• 제목/요약/키워드: Air-formed oxide film

검색결과 43건 처리시간 0.049초

열 및 기계적 반복하중 하의 내열금속 표면 홀 주변 산화막의 변형 및 응력해석 (Cracking Near a Hole on a Heat- Resistant Alloy Subjected to Thermo-Mechanical Cycling)

  • 이봉훈;강기주
    • 대한기계학회논문집A
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    • 제34권9호
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    • pp.1227-1233
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    • 2010
  • 가스터빈엔진 내의 블레이드에서는 표면에 외부의 찬 공기를 흘려주는 작은 냉각 홀들을 가공하고 열 차단 코팅시스템을 코팅하는 방법으로 기지금속을 고온에서 보호한다. 열 차단 코팅은 열피로 과정에서 산화막의 성장 및 접합층과 산화막의 열팽창계수의 불일치로 산화막내부에 잔류응력이 발생하며 궁극적으로 코팅층의 분리를 유발한다. 본 연구에서는 내열합금 시편 표면에 작은 홀을 가공하여 여러 가지 고온 유지 조건에서 열 및 기계적 피로 시험을 수행하여 홀 주위의 산화막의 변형을 관찰하였다. 실험결과 기계적 피로가 홀 주위의 산화막의 변형에 중요한 영향을 미치며, 동일한 산화막 두께에서 고온 유지 시간이 짧을수록 변형이 쉽게 발생 하였다. 또한 본 연구에서는 홀 주위 산화막의 응력해석을 위한 이론적인 연구도 시도되었다.

Fabrication of YSZ/GDC Bilayer Electrolyte Thin Film for Solid Oxide Fuel Cells

  • Yang, Seon-Ho;Choi, Hyung-Wook
    • Transactions on Electrical and Electronic Materials
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    • 제15권4호
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    • pp.189-192
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    • 2014
  • Yttria-stablized zirconia (YSZ) is the most commonly used electrolyte material, but the reduction in working temperature leads to insufficient ionic conductivity. Ceria based electrolytes (GDC) are more attractive in terms of conductivity at low temperature, but these materials are well known to be reducible at very low oxygen partial pressure. The reduction of electrolyte resistivity is necessary to overcome cell performance losses. So, thin YSZ/GDC bilayer technology seems suitable for decreasing the electrolyte resistance at lower operating temperatures. Bilayer electrolytes composed of a galdolinium-doped $CeO_2$ ($Ce_{0.9}Gd_{0.1}O_{1.95}$, GDC) layer and yttria-stabilized $ZrO_2$ (YSZ) layer with various thicknesses were deposited by RF sputtering and E-beam evaporation. The bilayer electrolytes were deposited between porous Ni-GDC anode and LSM cathode for anode-supported single cells. Thin film structure and surface morphology were investigated by X-ray diffraction (XRD), using $CuK{\alpha}$-radiation in the range of 2ce morphol$^{\circ}C$. The XRD patterns exhibit a well-formed cubic fluorite structure, and sharp lines of XRD peaks can be observed, which indicate a single solid solution. The morphology and size of the prepared particles were investigated by field-emission scanning electron microscopy (FE-SEM). The performance of the cells was evaluated over $500{\sim}800^{\circ}C$, using humidified hydrogen as fuel, and air as oxidant.

Fe계 합금 분말 소결품(SMF9060)의 마모 특성 연구 (A Study on Tribological Characteristics of Powder Sintered Fe-base Alloy (SMF9060))

  • 김상윤;김대욱;박영민;신동철;김태규
    • 열처리공학회지
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    • 제27권2호
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    • pp.65-71
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    • 2014
  • SMF9060 material is a Fe-based powder sintered alloy that is used for several automobile components such as Synchronize Hub, oil pump and transmission. These components are required excellent wear resistance and durability. In this study, we have performed a dry wear test at the ambient air and Ar gas conditions in the room temperature, and a lubricant wear test at the room temperature and engine oil temperature of $100^{\circ}C$. The amount of wear volume and coefficient friction are measured by a Profilometer and a Ball on disk type wear tester. The wear volume in Ar gas condition was a little higher than that in the ambient air condition. However the wear volume in the lubricant wear condition was much lower than in the dry wear condition. XRD analysis of the debris in Ar gas condition showed that the oxide film was not formed.

산화아연 나노구조 박막의 일산화탄소 가스 감지 특성 (CO Gas Sensing Characteristics of Nanostructured ZnO Thin Films)

  • 웬래훙;김효진;김도진
    • 한국재료학회지
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    • 제20권5호
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    • pp.235-240
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    • 2010
  • We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based active layer with an embedded Pt/Ti electrode covered by the self-assembled Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of $500^{\circ}C$. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at $250^{\circ}C$ and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.

