• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.246-249
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• 2000

The effects of Zr on the mechanical workability and tensile strength of Cu-Ni-Mn-Sn-Al alloys have been investigated and the following results were obtained. The mechanical workability of Cu-Ni-Mn-Sn-Al alloys are increased with addition of Zr. And the surface cracks of specimen were not produced in Zr added Alloys. Especially in condition of hot-worked beyond the 90% working ratio, Zr contained specimen showed intra-granule crack propagation but Zr-free specimen showed inter-granule mode. The tensile strength have maximum value in 0.05% Zr contained alloy. The aging mechanism of Cu-Ni-Mn-Sn-Al alloys were varied by Zr addition.

• Journal of Powder Materials
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• v.3 no.4
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• pp.271-278
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• 1996

In this study, the effect of the transition elements on the microstructure and mechanical properties of rapidly solidified Al-Mg-X alloys was investigated. As a result of the rapid solidification processing, fine equiaxed grains with a mean diameter of 2 $\mu$m were observed in these alloys. Many fine particles were found to be distributed rather homogeneously throughout the matrix with relatively large particles occasionally at grain boundaries. The ultimate tensile strengths of Al-Mg-X alloys were found to decrease rather remarkably at 150 $^{\circ}C$ without the gain of the ductility at 150 $^{\circ}C$, which may result from segregation of $\beta$ ($Al_{3}Mg_{2}$) precipitates. Fine dimples were observed on the fracture surfaces for all alloy systems and the variation of the size and shape of dimples was not observed upon alloy systems. The ductility at 530 $^{\circ}C$ was found to be ~100%, suggesting that grain boundary sliding did not contribute to ductiliy despite he grain size stabilization. The absence of superplastic behavior may be associated with low boundary misorientation in rapidly solidified Al-Mg-X alloys.

• Proceedings of the Korean Magnestics Society Conference
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• 2003.12a
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• pp.334-334
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• 2003

• Korean Journal of Materials Research
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• v.26 no.9
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• pp.493-497
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• 2016

This study was carried out to investigate the effect of deformation induced martensite on the damping capacity of Fe-26Mn-4Co-2Al damping alloy. ${\alpha}^{\prime}$ and ${\varepsilon}$-martensite were formed by cold working, and; deformation induced martensite was formed with according to the specific direction and the surface relief. With an increasing degree of cold rolling, the volume fraction of ${\alpha}^{\prime}$-martensite increased rapidly, while the volume fraction of ${\varepsilon}$-martensite decreased after rising to a maximum value at a specific level of cold rolling. Damping capacity was increased, and then decreased with an increasing of the degree of cold rolling. Damping capacity was influenced greatly by the volume fraction of ${\varepsilon}$-martensite formed by cold working, but the effect of the volume fraction of ${\alpha}^{\prime}$-martensite have a actually on effect on the damping capacity.

• Journal of Power System Engineering
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• v.20 no.6
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• pp.46-50
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• 2016

This study was carried out to investigate the effect of cold working on the tensile strength of Fe-26Mn-4Co-2Al damping alloy. ${\alpha}^{\prime}$ and ${\varepsilon}$-martensite were formed by cold working, and martensite was formed with the specific direction and surface relief. With the increasing degree of cold rolling, volume fraction of ${\alpha}^{\prime}$-martensite was increased, whereas the volume fraction of ${\varepsilon}$-martensite was decreased after rising to maximum value at specific lever of cold rolling. Tensile strength was linearly increased with an increasing of degree of cold rolling. Tensile strength was strongly affected to the volume fraction of ${\varepsilon}$-martensite formed by cold working, but the effect of volume fraction of ${\varepsilon}$-martensite on the tensile strength was not observed.

• Transactions of the Korean hydrogen and new energy society
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• v.6 no.1
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• pp.35-41
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• 1995

The MmNi-based alloy electrode was studied for use as a negative electrode in Ni-MH battery. Alloys with $MmNi_5-_xM_x$(M=Co,Al,Mn) composition were synthesized, and their electrode charateristics of activation rate, temperature dependence, electrode capacity and cycle life were investigated. With increasing Al content and decreasing Mn content in the alloys, the discharge capacity increased while the cycle life decreased. As x in $MmNi_5-_xM_x$ increased from 1.5 to 2.0, decreasing the Ni content, the discharge capacity, the low temperature property and the rate capability decreased. However its cycle life was improved. Increasing Co content resulted in a prolonged cycle life and decrease of high rate discharge capacity. It can be concluded that the most promising alloy in view of discharge capacity and cycle life is $MmNi_{3.5}Co_{0.7}Al_{0.5}Mn_{0.3}$.

• Journal of Korea Foundry Society
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• v.30 no.6
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• pp.235-240
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• 2010

The evolution of microstructure and phases of Mg-10Al-Mn alloy by cooling plate method during homogenization treatment have been investigated with metallographic analysis, scanning electron microscopy and energy dispersive spectroscopy. The ingots used for this experiment were prepared by cooling plate and homogenization heat treatment was performed at 300 and $400^{\circ}C$ for various holding times (0, 1, 4, 8 and 12h). The casting ingots were consisted of the fine grains and eutectic phases. And, these eutectic phases were dissolved into the matrix during homogenization treatment at $400^{\circ}C$ but the lower temperature (at $300^{\circ}C$) did not be.

• Korean Journal of Materials Research
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• v.30 no.5
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• pp.246-251
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• 2020

The annealing characteristics of cold-rolled Al-6.5Mg-1.5Zn-0.5Fe-0.5Mn alloy, newly designed as an automobile material, are investigated in detail, and compared with those of other aluminum alloys. Using multi-pass rolling at room temperature, the ingot aluminum alloy is cut to a thickness of 4 mm, width of 30 mm, and length of 100 mm to reduce the thickness to 1 mm (r = 75 %). Annealing after rolling is performed at various temperatures ranging from 200 to 500 ℃ for 1 hour. The specimens annealed at temperatures up to 300 ℃ show a deformation structure; however, from 350 ℃ they have a recrystallization structure consisting of almost equiaxed grains. The hardness distribution in the thickness direction of the annealed specimens is homogeneous at all annealing temperatures, and their average hardness decreases with increasing annealing temperature. The tensile strength of the as-rolled specimen shows a high value of 496 MPa; however, this value decreases with increasing annealing temperature and becomes 338 MPa after annealing at 400 ℃. These mechanical properties of the specimens are compared with those of other aluminum alloys, including commercial 5xxx system alloys.

• Journal of Korea Foundry Society
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• v.30 no.1
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• pp.29-33
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• 2010

The microstructure of Al-5%Mg based alloy mainly consists of aluminum matrix with a small amount of AlMn phase. The addition of Sc or Zn to the base alloy significantly improved the as-cast tensile strength, while the addition of Fe deteriorated both strength and ductility. Although the Al-5%Mg based alloy was not heat-treatable, aging hardening could be observed in the case that Sc or Zn was added to the base alloy. TEM analysis showed that very fine AlSc or AlMgZn precipitates were formed after T6 heat treatment, resulting in enhanced strength. The corrosion resistance measured as corrosion potential was found to decrease a little by adding Zn, whereas other alloying elements were not clearly influential.