Effect of Particle Size of Ceria Coated Silica and Polishing Pressure on Chemical Mechanical Polishing of Oxide Film |
Kim, Hwan-Chul
(Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.)
Lim, Hyung-Mi (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.) Kim, Dae-Sung (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.) Lee, Seung-Ho (Composite Materials Center, Korea Institute of Ceramic Eng. & Tech.) |
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