Thermal Evaporation법으로 제조한 NiCr 박막의 증착 특성 (Deposition Properties of NiCr Thin Films Prepared by Thermal Evaporation)

  • 권용;박용주;최승평;정진;최광표;류현욱;박진성
    • 한국세라믹학회지
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    • 제41권6호
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    • pp.450-455
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    • 2004
  • NiCr 합금을 열증발원으로 사용한 thermal evaporation법으로 NiCr박막을 $Al_2$O$_3$/Si 기판 위에 증착시켰다. 이 때 동일한 량의 NiCr 합금을 1회에 모두 증착하는 방법과, l/2씩 2회 증착하는 방법으로 NiCr 박막을 각각 증착시켜, 박막의 미세구조에 따른 막의 특성변화를 고찰하였으며, 열처리 온도에 따른 NiCr 박막의 상 변화, 조성변화 및 미세구조 변화를 XRD, AES 및 FE-SEM으로 각각 분석하였다. 열처리 과정에서 박막내부에 존재하는 Cr 성분이 표면 쪽으로 확산하여 산화됨으로써 Cr산화층/Ni 층/Cr 산화층의 전형적인 다층구조를 형성함을 알 수 있었으며, 특히, $700^{\circ}C$ 이상에서는 Ni 층이 Cr산화층을 통하여 표면 쪽으로 확산됨으로써 표면에 원주형 결정립을 가지는 NiO 층을 형성하였다. 특히 Ni 층이 확산 전의 구조를 유지한 채 표면에 추가적인 NiO층이 형성되는데, 이는 형성된 Cr산화층의 확산이 상대적으로 Ni 층에 비하여 어려운데 기인한다.

Metal PCB에 있어서 양극산화법으로 제작한 Al2O3절연막의 방열특성 (Heat dissipation of Al2O3 Insulation layer Prepared by Anodizing Process for Metal PCB)

  • 조재승;김정호;고상원;임실묵
    • 한국표면공학회지
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    • 제48권2호
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    • pp.33-37
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    • 2015
  • High efficiency LED device is being concerned due to its high heat loss, and such heat loss will cause a shorter lifespan and lower efficiency. Since there is a demand for the materials that can release heat quickly into the external air, the organic insulating layer was required to be replaced with high thermal conductive materials such as metal or ceramics. Through anodizing the upper layer of Al, the Breakdown Voltage of 3kV was obtained by using an uniform thickness of $60{\mu}M$ aluminum oxide($Al_2O_3$) and was carried out to determine the optimum process conditions when thermal cracking does not occur. Two Ni layers were formed above the layer of $Al_2O_3$ by sputtering deposition and electroplating process, and saccharin was added for the purpose of minimizing the remain stress in electroplating process. The results presented that the 3-layer film including the Ni layer has an adhesive force of 10N and the thermal conductivity for heat dissipation is achieved by 150W/mK level, and leads to improvement about 7 times or above in thermal conductivity, as opposed to the organic insulation layer.

탄화규소 결정상의 종류가 탄화규소 표면에 ZSM-5가 형성되는데 미치는 영향 (Effect of SiC Crystal Phase on Growing ZSM-5 on the Surface of SiC)

  • 정은진;이윤주;김영희;권우택;신동근;김수룡
    • Korean Chemical Engineering Research
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    • 제53권2호
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    • pp.247-252
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    • 2015
  • ${\alpha}$-상 과 ${\beta}$-상 두 가지 종류의 탄화규소(SiC) 입자 표면에 수열 합성 방법으로 ZSM-5 결정을 형성하였다. SiC는 $50{\mu}m$ 이상이 되는 크기의 입자를 사용하였으며, ZSM-5 결정이 SiC 표면에서부터 성장하도록 유도하기 위하여 합성 단계에 앞서 SiC 표면에 산화층을 형성하였으며, 수열합성 온도와 시간을 변화시켜 보았다. 그 결과 ${\beta}$-SiC는 $900^{\circ}C$ 조건에서도 산화막이 형성되었으며, 특히 $150^{\circ}C$ 합성 조건에서 ZSM-5가 ${\beta}$-SiC 표면에서부터 성장하였음이 뚜렷이 관찰되었다. $200^{\circ}C$ 조건에서는 ZSM-5의 결정의 크기가 성장할 뿐 아니라, 시간의 증가에 따라 결정의 형태가 뚜렷해지고 SiC 표면에 도포되는 양이 증가하는 것을 확인할 수 있었다.

