• Journal of Sensor Science and Technology
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• v.19 no.3
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• pp.214-220
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• 2010

Three-dimensional(3D) structure of specific DNA can be changed between two conformations under an external environmental transition such as pH and salt concentration variations. We have experimentally observed the conformational transitions of i-motif DNA using AFM cantilever bioassay. It is shown that pH change of a solvent induces the bending defleciton change of a cantilever functionalized by i-motif DNA. This indicates that cantilever bioassay enables the label-free detection of DNA structural changes upon pH change. It is implied that cantilever bioassay can be a de novo route to quantitatively understand the conformational transitions of biological molecules under environmental changes.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.30-36
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• 2014

Many different cells types have been found to be highly sensitive to mechanical force imposed by their surroundings. The cellular response to external mechanical forces has very important effects on numerous biological phenomena. In spite of its importance in biological processes, the cell adhesion force remains difficult to measure quantitatively at the cellular level. In this paper, to enhance quantitative measurements of cell adhesive interactions, a new attaching system and a method in which a glass bead can be attached to an AFM cantilever was designed and fabricated, and the degree of range displacement was controlled in the system. In an experiment, the movement of the stage in the attaching system and the attaching process were measured. The effectiveness of this system was confirmed as well in the experiment. In addition, through a commercial AFM system, the spring constant of the modified AFM probe could be measured.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.8
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• pp.875-881
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• 2004

Fundamental results obtained from an atomic force microscope (AFM) chemically-induced direct nano-lithography process are presented, which is regarded as a simple method for fabrication nm-scale devices such as superconducting flux flow transistors (SFFTs) and single electron tunneling transistors (SETs). Si cantilevers with Pt coating and with 30 nm thick TiO coating were used as conducting AFM tips in this study. We observed the surfaces of superconducting strip lines modified by AFM anodization' process. First, superconducting strip lines with scan size 2 ${\mu}{\textrm}{m}$${\times}$2 ${\mu}{\textrm}{m}$ have been anodized by AFM technology. The surface roughness was increased with the number of AFM scanning, The roughness variation was higher in case of the AFM tip with a positive voltage than with a negative voltage in respect of the strip surface. Second, we have patterned nm-scale oxide lines on ${YBa}-2{Cu}_3{O}_{7-x}$ superconducting microstrip surfaces by AFM conductive cantilever with a negative bias voltage. The ${YBa}-2{Cu}_3{O}_{7-x}$ oxide lines could be patterned by anodization technique. This research showed that the critical characteristics of superconducting thin films were be controlled by AFM anodization process technique. The AFM technique was expected to be used as a promising anodization technique for fabrication of an SFFT with nano-channel.

• Tribology and Lubricants
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• v.28 no.6
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• pp.289-296
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• 2012

Atomic force microscopy (AFM) has been used for imaging surfaces and measuring surface forces at the nano-scale. Force calibration is important for the quantitative measurement of forces at the nano-scale using AFM. Normal force calibration is relatively straightforward, whereas the lateral force calibration is more complicated since the lateral stiffness of the cantilever is often comparable to the contact stiffness. In this work, the lateral force calibrations of the rectangular cantilever were performed using torsional Sader's method, thermal noise method, and wedge calibration method. The lateral optical lever sensitivity for the thermal noise method was determined from the friction loop under various normal forces as well. Experimental results showed that the discrepancies among the results of the different methods were as large as 30% due to the effect of the contact stiffness on the lateral force calibration of the cantilever used in this work. After correction for the effect of contact stiffness, all the calibration results agreed with each other, within experimental uncertainties.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.5
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• pp.478-484
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• 2014

Ultrasonic atomic force microscopy(Ultrasonic-AFM) can be used to obtain images of the elastic properties of a subsurface and to evaluate the elastic properties by measuring the contact resonance frequency. When a tip is in contact with the sample, it is necessary to understand the cantilever behavior and the tip-sample interaction for the quantitative and reliable analysis. Therefore, precise analysis models that can accurately simulate the tip-sample contact are required; these can serve as good references for predicting the contact resonance frequency. In this study, modal analyses of the first four modes were performed to calculate the contact resonance frequency by using a spring model, and the deformed shapes of the cantilever were visualized at each mode. We presented the contact characteristics of the cantilever with a variety of contact conditions by applying the contact area, contact material thickness, and material properties as the parameters for the FEM analysis.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.04a
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• pp.88-89
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• 2014

In dynamic force microscopy, the cantilever oscillates at a resonant frequency, and the tip deflection is measured at this frequency. The cantilever deflection is, however, highly nonlinear, and the surface properties can be embedded in the deflection at the frequencies other than the original resonant frequency of the cantilever. Multifrequency atomic force microscopy includes the excitation and detection of the deflection in two or more frequencies which are higher harmonics or eigenmodes. This can overcome the limitations of conventional atomic force microscope. We reviewed the multifrequency atomic force microscopy and its applications in many fields.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.31-35
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• 2000

A cantilever deflection measurement system for AFM(atomic force microscope) was constructed by the laser deflection method using LEP type PSD. Design process including sensitivity analysis was presented and the performance of the system was demonstrated by several experiments using a sample specimen with 50nm-step on the surface. The measured displacement-amplification-factor showed good agreement with the expected one with about 8% deviation. The step height measurement data were compared to what were acquired by commercial AFM, and the result showed that there were about 5nm-deviation between the two data. These results satisfies our expectation in the stage of system design.

• Structural Engineering and Mechanics
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• v.82 no.6
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• pp.747-756
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• 2022

This study presents the nonlinear free and forced vibrations of a cracked atomic force microscopy (AFM) cantilever by using the modified couple stress. The cracked section of the AFM cantilever is considered and modeled as rotational spring. In the frame work of Euler-Bernoulli beam theory, Von-Karman type of geometric nonlinear equation and the modified couple stress theory, the nonlinear equation of motion for the cracked AFM is derived by Hamilton's principle and then discretized by using the Galerkin's method. The semi-inverse method is utilized for analysis nonlinear free oscillation of the system. Then the method of multiple scale is employed to investigate primary resonance of the system. Some numerical examples are presented to illustrate the effects of some parameters such as depth of the crack, length scale parameter, Tip-Mass, the magnitude and the location of the external excitation force on the nonlinear free and forced vibration behavior of the system.

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.