Measurement of Step Difference using Digital Holography of ITO Thin Film Fabricated by Sputtering Method (스퍼터링 공법으로 제작한 ITO 박막의 디지털 홀로그래피를 이용한 단차에 대한 측정)
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- Journal of the Korean Society of Manufacturing Process Engineers
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- v.20 no.9
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- pp.84-89
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- 2021