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http://dx.doi.org/10.3740/MRSK.2010.20.5.235

CO Gas Sensing Characteristics of Nanostructured ZnO Thin Films  

Hung, Nguyen Le (Department of Materials Science and Engineering, Chungnam National University)
Kim, Hyo-Jin (Department of Materials Science and Engineering, Chungnam National University)
Kim, Do-Jin (Department of Materials Science and Engineering, Chungnam National University)
Publication Information
Korean Journal of Materials Research / v.20, no.5, 2010 , pp. 235-240 More about this Journal
Abstract
We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based active layer with an embedded Pt/Ti electrode covered by the self-assembled Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of $500^{\circ}C$. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at $250^{\circ}C$ and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.
Keywords
ZnO gas sensor; nanostructured ZnO thin film; Au nanodots;
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