• 제목/요약/키워드: APS (Atmospheric plasma spray)

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대기압 플라즈마 용사 공정에서의 기판 코팅 온도 영향 연구 (Measurement of the Coating Temperature Evolution during Atmospheric Plasma Spraying)

  • 이기영;오현철
    • 공업화학
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    • 제31권6호
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    • pp.624-629
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    • 2020
  • 대기 플라즈마 용사(APS)법을 이용한 지르코니아 열차폐 코팅의 보다 효과적인 온도 제어를 위해서는 기판 온도에 영향을 미치는 매개 변수에 대한 이해가 필수적이며 실험 데이터를 기반으로 한 더 많은 결과가 필요하다. 본 연구는 APS (atmospheric plasma sprayed) 공정에서 기판 온도 제어에 관한 연구를 목적으로 한다. 특히, APS 기판 코팅과정에서 기판 표면 온도 제어를 위한 공랭 시스템, 플라즈마 가스 흐름, 분말 공급 속도, 로봇 속도 및 기판소재 영향 등을 보고하고 있다. 이러한 체계적인 접근은 APS 방식의 표면 코딩에서 온도를 제어하는데 도움이 되며, 이는 코팅 품질의 향상으로 이어질 것이다.

Atmospheric plasma spray 공정으로 제조된 Y2O3 코팅층의 미세조직 및 기계적 특성에 미치는 분사 각도의 영향 (Effect of Spray Angle the on Microstructure and Mechanical Properties of Y2O3 Coating Layer Manufactured by Atmospheric Plasma Spray Process)

  • 황유진;김경욱;이호영;권식철;이기안
    • 한국분말재료학회지
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    • 제28권4호
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    • pp.310-316
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    • 2021
  • The effects of different spray angles (90°, 85°, 80°) on the microstructure and mechanical properties of a Y2O3 coating layer prepared using the atmospheric plasma spray (APS) process were studied. The powders employed in this study had a spherical shape and included a cubic Y2O3 phase. The APS coating layer exhibited the same phase as the powders. Thickness values of the coating layers were 90°: 203.7 ± 8.5 ㎛, 85°: 196.4 ± 9.6 ㎛, and 80°: 208.8 ± 10.2 ㎛, and it was confirmed that the effect of the spray angle on the thickness was insignificant. The porosities were measured as 90°: 3.9 ± 0.85%, 85°: 11.4 ± 2.3%, and 80°: 12.7 ± 0.5%, and the surface roughness values were 90°: 5.9 ± 0.3 ㎛, 85°: 8.5 ± 1.1 ㎛, and 80°: 8.5 ± 0.4 ㎛. As the spray angle decreased, the porosity increased, but the surface roughness did not show a significant difference. Vickers hardness measurements revealed values of 90°: 369.2 ± 22.3, 85°: 315.8 ± 31.4, and 80°: 267.1 ± 45.1 HV. It was found that under the condition of a 90° angle with the lowest porosity exhibited the best hardness value. Based on the aforementioned results, an improved method for the APS Y2O3 coating layer was also discussed.

Effect of the Raw Material and Coating Process Conditions on the Densification of 8 wt% Y2O3-ZrO2 Thermal Barrier Coating by Atmospheric Plasma Spray

  • Oh, Yoon-Suk;Kim, Seong-Won;Lee, Sung-Min;Kim, Hyung-Tae;Kim, Min-Sik;Moon, Heung-Soo
    • 한국세라믹학회지
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    • 제53권6호
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    • pp.628-634
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    • 2016
  • The 8 wt% yttria($Y_2O_3$) stabilized zirconia ($ZrO_2$), 8YSZ, a typical thermal barrier coating (TBC) for turbine systems, was fabricated under different starting powder conditions and coating parameters by atmospheric plasma spray (APS) coating process. Four different starting powders were prepared by conventional spray dry method with different additive and process parameter conditions. As a result, large- and small-size spherical-type particles and Donut-type particles were obtained. Dense structure of 8YSZ coating was produced when small size spherical-type or Donut-type particles were used. On the other hand, 8YSZ coating with a porous structure was formed from large-size spherical-type particles. Furthermore, a segmented coating structure with vertical cracks was observed after post heat treatment on the surface of dense structured coating by argon plasma flame at an appropriate gun distance and power condition.

Atmospheric Plasma Spray코팅을 이용한 Yttrium계 소재의 내플라즈마성 및 세정 공정에 관한 연구 (A Study on Plasma Corrosion Resistance and Cleaning Process of Yttrium-based Materials using Atmospheric Plasma Spray Coating)

  • 권혁성;김민중;소종호;신재수;정진욱;맹선정;윤주영
    • 반도체디스플레이기술학회지
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    • 제21권3호
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    • pp.74-79
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    • 2022
  • In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y2O3 and Y3Al5O12 (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF4, O2, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H2SO4(3):H2O2(1)) to remove the defect-causing surface fluorinated film. APS-Y2O3 and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

Manufacture of MoO3 Coating Layer Using Thermal Spray Process and Analysis of Microstructure and Properties

  • Yu-Jin Hwang;Kyu-Sik Kim;Jae-Sung Park;Kee-Ahn Lee
    • Archives of Metallurgy and Materials
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    • 제67권4호
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    • pp.1535-1538
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    • 2022
  • MoO3 thick film was manufactured by using a thermal spray process (Atmospheric Plasma Spray, or APS) and its microstructure, phase composition and properties of the coating layer were investigated. Initial powder feedstock was composed of an orthorhombic α-MoO3 phase, and the average powder particle size was 6.7 ㎛. As a result of the APS coating process, a MoO3 coating layer with a thickness of about 90 ㎛ was obtained. Phase transformation occurred during the process, and the coating layer consisted of not only α-MoO3 but also β-MoO3, MoO2. Phase transformation could be due to the rapid cooling that occurred during the process. The properties of the coating layer were evaluated using a nano indentation test. Hardness and reduced modulus were obtained as 0.47 GPa and 1.4 GPa, respectively. Based on the above results, the possibility of manufacturing a MoO3 thick coating layer using thermal spray is presented.

