• 제목/요약/키워드: AFM/LFM

검색결과 15건 처리시간 0.017초

접촉각 측정과 AFM/LFM을 이용한 불화 유기박막의 특성 평가 (Characterization of Fluorocarbon Thin Films by Contact Angle Measurements and AFM/LFM)

  • 김준성;차남구;이강국;박진구;신형재
    • 마이크로전자및패키징학회지
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    • 제7권1호
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    • pp.35-40
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    • 2000
  • Teflon-like fluorocarbon thin film was deposited on various substrates by vapor deposition using PFDA (perfluorodecanoic acid). The fluorocarbon films were characterized by static/dynamic contact angle analysis, VASE (Variable-angle Spectroscopic Ellipsometry) and AFM/LFM (Atomic/Lateral Force Microscopy). Based on Lewis Acid/Base theory, the surface energy ($S_{E}$) of the films was calculated by the static contact angle measurement. The work of adhesion (WA) between de-ionized water and substrates was calculated by using the static contact data. The fluorocarbon films showed very similar values of the surface energy and work of adhesion to Teflon. All films showed larger hysteresis than that of Teflon. The roughness and relative friction force of films were measured by AFM and LFM. Even though the small reduction of surface roughness was found on film on $SiO_2$surface, the large reduction of relative friction farce was observed on all films. Especially the relative friction force on TEOS was decreased a quarter after film deposition. LFM images showed the formation of "strand-like"spheres on films that might be the reason far the large contact angle hysteresis.

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모발의 나노 트라이볼러지 특성해명을 위한 원자현미경(Atomic Force Microscopy) 프로브의 개발 (A New Design of AFM Probe for Nanotribological Characterizations Measurement of Human Hair)

  • 권현규;고언위
    • 반도체디스플레이기술학회지
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    • 제14권4호
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    • pp.1-7
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    • 2015
  • People are always pursuing the aesthetic feeling relentlessly. But some people have such problems with their hairs like alopecia, cancer chemotherapy, burns, and scalp injury. So the synthetic hair has played a very important role to make up for these deficiencies. But long term use can lead to adverse reactions or uncomfortable feeling. This is primarily caused by its properties differ with human hair. In particular, nanotribological characterizations (roughness, friction force and adhesive force) of synthetic hair surface are dissatisfy with the needs of normal hairs. This paper presents the experiments on nanotribological characterizations measurements of human hairs (coloring hair, permed hair and common hair) in shampooing condition or without shampooing condition. Using atomic force microscopy (AFM) to find out a range of synthetic hair nanotribological characterizations which can correspond with natural hair. The measurements of nanotribological characterizations focus on surface roughness, friction force and adhesive force, and a new design of AFM probe was used for measuring the nanotribological characterizations.

SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구 (Nanotribological Characteristics of Plasma Treated Hydrophobic Thin Films on Silicon Surfaces using SPM)

  • 윤의성;양승호;공호성;고석근
    • Tribology and Lubricants
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    • 제19권2호
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    • pp.109-115
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    • 2003
  • Nanotribological characteristics between a Si$_3$N$_4$ AFM tip and hydrophobic thin films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM (atomic force microscope) and LFM (lateral force microscope) modes in various .ranges of normal load. Plasma-modified thin polymeric films were deposited on Si-wafer (100). Results showed that wetting angle of plasma-modified thin polymeric film increased with the treating time, which resulted in the hydrophobic surface and the decrease of adhesion and friction. Nanotribological characteristics of these surfaces were compared with those of other hydrophobic surfaces, such as DLC, OTS and IBAD-Ag coated surfaces. Those of OTS coated surface were superior to those of others, though wetting angle of plasma-modified thin polymeric film is higher.

Cu Oxide와 Silicon Tip 사이의 나노트라이볼러지 작용 (Nanotribological Behavior of Cu Oxide and Silicon Tip)

  • 김태곤;김인권;박진구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.364-365
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    • 2005
  • This paper report nanotribological behavior between Si tip and Cu wafer surfaces which was treated various concentration of $H_2O_2$. This experimental approach has proven atomic level insight into Cu CMP. It has been used to study interfacial friction and adhesion force between Si tip and Cu wafer surfaces in air by atomic force microscopy (AFM). Adhesion force of Cu surfaces which was pre-cleaned in diluted HF solution was lager than Cu oxide surfaces. Adhesion force of Cu oxide surface was saturated around 7 nN. Slope of normal force vs lateral signal was increased as increasing concentration of $H_2O_2$ and it was saturated around 24. Friction force of Cu oxide was lager than Cu.

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IBAD로 표면개질된 실리콘표면의 나노 트라이볼로지적 특성 (Nanotribological characteristics of silicon surfaces modified by IBAD)

  • 윤의성;박지현;양승호;공호성;장경영
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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    • pp.127-134
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    • 2001
  • Nano adhesion and friction between a Sj$_3$N$_4$ AFM tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various ranges of normal load. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and Si-wafer of different surface roughness were used. Results showed that nano adhesion and friction decreased as the surface roughness increased. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the normal load was low.

