• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.59-64
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• 2022

Vibration is one of the factors that degrades the performance of equipment and measurement equipment used in high-tech industries such as semiconductors and display. The vibration isolator is classified into passive type and active type. The passive vibration isolator has the weakness of insufficient vibration isolation performance in the low frequency band, so an active vibration control system that can overcome these problems is used recently. In this paper, PID controller is used to control the active vibration isolator. Methods for setting the gain of the PID controller include the Zeigler-Nichols method, the pole placement method. These methods have the disadvantage of requiring a lot of time or knowing the system model accurately. This paper proposes the gain auto tuning method of the active vibration isolator applied with the PSO algorithm, which is an optimization algorithm that is easy to implement and has stable convergence performance with low calculations. It is expected that it will be possible to improve vibration isolation performance and reduce the time required for gain tuning by applying the proposed PSO algorithm to the active vibration isolator.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.7
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• pp.637-643
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• 2010

The paper is about the development of 6-DOF active vibration isolation systems using VCM. Firstly, formulate the vertical 3-DOF mathematical model under eccentric load, and compare the model with the case in which the center of mass is located at the centroid. And then, complete the 6-DOF mathematical model by formulating the horizontal 3-DOF mathematical model. Find main parameters by comparing the result of the frequency response test with simulation result on the model. Finally, achieve the performance of vibration isolation by applying loop shaping approach & feedforward controller.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.124-133
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• 2007

Active vibration isolation systems need the following performance specifications which are different from those of existing positioning systems: usage of seismic sensors, strict suppression of phase lead/lag in signal processing for sensors and actuators, excellent control in low frequency range and so on. In consideration of such specifications, a 3-DOF precision stage for vibration isolation is designed and modeled based on the physical characteristics. Then the major parameters such as spring constants and damping coefficients are valued by the system identification method using empirical transfer function. Finite element analysis is used as a verification and simulation tool throughout this research. This paper lays the foundation for the future research on the control of the active vibration isolation system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.185-189
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• 2009

It is very important to control the vibration transmitted from external utilities and the transient response due to the internal sources for the precision equipment, which is very sensitive to the vibration environment. The anti-vibration tables that use air springs have been widely used due to their excellent isolation performance, but the systems with high flexibility have the critical problem of large transient response by the impulsive force of the moving mass in operation of the equipment. In this paper, the hybrid vibration control system is proposed, which is combined the air springs with the semi-active MR dampers in order to satisfy the performances of isolation and vibration reduction simutaneously.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.153-156
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• 2006

The vibration isolation system is a system that attenuates the vibration transmitted from surroundings by using external energy supply like electricity and feedback and/or feedforward functions. Such a system needs stiff structure to make precise positioning without ripple within a certain bandwidth. So, a horizontal and rotary arrangement of the actuation module is suggested by using lever linkage. Modeling and kinematic formulation are completed and system identification is accomplished to tune the design variables accurately. The vibration isolation control is performed by mu-synthesis with the uncertainties in design variables. Low frequency signal enhancement circuit and saturation proof integration algorithm are devised to use seismic sensors for displacement control. This overall system shows good disturbance rejection performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.909-914
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• 2006

Vibration isolation tables are mostly required in precise measurement and manufacturing system. Among the vibration isolation tables, an air spring is the most favorable equipment because of low resonant frequency and high damping ratio. However, it is difficult to design the air spring with the required stiffness and damping ratio. Futhermore, whenever conventional active control methods are applied to the air spring, it may be difficult to obtain effective control performance due to high nonlinearity of air spring. In this paper, the optimal design of the air spring is performed using genetic algorithm to bring out low resonant frequency and high damping ratio. Also, active control of the vibration isolation table with 3-DOF model is proposed using the adaptive control method. Through experiments, optimal design is shown to be effective. And performance of the proposed control method is verified to be better than those of the passive control method and the conventional active control methods.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.309-310
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• 2008

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.219-219
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• 2007

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.292-298
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• 2009

This paper investigates the control performance of the proposed hybrid mount system for vibration isolation table. The hybrid mount system consists of an air spring as a passive device and a PZT stack actuator as an active device in series. The feasibility of the PZT stack actuator as an active actuator was examined through the simple experiments. After that, a series of numerical simulations were carried out to evaluate the control performance of the proposed hybrid mount system. The equations of motion of the table with a set of hybrid mount systems consisting of four devices are derived. The air spring is considered as a 1 spring and 1 dashpot elements, and PID control algorithm is adopted to estimate the control force. The results of the numerical simulations presents that the proposed hybrid mount system could be the promising control system for vibration isolation table.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.291-298
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• 2000

This paper describes a theoretical and experimental investigation into an active vibration isolation system in which four electromagnetic actuators are installed in parallel with each of four passive mounts placed between a piece of equipment and a vibrating base structure. Decentralised velocity feedback control is employed, where each actuator is operated independently by feeding back the absolute equipment velocity at the same location. Although one end of each actuator acts at the sensor positions on the equipment, the control system is not collocated because of the reactive forces acting on the flexible base structure, whose dynamics are strongly coupled with the mounted equipment. Isolation of low frequency vibration is considered where the equipment can be modelled as a rigid body and the mounts as lumped parameter springs and dampers. Control mechanisms are discussed, and some experimental and simulation results are reported.