Measurement of Absolute Optical Thickness Distribution of Semiconductor Wafer Using a Wavelength Tuning Interferometer (파장 주사 간섭법을 이용한 반도체 Mask Glass의 광학적 두께 정밀 측정)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2009.06a
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- pp.249-250
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- 2009