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http://dx.doi.org/10.3795/KSME-A.2015.39.5.461

Vibration Analysis of AFM Microcantilevers Using an Equivalent Stiffness Element Model  

Han, Dong Hee (Dept. of Mechanical Information Engineering, University of Seoul)
Kim, Il Kwang (Dept. of Mechanical Information Engineering, University of Seoul)
Lee, Soo Il (Dept. of Mechanical Information Engineering, University of Seoul)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.39, no.5, 2015 , pp. 461-466 More about this Journal
Abstract
Atomic force microscopy (AFM) is powerful tool for determining properties of samples based on interactions between the sample surface and an approaching probe tip. In this study, we modeled the interactions between the sample and the tip of the AFM microcantilever as a single nonlinear spring with an equivalent stiffness element and simulated the dynamic behaviors of the AFM microcantilevers using the finite element method (FEM) and ANSYS software. With the simulation results, we analyzed the complex dynamic responses of the AFM cantilever using proper orthogonal decomposition (POD). In addition, we compared the simulation and experimental results using the same method. Consequently, we suggest an effective method to express the interaction between the tip and sample, and we confirm that the influence of the higher order model due to the interaction between the tip and sample is increased.
Keywords
Atomic Force Microscope; Proper Orthogonal Decomposition; Finite Element Method; Microcantilever;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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