressively increased. 6. The mean shear bond strength of glass ionomer cement to bleached bovine enamel tended to be clearly lower than that of composite resin.

• Journal of the Korean Recycled Construction Resources Institute
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• v.9 no.4
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• pp.553-560
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• 2021

In this study, cement clinker using a pure sample and clinker using 7% coal ash were sintered at a temperature of 1050~1500℃. Changes in the content of cement minerals and changes in microstructure by sintering temperature were reviewed. The application of coal ash as a raw material for cement clinker was applicable as a source of Al₂O₃ and SiO₂. At a sintering temperature of 1350℃ or higher, the cement clinker applied with coal ash showed the same level of mineral content as compared to the cement clinker applied with pure raw material. The microstructure also showed a similar state, confirming that coal ash can be used as a raw material for cement. In XRD-Reitveld analysis, a maximum amount of Belite was produced at 1250℃. The conversion from Belite to Alite was observed from 1350℃. From 1350℃, the interstitial phase and the mineral phase presumed to be alite were distinguished. It was clearly distinguished from 1400℃. As the sintering temperature increased, the shape and boundary of the crystal phase became clear, and the size of the crystal phase was also increased.