• 대한기계학회논문집B
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• 제29권4호
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• pp.435-440
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• 2005

In this paper, slurry fluid motion, abrasive particle motion, and roles of groove patterns on the pads are numerically investigated in the 2D and 3D geometries. The simulation results are analyzed in terms of experimental removal rate and WIWNU (Within Wafer Non-Uniformity) for ILD (Inter Level Dielectric) CMP process. Numerical investigations reveal that the grooves in the pad behave as uniform distributor of abrasive particles and enhance the removal rate by increasing shear stress. Higher removal rate and desirable uniformity are numerically and experimentally observed at the pad with grooves. Numerical analysis is very well matched with experimental results and helpful fur understanding polishing mechanism and local physics.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1996년도 제23회 학술대회
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• pp.1-3
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• 1996

The characteristics of fretting wear are reviewed. Fretting damage depends on slip amplitude and classified into three groups: (1) an annular damage according to Mindlin's analysis at microslip region, (2) strong adhesive deformation without loose wear particles at the intermediate region, and (3) formation of fine oxide particles at the gross slip region. The critical slip amplitude of fretting is the boundary between (2) and (3). The boundary slip amplitude depends on normal load. The wear rate increases and saturates with increasing slip amplitude. But it is constant by considering the critical amplitude. The role of oxide particles are discussed. Three different actions are noted: accelerating wear, preventing wear and insignificant effect. The oxide shows two opposing effect depends on normal load and slip amplitude. This is related to the removal rate from the interface (abrasive action) and compaction rate at the interface to form a protective layer. The effect of oxidation is significant to determine the wear and friction. The diffusion of oxygen is restricted at the small amplitude. As a result, crack formation at the boundary is a predominant damage, related to fretting fatigue damage.

• 대한기계학회논문집A
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• 제34권10호
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• pp.1499-1505
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• 2010

유연성 공구를 가진 자기연마는 고경도 소재 및 자유곡면 형상 표면의 나노메터급 가공이 가능한 강점을 지닌다. 이러한 자기연마에서 자기연마입자는 시간적, 비용적 측면에서 단순 혼합형 입자가 유리하다. 그러나 단순혼합형 입자는 가공 중 공구로부터 쉽게 이탈하게 되어 가공 시간이 증가 할수록 매우 낮은 가공 효율을 가진다. 따라서 본 연구에서는 단순 혼합형 입자에 오일을 대신하여 실리콘 겔을 매개물로 사용하는 자기연마 입자를 연구하고 그 특성을 분석하였다. 그 결과 자기력 향상과 별개로 입자간 응집력을 높여 입자의 이탈을 줄여 표면거칠기의 향상에 효과가 높음을 확인 하였다. 그리고 실험계획법을 이용하여 고경도 소재인 텅스텐 카바이드의 실리콘 겔 자기연마에서 각 공정변수가 표면거칠기의 향상에 미치는 특성을 평가하고 이를 최적화 하였다.

• 한국가구학회지
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• 제21권2호
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• pp.126-132
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• 2010

High wear resistances are obtained with an additional coating of the surface of the decor film in the same operation of impregnating with low viscosity melamine resin by liquid overlay system. The cellulosic fibers have a good adhesion to the corundum particles and keep them sufficiently homogeneous in the blend with the resin. The amount of these fibers in nearly as big as it is in a common overlay in relation to the resin. Therefore these fibers keep the resin inside during the press process and consequently very the surface of the decor print of the film. That means that the corundum particles are equally dissipated throughout the entire layer over the decor. The change of the color of the print is nearly not visible as the particles are almost equally dissipated. Looking to the flooring purposes of liquid overlay one can see that by the lesser exposure of the corundum particles on the very surface, there is no longer an abrasive surface but a feeling like a normal melamine surface.