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생체모사 지질을 이용한 모발 표면에 공유 결합된 지방산 단분자층의 회복 (Recovery of Covalently Linked Fatty Acid Monolayer on the Hair Surface Using Biomimetic Lipid)

  • 김의숙;손성길;이천구
    • 대한화장품학회지
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    • 제38권2호
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    • pp.139-145
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    • 2012
  • 모발표면에는 독특한 형태의 지방산이 있다. 18-methyleicosanoic acid (18-MEA)는 모발 큐티클의 최외각 층에 공유결합된 특이한 ante-iso 형태의 지방산이다. 18-MEA 층은 CMC의 ${\beta}$-층 위에 위치하면서 모발의 외부 표면에 표면에너지와 마찰저항 을 낮춰준다. 18-MEA 분자의 높은 유동성은 계면 전단력을 감소시켜 외부로부터 전달되는 지질들이 쉽게 퍼지도록 한다. 본 연구에서는 C10 - 40 isoalkyl acid의 말단에 관능기로 N-hydroxyl succinimidyl ester를 도입하여 모발 표면의 공유결합 지방산 층을 회복시켜보고 자 하였다. 모발 표면의 재 소수화를 확인하기 위하여 접촉각을 측정하였다. 서로 다른 습도 조건(40, 55, 70 %RH)에서 모발의 내부 수 분 함유량은 전자 수분 분석기를 이용하여 실시하였다. Hydroxysuccinimidyl C10 - 40 Isoalkyl Acidate (HCIA)로 처리한 모발의 표면은 큐티클을 접착하는 것과 같이 지방산 단분자층이 공유결합을 형성하여 큐티클의 균열을 채워줌으로써 매끄럽고 균일할 것으로 생각되었다. 이러한 접착 효과는 atomic force microscope (AFM) 영상의 라인 프로필(line profile)을 통해서 확인되었다. 따라서 모발 내부 구 성 물질과 수분이 쉽게 용출되지 않고, 외기의 습도가 변하는 경우에도 최적의 모발 습도가 항상 유지된다. AFM을 사용한 lateral force microscopy (LFM) 결과에 따르면 HCIA를 처리한 모발 표면의 마찰력이 감소되었고, 이에 대해 15회 샴푸 과정을 수행한 이후에도 동일한 마찰력 값을 나타내었다.

IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성 (Nanotribological Characteristics of Silicon Surfaces Modified by IBAD)

  • 박지현;양승호;공호성;장경영;윤의성
    • Tribology and Lubricants
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    • 제18권1호
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    • pp.1-8
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    • 2002
  • Nano adhesion and friction between a $Si_{3}N_{4}$ AFM(atomic force microscope) tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM and LFM(lateral force microscope) modes in various range of normal loads. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and other Si-wafers of different surface roughness were used. Results showed that nano adhesion and friction decreased with the surface roughness. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the load was low.

SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구 (Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM)

  • 윤의성;박지현;양승호;한흥구;공호성;고석근
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2001년도 제34회 추계학술대회 개최
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    • pp.35-42
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    • 2001
  • Nanotribological characteristics between a Si$_3$N$_4$ AFM tip and hydrophobic thin films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various ranges of normal load. Plasma-modified thin polymeric films were deposited on Si-wafer (100). Results showed that wetting angle of plasma-modified thin polymeric film increased with the treating time, which resulted in the hydrophobic surface and the decrease of adhesion and friction. Nanotribological characteristics of these surfaces were compared with those of other hydrophobic surfaces, such as DLC, OTS and IBAD-Ag coated surfaces. Those of OTS coated surface was superior to those of others, though wetting angle of plasma-modified thin polymeric film is higher.

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SPM을 이용한 접촉조건 변화에 따른 미소응착 및 마찰특성에 관한 연구 (A study on the Nano adhesion and Friction at Different Contact Conditions using SPM)

  • 윤의성;박지현;양승호;공호성
    • Tribology and Lubricants
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    • 제17권3호
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    • pp.191-197
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    • 2001
  • Nano adhesion and friction characteristics between SPM(scanning electron microscope) tips and flat plates of different materials were experimentally studied. Tests were performed to measure adhesion and friction in AFM(atomic force microscope) and LFM(lateral force microscope) modes in different conditions of relative humidity. Three different Si$_3$N$_4$ tips (rdaii : 15nm, 22nm and 50 nm) and three different flat plates of Si-wafer(100), W-DLC(tungsten-incorporated diamond-like carbon) and DLC were used. Results generally showed that adhesion and friction increased with the tip radius, and W-DLC and DLC surfaces were superior to Si-wafer. But the adhesion force of Si-wafer showed non linearity with the tip radius while W-DLC and DLC surfaces showed good correlation to the “JKR model”. It was found that high adhesion force between Si-wafer and a large radius of tip was caused by a capillary action due to the condensed water.

OTS SAM의 미소 응착 특성에 관한 실험적 연구 (An Experimental Study on the Nano-adhesion of Octadecyltrichlorosilane SAM on the Si Surface)

  • 윤의성;박지현;양승호;한흥구;공호성
    • Tribology and Lubricants
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    • 제17권4호
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    • pp.276-282
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    • 2001
  • Nano adhesion between SPM (scanning probe microscope) tips and 075 (octadecyltrichlorosilane) SAM (self-assembled monolayer) was experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various conditions of relative humidity. OTS SAM was formed on Si-wafer (100) surfaces, and Si$_3$N$_4$ tips of different radius of curvature were used. When the surface was hydrophobic, the adhesion and friction forces were found lower than those of bare Si-wafer. Results also showed that micro-adhesion force increased as the relative humidity and the tip radius of curvature increased. The main parameter for affecting the micro-adhesion was found absorbed humidity on the contact surface. These results were discussed with the JKR model and a capillary force caused by absorbed water.