Effects of thickness of GIZO active layer on device performance in oxide thin-film-transistors

  • Woo, C.H.;Jang, G.J.;Kim, Y.H.;Kong, B.H.;Cho, H.K.
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.137-137
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    • 2009
  • Thin-film transistors (TFTs) that can be prepared at low temperatures have attracted much attention due to the great potential for flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited by low field effect mobility or rapidly degraded after exposing to air in many cases. Another approach is amorphous oxide semiconductors. Amorphous oxide semiconductors (AOSs) have exactly attracted considerable attention because AOSs were fabricated at room temperature and used lots of application such as flexible display, electronic paper, large solar cells. Among the various AOSs, a-IGZO was considerable material because it has high mobility and uniform surface and good transparent. The high mobility is attributed to the result of the overlap of spherical s-orbital of the heavy pest-transition metal cations. This study is demonstrated the effect of thickness channel layer from 30nm to 200nm. when the thickness was increased, turn on voltage and subthreshold swing were decreased. a-IGZO TFTs have used a shadow mask to deposit channel and source/drain(S/D). a-IGZO were deposited on SiO2 wafer by rf magnetron sputtering. using power is 150W, working pressure is 3m Torr, and an O2/Ar(2/28 SCCM) atmosphere at room temperature. The electrodes were formed with Electron-beam evaporated Ti(30nm) and Au(70nm) structure. Finally, Al(150nm) as a gate metal was evaporated. TFT devices were heat treated in a furnace at $250^{\circ}C$ in nitrogen atmosphere for an hour. The electrical properties of the TFTs were measured using a probe-station to measure I-V characteristic. TFT whose thickness was 150nm exhibits a good subthreshold swing(S) of 0.72 V/decade and high on-off ratio of 1E+08. Field effect mobility, saturation effect mobility, and threshold voltage were evaluated 7.2, 5.8, 8V respectively.

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고덕원 국보 동조아미타여래좌상의 표면에 생성한 부식생성물의 해석 (Analysis Corrosion Products Formed on the Great Buddha Image of Kotokuin Temple in Kamakura)

  • 송전사랑;청목번부;강대일
    • 보존과학연구
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    • 통권17호
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    • pp.161-182
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    • 1996
  • 최근 환경 오염의 영향으로 문화재가 급속히 손상되고 있다. 이에 일본 동경국립문화재연구소에서는 1992년부터 일본 겸창시의 고덕원, 귀원원, 학강팔번궁, 도근현의 일어기신사, 내량시의 동대사 등에 환경 오염 관측 스테이션을 설치하여 조사하고 있다. 본고는 1996년 3월 일본 동경국립문화재연구소에서 발행된 보존과학 제35호에 실린 송전사랑, 청목번부씨의 “고덕원 국보 동조아미타여래좌상의 표면에 생성한 부식생성물의 해석”논문을 저자의 호의에 의해 번역하였다.

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InGaZnO active layer 두께에 따른 thin-film transistor 전기적인 영향

  • 우창호;김영이;안철현;김동찬;공보현;배영숙;서동규;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.5-5
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    • 2009
  • Thin-film-transistors (TFTs) that can be prepared at low temperatures have attracted much attention because of the great potential for transparent and flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited due to low field-effect mobility and rapid degradation after exposing to air. Alternative approach is the use of amorphous oxide semiconductors as a channel. Amorphous oxide semiconductors (AOSs) based TFTs showed the fast technological development, because AOS films can be fabricated at room temperature and exhibit the possibility in application like flexible display, electronic paper, and larges solar cells. Among the various AOSs, a-IGZO has lots of advantages because it has high channel mobility, uniform surface roughness and good transparency. [1] The high mobility is attributed to the overlap of spherical s-orbital of the heavy post-transition metal cations. This study demonstrated the effect of the variation in channel thickness from 30nm to 200nm on the TFT device performance. When the thickness was increased, turn-on voltage and subthreshold swing was decreased. The a-IGZO channels and source/drain metals were deposited with shadow mask. The a-IGZO channel layer was deposited on $SiO_2$/p-Si substrates by RF magnetron sputtering, where RF power is 150W. And working pressure is 3m Torr, at $O_2/Ar$ (2/28 sccm) atmosphere. The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. Finally, Al (150nm) as a gate metal was thermal-evaporated. TFT devices were heat-treated in a furnace at 250 $^{\circ}C$ and nitrogen atmosphere for 1hour. The electrical properties of the TFTs were measured using a probe-station. The TFT with channel thickness of 150nm exhibits a good subthreshold swing (SS) of 0.72 V/decade and on-off ratio of $1{\times}10^8$. The field effect mobility and threshold voltage were evaluated as 7.2 and 8 V, respectively.

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