대기 플라즈마 용사공정을 이용한 Fe계 벌크 비정질 금속 코팅의 초기 분말의 화학조성과 크기에 대한 미세 조직 및 마모 특성 (Microstructure and Tribological Properties along with Chemical Composition and Size of Initial Powder in Fe-based BMG Coating through APS)

  • 김정환;윤상훈;나현택;이창희
    • 한국표면공학회지
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    • 제41권5호
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    • pp.220-225
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    • 2008
  • In this study, two kinds of Fe-based bulk metallic glasses (BMG) powder were built-up through atmospheric plasma spray (APS) technique. The microstructure of two coatings was analyzed through X-ray diffraction, scanning electron microscopy and transmission electron microscopy. Crystallization and oxidation in coatings were affected by chemical composition and initial powder size. Then, both of them influenced the tribological property.

나노구조 TiO$_2$ 용사코팅의 미세조직 제어 공정기술 개발과 광촉매 특성평가 - Part I: TiO$_2$코팅 - (Photocatalytic Property of Nano-Structured TiO$_2$ Thermal Splayed Coating - Part I: TiO$_2$ Coating -)

  • 이창훈;최한신;이창희;김형준;신동우
    • Journal of Welding and Joining
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    • 제21권4호
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    • pp.39-45
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    • 2003
  • Nano-TiO$_2$ photocatalytic coatings were deposited on the stainless steel 304(50$\times$70$\times$3mm) by the APS(Atmospheric Plasma Spraying). Photocatlytic reaction was tested in MB(methylene blue) aqueous solution. For applying nano-TiO$_2$ powders by thermal spray, the starting nano-TiO$_2$ powder with 100% anatase crystalline was agglomerated by spray drying. Plasma second gas(H$_2$) flow rate and spraying distance were used as principal process parameters which are known to control heat enthalpy(heat input). The relationship between process parameters and the characteristics of microstructure such as the anatase phase fraction and grain size of the TiO$_2$ coatings were investigated. The photo-decomposition efficiency of TiO$_2$ coatings was evaluated by the kinetics of MB aqueous solution decomposition. It was found that the TiO$_2$ coating with a lower heat input condition had a higher anatase fraction, smaller anatase grain size and a better photo-decomposition efficiency.

스프레이 코팅 기술 (Spray Coating Technology)

  • 이창희
    • 한국분무공학회지
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    • 제13권4호
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    • pp.193-199
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    • 2008
  • Spray coating is a versatile surface modification technology in which coating is built-up based on the successive deposition of micron-scaled particles. Depending on the coating materials, the coatings can meet the required mechanical properties, corrosion resistance, and other properties of base materials. Spraying processes are mainly classified into thermal and kinetic spraying according to their bonding mechanism and deposition characteristics. Specifically, thermal spraying process can be further classified into many categories based on the design and mechanism of the process, such as frame spraying, arc spraying, atmospheric plasma spraying (APS), and high velocity oxygen-fuel (HVOF) spraying, etc. Kinetic spraying or cold gas dynamic spraying is a newly emerging coating technique which is low-temperature and high-pressure coating process. In this paper, overall view of thermal and kinetic spray coating technologies is discussed in terms of fundamentals and industrial applications. The technological characteristics and bonding mechanism of each process are introduced. Deposition behavior and properties of technologically remarkable materials are reviewed. Furthermore, industrial applications of spray coating technology and its potentials are prospected.

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Study on High-Temperature Oxidation Behaviors of Plasma-Sprayed TiB2-Co Composite Coatings

  • Fadavi, Milad;Baboukani, Amin Rabiei;Edris, Hossein;Salehi, Mahdi
    • 한국세라믹학회지
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    • 제55권2호
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    • pp.178-184
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    • 2018
  • In the present study, $TiB_2-Co$ composite coatings were thermally sprayed onto the surface of a 304 stainless steel substrate using an atmospheric plasma spray (APS). The phase analysis of the powders and plasma-sprayed coatings was performed using X-ray diffractometry analysis. The microstructures of the coatings were studied by a scanning electron microscope (SEM). The average particle size and flowability of the feedstocks were also measured. Both $TiB_2-32Co$ and $TiB_2-45Co$ (wt.%) coatings possessed typical dense lamellar structures and high-quality adhesion to the substrate. The oxidation behaviors of the coatings were studied at $900^{\circ}C$ in an atmospheric environment. In addition, the cross-sectional images of the oxidized coatings were analyzed by SEM. A thin and well-adhered layer was formed on the surface of both $TiB_2-Co$ coatings, confirming satisfactory high-temperature oxidation resistance. The kinetic curves corresponding to the isothermal oxidation of the coatings illustrated a short transient stage from rapid to slow oxidation during the early portion of the oxidation experiment.

세정공정에 따른 Y2O3 코팅부품의 내플라즈마성 영향 (Influence of Plasma Corrosion Resistance of Y2O3 Coated Parts by Cleaning Process)

  • 김민중;신재수;윤주영
    • 한국표면공학회지
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    • 제54권6호
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    • pp.365-370
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    • 2021
  • In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y2O3 coated parts used for semiconductor and display plasma process equipment. CF4, O2, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y2O3 was exposed to CF4 plasma, the surface changed from Y2O3 to YF3 and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF3 layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.