• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Korean Journal of Materials Research
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• v.19 no.2
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• pp.90-94
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• 2009

The development of low-k materials is essential for modern semiconductor processes to reduce the cross-talk, signal delay and capacitance between multiple layers. The effect of the $CH_4$ concentration on the formation of SiOC(-H) films and their dielectric characteristics were investigated. SiOC(-H) thin films were deposited on Si(100)/$SiO_2$/Ti/Pt substrates by plasma-enhanced chemical vapor deposition (PECVD) with $SiH_4$, $CO_2$ and $CH_4$ gas mixtures. After the deposition, the SiOC(-H) thin films were annealed in an Ar atmosphere using rapid thermal annealing (RTA) for 30min. The electrical properties of the SiOC(-H) films were then measured using an impedance analyzer. The dielectric constant decreased as the $CH_4$ concentration of low-k SiOC(-H) thin film increased. The decrease in the dielectric constant was explained in terms of the decrease of the ionic polarization due to the increase of the relative carbon content. The spectrum via Fourier transform infrared (FT-IR) spectroscopy showed a variety of bonding configurations, including Si-O-Si, H-Si-O, Si-$(CH_3)_2$, Si-$CH_3$ and $CH_x$ in the absorbance mode over the range from 650 to $4000\;cm^{-1}$. The results showed that dielectric properties with different $CH_4$ concentrations are closely related to the (Si-$CH_3$)/[(Si-$CH_3$)+(Si-O)] ratio.

• Journal of the Korean Society for Nondestructive Testing
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• v.23 no.5
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• pp.429-438
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• 2003

The effects of fiber orientation on acoustic emission(AE) characteristics have been studied for the unidirectional and satin-weave, continuous glass-fiber reinforced plastic(UD-GFRP and SW-GFRP) tensile specimens. Reflection and transmission optical microscopy was used for investigation of the damage zone of specimens. AE signals were classified as different types by using short time fourier transform(STFT) : AE signals with high intensity and high frequency band were due to fiber fracture, while weak AE signals with low frequency band were due to matrix and interfacial cracking. The feature in the rate of hit-events having high amplitudes showed a process of fiber breakages, which expressed the characteristic fracture processes of individual fiber-reinforced plastics with different fiber orientations and with different notching directions. As a consequence, the fracture behavior of the continuous GFRP could be monitored as nondestructive evaluation(NDE) through the AE technique.

• The Bulletin of The Korean Astronomical Society
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• v.41 no.2
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• pp.67.3-68
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• 2016

An X1.6 flare occurred in AR 12192 on 2014 October 22 around 14:06 UT and was observed by Hinode, IRIS, SDO and RHESSI. We analyze a bright kernel which produces a white light flare (WLF) with continuum enhancement and a hard X-ray (HXR) peak. Taking advantage of the spectroscopic observations of IRIS and EIS, we measure the temporal variation of the plasma properties in the bright kernel in the chromosphere and corona. We found that explosive evaporation was observed when the WLF occurred, even though the intensity enhancement in hotter lines is quite weak. The temporal correlation of the WLF, HXR peak, and evaporation flows indicates that the WLF was produced by accelerated electrons. To understand the white light emission processes, we calculated the deposited energy flux from the non-thermal electrons observed by RHESSI and compared it to the dissipated energy estimated from the chromospheric lines (Mg II triplet) observed by IRIS. The deposited energy flux from the non-thermal electrons is about $3.1{\times}10^{10}erg\;cm^{-2}s^{-1}$ when we assume a cut-off energy of 20 keV. The estimated energy flux from the temperature changes in the chromosphere measured from the Mg II subordinate line is about $4.6-6.7{\times}10^9erg\;cm^{-2}s^{-1}$, 15 - 22 % of the deposited energy. By comparison of these estimated energy fluxes we conclude that the continuum enhancement was directly produced by the non-thermal electrons.

• Journal of Korea Game Society
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• v.9 no.5
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• pp.105-115
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• 2009

This article proposes a design and implementation methodology of a gesture-based interface for augmented reality games. The topic of gesture-based augmented reality games is a promising area in the immersive future games using human body motions. However, due to the instability of the current motion recognition technologies, most previous development processes have introduced many ad hoc methods to handle the shortcomings and, hence, the game architectures have become highly irregular and inefficient This article proposes an efficient development methodology for gesture-based augmented reality games through prototyping a table tennis game with a gesture interface. We also verify the applicability of the prototyping mechanism by implementing and demonstrating the augmented reality table tennis game. In the experiments, the implemented prototype has stably tracked real rackets to allow fast movements and interactions without delay.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.787-790
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• 2003

A rf triode magnetron sputtering system is designed and installed its construction in vacuum chamber. In order to calibrate the rf triode magnetron sputtering for thin films deposition processes, the effects of different glow discharge conditions were investigated in terms of the deposition rate measurements. The basic parameters for calibrating experiment in this sputtering system are rf power input, gas pressure, plasma current, and target-to-substrate distance. Because a knowledge of the deposition rate is necessary to control film thickness and to evaluate optimal conditions which are an important consideration in preparing better thin films, the deposition rates of copper as a testing material under the various sputtering conditions are investigated. Furthermore, a triode sputtering system designed in our team is simulated by the SIMION program. As a result, it is sure that the simulation of electron trajectories in the sputtering system is confined directly above the target surface by the force of $E{\times}B$ field. Finally, some teats with the above 4 different sputtering conditions demonstrate that the deposition rate of rf triode magnetron sputtering is relatively higher than that of the conventional sputtering system. This means that the higher deposition rate is probably caused by a high ion density in the triode and magnetron system. The erosion area of target surface bombarded by Ar ion is sputtered widely on the whole target except on both magnet sides. Therefore, the designed rf triode magnetron sputtering is a powerful deposition system.

