• Particle and aerosol research
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• v.12 no.4
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• pp.145-150
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• 2016

During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

• Analytical Science and Technology
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• v.32 no.5
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• pp.173-184
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• 2019

As the size of semiconductors becomes smaller, it is necessary to perform high precision polishing of nanoscale. Ceria, which is generally used as an abrasive, is widely used because of its uniform quality, but its stability is not high because it has a high molecular weight and causes agglomeration and rapid precipitation. Such agglomeration and precipitation causes scratches in the polishing process. Therefore, it is important to accurately analyze the size distribution of ceria particles. In this study, a study was conducted to select dispersants useful for preventing coagulation and sedimentation of ceria. First, a dispersant was synthesized and a ceria slurry was prepared. The defoamer selection experiment was performed in order to remove the air bubbles which may occur in the production of ceria slurry. Dynamic light scattering (DLS) and asymmetrical flow field-flow fractionation (AsFlFFF) were used to determine the size distribution of ceria particles in the slurry. AsFlFFF is a technique for separating nanoparticles based on sequential elution of samples as in chromatography, and is a useful technique for determining the particle size distribution of nanoparticle samples. AsFlFFF was able to confirm the presence of a little quantities of large particles in the vicinity of 300 nm, which DLS can not detect, besides the main distribution in the range of 60-80 nm. AsFlFFF showed better accuracy and precision than DLS for particle size analysis of a little quantities of large particles such as ceria slurry treated in this study.

• Journal of Powder Materials
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• v.16 no.6
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• pp.416-423
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• 2009

Diamond/SiC composites are appropriate candidate materials for heat conduction as well as high temperature abrasive materials because they do not form liquid phase at high temperature. Diamond/SiC composite consists of diamond particles embedded in a SiC binding matrix. SiC is a hard material with strong covalent bonds having similar structure and thermal expansion with diamond. Interfacial reaction plays an important role in diamond/SiC composites. Diamond/SiC composites were fabricated by high temperature and high pressure (HPHT) sintering with different diamond content, single diamond particle size and bi-modal diamond particle size, and also the effects of composition of diamond and silicon on microstructure, mechanical properties and thermal properties of diamond/SiC composite were investigated. The critical factors influencing the dynamics of reaction between diamond and silicon, such as graphitization process and phase composition, were characterized. Key factor to enhance mechanical and thermal properties of diamond/SiC composites is to keep strong interfacial bonding at diamond/SiC composites and homogeneous dispersion of diamond particles in SiC matrix.

• Tribology and Lubricants
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• v.30 no.5
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• pp.291-294
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• 2014

Multiple additives can help improve the performance of generally used lubricants. These additives include MoS2, cadmium, chloride, indium, sulfide, and phosphide, which are harmful to both humans and the environment. Thus, researchers in this industry have been trying to reduce the use of these additives by finding alternatives. Nanodiamonds are one of these candidates. Nanodiamond particles are very hard, chemically stable, and highly heat-conductive. This research involved uniformly dispersing nanodiamond particles in marine engine oils via a matrix synthesis method at various concentrations (0, 0.1, 0.3, 0.5, and 1.0 wt). Friction and wear tests involved constant loads on ball-on-disk specimens, where the ball was AISI 51200 steel, the disk was AISI 1020 steel, and the sliding speed was 0.217 m/s. The lowest wear occurred at a suitable concentration of nanodiamonds (0.3 wt). However, excessive amounts of nanodiamonds caused them to act as abrasive debris because of their hardness, which increased the wear amount. The friction coefficient decreased as the nanodiamond concentration increased because their octagonal, almost spherical shape caused them to act as rolling contact elements between two surfaces.

• Tribology and Lubricants
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• v.25 no.4
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• pp.225-230
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• 2009

Seals are very useful machine components in protection of leakage of lubricant or working fluid, and incoming of debris from outside. Various elastomer are widely used as sealing materials and the shaft surfaces are generally coated with high hardness material after heat treatment. It is generally known that the foreign debris and wear particles get stuck into sealing surface, the steel shaft surface can be damaged and worn by mainly abrasive wear. In this paper, using MARC, contact analysis are conducted to show the hard coated steel shaft surface can be fatigue failed by very small elastic particle intervened between seal and steel surface. Variations of contact and von-Mises stress distributions and contact half-widths with interference and coating thickness are presented. The maximum von-Mises stress occurs always in the coating layer or between coated layer/substrate interface. Therefore the coated sealing surface can be fatigued and then failed by very small particles. The results can be used in design of sealing surface and further studies are required.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.167-172
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• 2006

Submicron colloidal silica coated with ceria were prepared by mixing of silica and nano ceria particles and modified by hydrothermal reaction. The polishing efficiency of the ceria coated silica slurry was tested over oxide film on silicon wafer. By changing the polishing pressure in the range of $140{\sim}420g/cm^2$ with the ceria coated silica slurries in $100{\sim}300nm$, rates, WIWNU and friction force were measured. The removal rate was in the order of 200, 100, and 300 nm size silica coated with ceria. It was known that the smaller particle size gives the higher removal rate with higher contact area in Cu slurry. In the case of oxide film, the indentation volume as well as contact area gives effect on the removal rate depending on the size of abrasives. The indentation volume increase with the size of abrasive particles, which results to higher removal rate. The highest removal rate in 200 nm silica core coated with ceria is discussed as proper combination of indentation and contact area effect.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.06a
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• pp.47-52
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• 1999

In recent years, the micro-tribological behavior of silicon has been the topic of much interest. peformance of thin film under light load is important for potential applications in MEMS. In this work under light load and various humidity, the tribological behavior of undulated surface with various width and shape was Investigated. The results show that undulated surface of linear type had good tribological properties abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction and wear was not important if exist undulation. Finally, undulations on HDD were found to be effective in trapping wear particles.

• Journal of Industrial Technology
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• v.22 no.A
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• pp.37-42
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• 2002

The shearing process for the sheet metal is normally used in the precision elements such as a frame of TFT-LCD or lead frame of IC chips. In these precision elements, the burr formation prevents the system assembly and needs the additional burr removing process. In this study, we have developed the novel ultrasonic deburring system to remove the small burr came from shearing of the sheet metal effectively. The deburring tool is driven by the stepping motor and alumina and SiC particles are used as abrasives. Ultrasonic power and the flowing resistance of the abrasives make ti possible to abrasive the burr.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.162-168
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• 2002

This paper shows the failure(wear) phenomena of differential bearings in the transaxle of passenger cars and investigate their characteristics. It was found that the wear mechanism was mild abrasive wear caused by the presence of particles in the gear box. The sides of the outer raceway was more neared than center of it, so it is showed as if the crowning of outer raceway are increased. With close examination of the failed bearing, various countermeasures could be suggested.

• Journal of Mechanical Science and Technology
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• v.15 no.6
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• pp.727-734
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• 2001

The Tribological evaluation of commercial dental composite resins containing prepolymerized particle fillers was investigated. Composite resins such as Metafil, Silux Plus, Heliomolar, and Palfique Estelite were selected as specimens. In the wear tests, a ball-on-flat wear test method was used. The friction coefficient of Metafil was quite high. The wear resistance of Silux Plus and Palfique Estelite was better than that of Metafil and Heliomolar under the same experimental conditions. The main wear mechanism of the composite resins containing prepolymerized particle fillers was abrasive wear caused by the brittle fracture of the prepolymerized particles and the debonding of the filler and the matrix.