• 수산해양기술연구
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• 제50권2호
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• pp.162-168
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• 2014

The friction and wear characteristics of the rubber matrix composites filled with nano sized silica particles were investigated at ambient temperature by pin-on-disc friction test. The volume fraction of silica particles was 19%. The cumulative wear volume and wear rate of these materials on counterpart roughness were determined experimentally. The major failure mechanisms were lapping layers, deformation of matrix, ploughing, debonding of particles, fracture of particles and microcracking by scanning electric microscopy photograph of the tested surface. The cumulative wear volume showed a tendency to increase with increase of sliding distance. The wear rate of these composites tested indicated low value as increasing the sliding distance.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1998년도 제27회 춘계학술대회
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• pp.124-130
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• 1998

A mathematical model describing gear pump flow degradation in the presense of abrasive particles is presented. The model considers the operating parameters as Sommerfeld number, so that contamination sensitivity test results could be conversed to field application to predict contamination service life. A method to estimate the volumetric efficiency and the contamination level of a pump is proposed by measuring the temperature differences in the fluid. Test results show the validity of the theoretical establishments.

• 한국세라믹학회지
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• 제44권2호
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• pp.98-102
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• 2007

The stability of slurry and removal rate during recycling of colloidal silica slurry was evaluated in silicon wafer polishing. The particle size distribution, pH, and zeta potential were measured to investigate the stability of colloidal silica. Large particles appeared as recycling time increased while average size of slurry did not change. Large particles were identified by EDS(energy dispersive spectrometer) as foreign substances from pad or abraded silicon flakes during polishing. As the recycling time increased, pH of slurry decreased and removal rate of silicon reduced but zeta potential decreased inversely. Hence, it could be mentioned that decrease of removal rate is related to consumption of $OH^-$ ions during recycling. Attention should be given to the control of pH of slurry during polishing.

• Tribology and Lubricants
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• 제33권5호
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• pp.220-227
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• 2017

In this work, carbon nanotube and nano-size alumina particle are exploited as additive for lubrication experiment. We used pin-on-disk type tribometer to investigate the tribological characteristics of lubricants with respect to additives and rotational speed. We conducted more than 15 trials of tribotests for two hours for each specimen to obtain stable and accurate frictional force and to create measurable wear track on the substrate. We conducted tests at the boundary/mixed lubrication regime to evaluate the influence of additives on the tribological characteristics. We found that the friction coefficient decreased as the rotational speed increased and as additives were added. In particular, the reduction of friction by adding additives was more significant at low rotational speed than at high rotational speed. We speculate that the additives helped to separate and protect the two contacting surfaces at low speed, while the influence of additives was not significant at high speed since sufficiently thick lubricant film was formed. The wear of the substrate was also reduced by adding additives to the lubricant. However, in contrast to friction, the amount of wear at high rotational speed was less when alumina particles were added to the lubricant than the amount of wear at low speed. We speculate that the increased wear at low rotational speed is as a result of the intermittent abrasive wear caused by alumina particles with uneven shape, while the reduced wear at high speed is as a result of sufficient film thickness which prevented the abrasive wear.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• Tribology and Lubricants
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• 제31권6호
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• pp.281-286
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• 2015

Automotive transmission systems are assembled with a large number of gears and shafts, and rolling bearings are used to ensure their smooth operation. Gear oil in the gear box contains solid particles such as wear debris from contacting gears and metallic chips. This particle-enriched lubricating oil can cause premature failure of the rolling bearings. Research aimed at improving the service life of these rolling bearings has been confined mainly to design and lubrication of the inner/outer rings and the rolling elements. In this paper, we redesigned the shape of the cage pocket of a deep groove ball bearing to reduce the premature failure due to particle contamination. Test bearings are assembled with this new cage design containing a hole punched in the cage pocket. Endurance tests are carried out using the contaminated lubricating oil with miracle grid as hard particle. The duration and damaged bearing component shapes are compared for two different cages. The B₁₀ life of bearing with new cage is increased by about 66% compared to the conventional cage. This is because the hard particles can be easily discharged through the pocket hole without staying for a long time in the lubrication regions. This greatly decreases abrasive wear and dents on the highly stressed ball bearing surfaces. Therefore, the cage design of this study, containing a pocket hole, can significantly delay the premature failure of rolling bearings and improve the endurance life.