• Journal of the Korean Society of Costume
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• v.51 no.1
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• pp.21-32
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• 2001

Gauze is very light and thin. Their warps are entangled and their structure is loose. It is natural that they are easier to decay than other silk fabrics through physiochemical processes over a long period of time. Nonetheless quite many remains of Gauze fabrics can be found in China or Japan as well as in Korea. Various Gauze was used in costumes since the era of the Three Kingdoms and their weaving techniques, such as using gold threads with silk-fabrics, was developed in Koryo dynasty era, which made it possible to create more magnificent gauze fabrics in Korea. Relatively a lot of Gauze fabrics are remained in Korea. Based on these corroborative relics, this thesis analyzes the characteristics of gauze fabrics possesed in Korea and categorizes the gauze fabrics described in the Decrees on Costume Restraint of the King Hungduk. This also compares them with the present gauze in other countries. The types of gauze fabrics are generally divided into desined gauze, and non-designed gauze, the one without pattern. There ar a lot of desined gauze, such as dyeing gauze, brocade gauze, embroidery with gauze ground, patterned gauze with gauze ground etc. which were found in Korea and also in China and Japan. Non-designed gauze is divided into 2-end complex gauze, 3-end complex gauze, 4-end complex gauze, etc depending on the number of crossing warps. All of the non-designed gauze of Koryo dynasty found in Korea was 4-end complex gauze fabrics. These non-designed gauze fabrics were also found in Japan and China.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.183-183
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• 2012

In the era of 45 nm or beyond technology, conventional etch mask using photoresist showed its limitation of etch mask pattern collapse as well as pattern erosion, thus hard mask in etching became necessary for precise control of etch pattern geometry. Currently available hard mask materials are amorphous carbon and polymetric materials spin-on containing carbon or silicon. Amorphous carbon layer (ACL) deposited by PECVD for etch hard mask has appeared in manufacturing, but spin-on carbon (SOC) was also suggested to alleviate concerns of particle, throughput, and cost of ownership (COO) [1]. SOC provides some benefits of reduced process steps, but it also faced with wiggling on a sidewall profile. Diamond like carbon (DLC) was also evaluated for substituting ACL, but etching selectivity of ACL was better than DLC although DLC has superior optical property [2]. Developing a novel material for pattern hard mask is very important in material research, but it is also worthwhile eliminating a potential issue to continuously develop currently existing technology. In this paper, we investigated in-situ dry-cleaning (ISD) monitoring of ACL coated process chamber. End time detection of chamber cleaning not only provides a confidence that the process chamber is being cleaned, but also contributes to minimize wait time waste (WOW). Employing Challenger 300ST, a 300mm ACL PECVD manufactured by TES, a series of experimental chamber cleaning runs was performed after several deposition processes in the deposited film thickness of $2000{\AA}$ and $5000{\AA}$. Ar Actinometry and principle component analysis (PCA) were applied to derive integrated and intuitive trace signal, and the result showed that previously operated cleaning run time can be reduced by more than 20% by employing real-time monitoring in ISD process.

• Bulletin of the Korean Chemical Society
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• v.24 no.3
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• pp.318-324
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• 2003

A time-resolved probe beam deflection (PBD) technique was employed to study the energy relaxation dynamics of photofragments produced by photodissociation of $CH_3I$ at 266 nm. Under 500 torr argon environment, experimental PBD transients revealed two energy relaxation processes; a fast relaxation process occurring within an acoustic transit time (less than 0.2 ㎲ in this study) and a slow relaxation process with the relaxation time in several tens of ㎲. The fast energy relaxation of which signal intensity depended linearly on the excitation laser power was assigned to translational-to-translational energy transfer from the photofragments to the medium. As for the slow process, the signal intensity depended on square of the excitation laser power, and the relaxation time decreased as the photofragment concentration increased. Based on experimental findings and reaction rate constants reported previously, the slow process was assigned to methyl radical recombination reaction. In order to determine the rate constant for methyl radical recombination reaction, a theoretical equation of the PBD transient for a radical recombination reaction was derived and used to fit the experimental results. By comparing the experimental PBD curves with the calculated ones, the rate constant for methyl recombination is determined to be $3.3({\pm}1.0)\;{\times}\;10^6\;s^{-1}torr^{-1}$ at 295 ± 2 K in 500 torr Ar.

• Proceedings of the KOSOMBE Conference
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• v.1993 no.11
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• pp.40-43
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• 1993

Electronic fetal monitoring system is an easier ar d usual method in various prenatal and labor period fetal surveilence methods currently in use. But there haven't been enough cases of using the central monitoring system despite the fact that the bedside fetal monitoring system have already been widely in use in Korea as an essential medical equipment item. We have developed more efficient central fetal monitoring system based on the personal computer with the visual maternal monotoring device using infrared camera which processes the signals from existing bedside fetal monitoring systems such as H/P's 8040 series. And we have performed the clinical application on 41 pregnant women and the results were satisfactory. In conclusion, more efficient and familial fetal monitoring is possible with our PC based central fetal monitoring system which provides the medical personnel with the view of a selected pregnant woman on the same screen where the electronic waveforms and data are displayed.