• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 한국정밀공학회 2012년도 추계학술대회 논문집
• /
• pp.325-326
• /
• 2012

• Journal of the KSME
• /
• 제44권12호
• /
• pp.51-55
• /
• 2004

이 글에서는 AFM을 이용한 미소 구조물의 기계적 물성 측정 방법 중 기계적 물성 측정을 위한 대칭형 AFM 캔틸레버의 고안, 제작, 보정 및 측정 방법을 중심을 기술한다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 한국정밀공학회 2007년도 춘계학술대회 논문집
• /
• pp.651-652
• /
• 2007

• Transactions of the Korean Society of Mechanical Engineers A
• /
• 제39권5호
• /
• pp.461-466
• /
• 2015

Atomic force microscopy (AFM) is powerful tool for determining properties of samples based on interactions between the sample surface and an approaching probe tip. In this study, we modeled the interactions between the sample and the tip of the AFM microcantilever as a single nonlinear spring with an equivalent stiffness element and simulated the dynamic behaviors of the AFM microcantilevers using the finite element method (FEM) and ANSYS software. With the simulation results, we analyzed the complex dynamic responses of the AFM cantilever using proper orthogonal decomposition (POD). In addition, we compared the simulation and experimental results using the same method. Consequently, we suggest an effective method to express the interaction between the tip and sample, and we confirm that the influence of the higher order model due to the interaction between the tip and sample is increased.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• 제24권4호
• /
• pp.955-962
• /
• 2000

Scanning Probe Microscope (SPM) such as Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AFM) was shown to be the powerful tool for nano-scale characterization of a fracture surface . AFM was used to study cross sectional profiles and dimensions of fatigue striations in 2017-T351 aluminum alloy. Their widths (SW) and heights (SH) were measured from the cross sectional profiles of three-dimension AFM images. The following results that will be helpful to understand the fatigue crack growth mechanism were obtained. (1) Coincidence of the crack growth rate with the striation width was found down to the growth rate of 10-5 mm/cycle. (2) The relation of SH=0.085(SW)1.2 was obtained. (3) The ratio of the striation height to its width SH/SW did not depend on the stress intensity factor range K and the stress ratio R. (4) Not only the SW but also the SH changed linearly with the crack tip opening displacement (CTOD) when plotted in log-log scale. From these results, the applicability of the AFM to nano-fractography is discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1438-1441
• /
• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
• /
• 제14권2호
• /
• pp.167-179
• /
• 1996

The AFM (Ambiguity Function Method) is insensitive to the integer ambiguity and the presence of cycle slips in the carrier phase observations. But there are two significant problems with using the AM to determine GPS base-lines. The first problem is the long computation time required to determine the optim position. The second problem is that there may be sever maxima points that the AFM gorithm must discriminate between within the search volume in order to identify the optim position. A new gorithm which enables the AFM to be applied to the OTF (On-the-fly) environments by significantly shortening the computation time is proposed in this paper. In addition to it, sever statistic procedures which verify whether the optim position is true or not are proposed.

• International Journal of Precision Engineering and Manufacturing
• /
• 제5권3호
• /
• pp.19-25
• /
• 2004

Pitch measurements of 150 nm one-dimensional grating standards were carried out using a contact mode atomic force microscopy with a high resolution three-axis laser interferometer. This measurement technique was named as the 'nano-metrological AFM'. In the nano-metrological AFM, three laser interferometers were aligned precisely to the end of an AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$ stabilized He-Ne laser at a wavelength of 633 nm. Therefore, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM could be used to directly measure the length standard. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement (GUM). The primary source of uncertainty in the pitch-measurements was derived from the repeatability of the pitch-measurements, and its value was about 0.186 nm. The average pitch value was 146.65 nm and the combined standard uncertainty was less than 0.262 nm. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
• /
• pp.152-152
• /
• 2004

카본나노튜브(Carbon Nanotube)는 다른 물질과 구별되는 날카로움(Sharpness), 고세장비(High Aspect Ratio), 높은 기계적 강성(Stiffness), 고탄성(high Elasticity), 그리고 반도체(semi-conducting)와 도체(Metallic) 성질 때문에, 카본나노튜브는 많은 연구에 적용되고 있으며, 카본나노튜브가 부착된 AFM(Atomic Force Microscope) 팁을 이용한 AFM 측정은 CNT 응용에 있어서 매우 큰 효과를 내는 응용분야 중 하나이다. AEM 팁에 카본나노튜브를 붙이는 이전 연구는 대부분 화학증착법(Chemical Vapor Deposition)에 의해 이루어 졌으며, 매우 효과적인 방법이지만 고가의 장비와 고온의 챔버내에서 이루어진다는 문제점을 가지고 있다.(중략)

• 한국방재학회:학술대회논문집
• /
• 한국방재학회 2010년도 정기 학술발표대회
• /
• pp.102.1-102.1
• /
• 2010

대체수자원 중 막여과 기술에 대한 관심이 지속적으로 높아지고 있다. 하지만, 이러한 막여과 기술에는 fouling이 발생시 효율저감, flux저감, 소모에너지 증대 등 문제점이 발생한다. 이러한 fouling저감을 위해 막 표면특성분석을 통한 기초연구가 필요하다고 보고 이 연구를 진행하였다. AFM을 이용하여 CML입자와 막의 상호작용을 통해 초기 막오염 경향을 예측할 수 있다.