Pitch Measurement of 150 nm 1D-grating Standards Using an Nano-metrological Atomic Force Microscope |
Jonghan Jin
(Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST))
Ichiko Misumi (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST) Satoshi Gonda (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST) Tomizo Kurosawa (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST)) |
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